Patents by Inventor Yuh-Haw Chang

Yuh-Haw Chang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Concave and convex micromirrors and methods of making the same
    Patent number: 8691100
    Abstract: A method comprising providing a first substrate and forming a first sacrificial layer over the first substrate, the first sacrificial layer comprising a curved surface portion, and forming a curved micromirror by depositing a reflective material over at the curved surface portion.
    Type: Grant
    Filed: June 9, 2006
    Date of Patent: April 8, 2014
    Assignee: Taiwan Semiconductor Manufacturing Co. Ltd.
    Inventors: Dah-Chuen Ho, Eugene Chu, Yuh-Haw Chang, Fei-Yun Chen, Michael Wu, Eric Chao
  • Concave and convex micromirrors and methods of making the same
    Publication number: 20070285760
    Abstract: A method comprising providing a first substrate and forming a first sacrificial layer over the first substrate, the first sacrificial layer comprising a curved surface portion, and forming a curved micromirror by depositing a reflective material over at the curved surface portion.
    Type: Application
    Filed: June 9, 2006
    Publication date: December 13, 2007
    Inventors: Dah-Chuen Ho, Eugene Chu, Yuh-Haw Chang, Fei-Yun Chen, Michael Wu, Eric Chao