Patents by Inventor Yugang Guo
Yugang Guo has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20220370564Abstract: The present disclosure relates to new agents useful for anti-cancer therapy such as anti-cancer adoptive T-cell transfer (ACT) immunotherapy or immune check-point blockade therapy and related compositions, uses and methods thereof.Type: ApplicationFiled: September 18, 2020Publication date: November 24, 2022Inventors: Yugang GUO, Li TANG, Yu-Qing XIE
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Patent number: 9624596Abstract: The present invention is to provide a substrate holder which can effect a more complete sealing with a sealing member and makes it possible to take a substrate out of the substrate holder easily and securely, and also a plating apparatus provided with the substrate holder. The substrate holder includes: a fixed holding member and a movable holding member for holding a substrate therebetween; a sealing member mounted to the fixed holding member or the movable holding member; and a suction pad for attracting a back surface of the substrate held between the fixed holding member and the movable holding member.Type: GrantFiled: June 13, 2016Date of Patent: April 18, 2017Assignee: EBARA CORPORATIONInventors: Junichiro Yoshioka, Kuniaki Horie, Yugang Guo, Satoshi Morikami
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Patent number: 9593430Abstract: The present invention is to provide a substrate holder which can effect a more complete sealing with a sealing member and makes it possible to take a substrate out of the substrate holder easily and securely, and also a plating apparatus provided with the substrate holder. The substrate holder includes: a fixed holding member and a movable holding member for holding a substrate therebetween; a sealing member mounted to the fixed holding member or the movable holding member; and a suction pad for attracting a back surface of the substrate held between the fixed holding member and the movable holding member.Type: GrantFiled: June 13, 2016Date of Patent: March 14, 2017Assignee: EBARA CORPORATIONInventors: Junichiro Yoshioka, Kuniaki Horie, Yugang Guo, Satoshi Morikami
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Patent number: 9506162Abstract: The present invention is to provide a substrate holder which can effect a more complete sealing with a sealing member and makes it possible to take a substrate out of the substrate holder easily and securely, and also a plating apparatus provided with the substrate holder. The substrate holder includes: a fixed holding member and a movable holding member for holding a substrate therebetween; a sealing member mounted to the fixed holding member or the movable holding member; and a suction pad for attracting a back surface of the substrate held between the fixed holding member and the movable holding member.Type: GrantFiled: June 13, 2016Date of Patent: November 29, 2016Assignee: Ebara CorporationInventors: Junichiro Yoshioka, Kuniaki Horie, Yugang Guo, Satoshi Morikami
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Publication number: 20160319454Abstract: The present invention is to provide a substrate holder which can effect a more complete sealing with a sealing member and makes it possible to take a substrate out of the substrate holder easily and securely, and also a plating apparatus provided with the substrate holder. The substrate holder includes: a fixed holding member and a movable holding member for holding a substrate therebetween; a sealing member mounted to the fixed holding member or the movable holding member; and a suction pad for attracting a back surface of the substrate held between the fixed holding member and the movable holding member.Type: ApplicationFiled: June 13, 2016Publication date: November 3, 2016Inventors: Junichiro YOSHIOKA, Kuniaki HORIE, Yugang GUO, Satoshi MORIKAMI
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Publication number: 20160319455Abstract: The present invention is to provide a substrate holder which can effect a more complete sealing with a sealing member and makes it possible to take a substrate out of the substrate holder easily and securely, and also a plating apparatus provided with the substrate holder. The substrate holder includes: a fixed holding member and a movable holding member for holding a substrate therebetween; a sealing member mounted to the fixed holding member or the movable holding member; and a suction pad for attracting a back surface of the substrate held between the fixed holding member and the movable holding member.Type: ApplicationFiled: June 13, 2016Publication date: November 3, 2016Inventors: Junichiro YOSHIOKA, Kuniaki HORIE, Yugang GUO, Satoshi MORIKAMI
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Publication number: 20160319456Abstract: The present invention is to provide a substrate holder which can effect a more complete sealing with a sealing member and makes it possible to take a substrate out of the substrate holder easily and securely, and also a plating apparatus provided with the substrate holder. The substrate holder includes: a fixed holding member and a movable holding member for holding a substrate therebetween; a sealing member mounted to the fixed holding member or the movable holding member; and a suction pad for attracting a back surface of the substrate held between the fixed holding member and the movable holding member.Type: ApplicationFiled: June 13, 2016Publication date: November 3, 2016Inventors: Junichiro YOSHIOKA, Kuniaki HORIE, Yugang GUO, Satoshi MORIKAMI
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Patent number: 9388505Abstract: The present invention is to provide a substrate holder which can effect a more complete sealing with a sealing member and makes it possible to take a substrate out of the substrate holder easily and securely, and also a plating apparatus provided with the substrate holder. The substrate holder includes: a fixed holding member and a movable holding member for holding a substrate therebetween; a sealing member mounted to the fixed holding member or the movable holding member; and a suction pad for attracting a back surface of the substrate held between the fixed holding member and the movable holding member.Type: GrantFiled: December 10, 2014Date of Patent: July 12, 2016Assignee: Ebara CorporationInventors: Junichiro Yoshioka, Kuniaki Horie, Yugang Guo, Satoshi Morikami
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Publication number: 20150136610Abstract: The present invention is to provide a substrate holder which can effect a more complete sealing with a sealing member and makes it possible to take a substrate out of the substrate holder easily and securely, and also a plating apparatus provided with the substrate holder. The substrate holder includes: a fixed holding member and a movable holding member for holding a substrate therebetween; a sealing member mounted to the fixed holding member or the movable holding member; and a suction pad for attracting a back surface of the substrate held between the fixed holding member and the movable holding member.Type: ApplicationFiled: December 10, 2014Publication date: May 21, 2015Inventors: Junichiro YOSHIOKA, Kuniaki HORIE, Yugang GUO, Satoshi MORIKAMI
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Patent number: 8936705Abstract: The present invention is to provide a substrate holder which can effect a more complete sealing with a sealing member and makes it possible to take a substrate out of the substrate holder easily and securely, and also a plating apparatus provided with the substrate holder. The substrate holder includes: a fixed holding member and a movable holding member for holding a substrate therebetween; a sealing member mounted to the fixed holding member or the movable holding member; and a suction pad for attracting a back surface of the substrate held between the fixed holding member and the movable holding member.Type: GrantFiled: November 26, 2012Date of Patent: January 20, 2015Assignee: Ebara CorporationInventors: Junichiro Yoshioka, Kuniaki Horie, Yugang Guo, Satoshi Morikami
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Patent number: 8337680Abstract: The present invention is to provide a substrate holder which can effect a more complete sealing with a sealing member and makes it possible to take a substrate out of the substrate holder easily and securely, and also a plating apparatus provided with the substrate holder. The substrate holder includes: a fixed holding member and a movable holding member for holding a substrate therebetween; a sealing member mounted to the fixed holding member or the movable holding member; and a suction pad for attracting a back surface of the substrate held between the fixed holding member and the movable holding member.Type: GrantFiled: January 31, 2011Date of Patent: December 25, 2012Assignee: Ebara CorporationInventors: Junichiro Yoshioka, Kuniaki Horie, Yugang Guo, Satoshi Morikami
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Patent number: 8317993Abstract: A plating apparatus has a steam treatment chamber configured to perform a steam treatment using steam on a surface of a substrate, and a plating chamber configured to plate the surface of the substrate subjected to the steam treatment. The plating apparatus also has an acid treatment chamber configured to bring the surface of the substrate subjected to the steam treatment into contact with an acid liquid. The plating apparatus includes a frame housing the steam treatment chamber, the acid treatment chamber, and the plating chamber.Type: GrantFiled: August 18, 2009Date of Patent: November 27, 2012Assignee: Ebara CorporationInventors: Fumio Kuriyama, Rei Kiumi, Nobutoshi Saito, Takashi Takemura, Masaaki Kimura, Sachiko Takeda, Yugang Guo
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Patent number: 8133376Abstract: A plating method and a plating apparatus, which has a plurality of plating units, for plating a substrate. Each of the plating units includes a plating tank for containing a plating solution therein, a water cleaning tank, disposed adjacent to said plating tank for cleaning the substrate with water, a substrate holder for holding the substrate in a vertical orientation, a vertical displacing mechanism for vertically dipping the substrate holder and a substrate held thereby in the plating solution in the plating tank, and a lateral displacing mechanism or a back-and-forth displacing mechanism for moving the substrate holder while holding the substrate in a vertical orientation between the plating tank and the water cleaning tank. The plating unit also includes a loading/unloading station for loading and unloading the substrate, and a transfer device for transferring the substrate between the plating unit and the loading/unloading station.Type: GrantFiled: August 30, 2010Date of Patent: March 13, 2012Assignee: Ebara CorporationInventors: Junichiro Yoshioka, Seiji Katsuoka, Masahiko Sekimoto, Yasuhiko Endo, Yugang Guo
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Publication number: 20110127159Abstract: The present invention is to provide a substrate holder which can effect a more complete sealing with a sealing member and makes it possible to take a substrate out of the substrate holder easily and securely, and also a plating apparatus provided with the substrate holder. The substrate holder includes: a fixed holding member and a movable holding member for holding a substrate therebetween; a sealing member mounted to the fixed holding member or the movable holding member; and a suction pad for attracting a back surface of the substrate held between the fixed holding member and the movable holding member.Type: ApplicationFiled: January 31, 2011Publication date: June 2, 2011Inventors: Junichiro Yoshioka, Kuniaki Horie, Yugang Guo, Satoshi Morikami
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Patent number: 7901551Abstract: The present invention is to provide a substrate holder which can effect a more complete sealing with a sealing member and makes it possible to take a substrate out of the substrate holder easily and securely, and also a plating apparatus provided with the substrate holder. The substrate holder includes: a fixed holding member and a movable holding member for holding a substrate therebetween; a sealing member mounted to the fixed holding member or the movable holding member; and a suction pad for attracting a back surface of the substrate held between the fixed holding member and the movable holding member.Type: GrantFiled: September 4, 2009Date of Patent: March 8, 2011Assignee: Ebara CorporationInventors: Junichiro Yoshioka, Kuniaki Horie, Yugang Guo, Satoshi Morikami
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Publication number: 20100320090Abstract: A plating method and a plating apparatus, which has a plurality of plating units, for plating a substrate. Each of the plating units includes a plating tank for containing a plating solution therein, a water cleaning tank, disposed adjacent to said plating tank for cleaning the substrate with water, a substrate holder for holding the substrate in a vertical orientation, a vertical displacing mechanism for vertically dipping the substrate holder and a substrate held thereby in the plating solution in the plating tank, and a lateral displacing mechanism or a back-and-forth displacing mechanism for moving the substrate holder while holding the substrate in a vertical orientation between the plating tank and the water cleaning tank. The plating unit also includes a loading/unloading station for loading and unloading the substrate, and a transfer device for transferring the substrate between the plating unit and the loading/unloading station.Type: ApplicationFiled: August 30, 2010Publication date: December 23, 2010Inventors: Junichiro YOSHIOKA, Seiji Katsuoka, Masahiko Sekimoto, Yasuhiko Endo, Yugang Guo
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Patent number: 7807027Abstract: A plating method and a plating apparatus, which has a plurality of plating units, for plating a substrate. Each of the plating units includes a plating tank for containing a plating solution therein, a water cleaning tank, disposed adjacent to said plating tank for cleaning the substrate with water, a substrate holder for holding the substrate in a vertical orientation, a vertical displacing mechanism for vertically dipping the substrate holder and a substrate held thereby in the plating solution in the plating tank, and a lateral displacing mechanism or a back-and-forth displacing mechanism for moving the substrate holder while holding the substrate in a vertical orientation between the plating tank and the water cleaning tank. The plating unit also includes a loading/unloading station for loading and unloading the substrate, and a transfer device for transferring the substrate between the plating unit and the loading/unloading station.Type: GrantFiled: December 3, 2004Date of Patent: October 5, 2010Assignee: Ebara CorporationInventors: Junichiro Yoshioka, Seiji Katsuoka, Masahiko Sekimoto, Yasuhiko Endo, Yugang Guo
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Publication number: 20100000858Abstract: The present invention is to provide a substrate holder which can effect a more complete sealing with a sealing member and makes it possible to take a substrate out of the substrate holder easily and securely, and also a plating apparatus provided with the substrate holder. The substrate holder includes: a fixed holding member and a movable holding member for holding a substrate therebetween; a sealing member mounted to the fixed holding member or the movable holding member; and a suction pad for attracting a back surface of the substrate held between the fixed holding member and the movable holding member.Type: ApplicationFiled: September 4, 2009Publication date: January 7, 2010Inventors: Junichiro Yoshioka, Kuniaki Horie, Yugang Guo, Satoshi Morikami
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Publication number: 20090311429Abstract: A plating apparatus has a steam treatment chamber configured to perform a steam treatment using steam on a surface of a substrate, and a plating chamber configured to plate the surface of the substrate subjected to the steam treatment. The plating apparatus also has an acid treatment chamber configured to bring the surface of the substrate subjected to the steam treatment into contact with an acid liquid. The plating apparatus includes a frame housing the steam treatment chamber, the acid treatment chamber, and the plating chamber.Type: ApplicationFiled: August 18, 2009Publication date: December 17, 2009Inventors: Fumio Kuriyama, Rei Kiumi, Nobutoshi Saito, Takashi Takemura, Masaaki Kimura, Sachiko Takeda, Yugang Guo
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Patent number: 7601248Abstract: The present invention is to provide a substrate holder which can effect a more complete sealing with a sealing member and makes it possible to take a substrate out of the substrate holder easily and securely, and also a plating apparatus provided with the substrate holder. The substrate holder includes: a fixed holding member and a movable holding member for holding a substrate therebetween; a sealing member mounted to the fixed holding member or the movable holding member; and a suction pad for attracting a back surface of the substrate held between the fixed holding member and the movable holding member.Type: GrantFiled: June 20, 2003Date of Patent: October 13, 2009Assignee: Ebara CorporationInventors: Junichiro Yoshioka, Kuniaki Horie, Yugang Guo, Satoshi Morikami