Abstract: A refined microcrystalline electrode manufacturing method is provided. The refined microcrystalline electrode manufacturing method includes the following step. First, an active material electrode layer is subjected to a conventional thermal annealing (CTA) process in an oxygen-containing environment at a first temperature interval to form an active material crystallization precursor; the active material crystallization precursor is subjected to a rapid thermal annealing (RTA) process in the oxygen-containing environment at a second temperature interval to form an active material coating layer with uniformly distributed fine microcrystal grains, wherein the temperature range of the second temperature interval is greater than the temperature range of the first temperature interval. In addition, a thin film battery and a thin film battery manufacturing method are also provided.

Abstract: An apparatus is provided for plating a lithium (Li)-compound thin film. In the thin film, Li is obtained through thermal evaporation, and titanium (Ti) or other metal by using arc plasma. The elements converted into gas phase are co-deposited in a plasma environment with a reaction gas (oxygen) to be activated as excited atoms or molecules for reaction. In the end, all of the constituent elements are deposited on a substrate to form the Li-compound thin film. Thus, reaction efficiency is high with a fast deposition rate. The composition ratio of each element is independently determined to control its yield according to the requirement. Hence, the present invention greatly enhances the fabrication rate with lowered production cost for applications in the thin-film battery industries.

Abstract: An apparatus is provided for plating a lithium (Li)-compound thin film. In the thin film, Li is obtained through thermal evaporation, and titanium (Ti) or other metal by using arc plasma. The elements converted into gas phase are co-deposited in a plasma environment with a reaction gas (oxygen) to be activated as excited atoms or molecules for reaction. In the end, all of the constituent elements are deposited on a substrate to form the Li-compound thin film. Thus, reaction efficiency is high with a fast deposition rate. The composition ratio of each element is independently determined to control its yield according to the requirement. Hence, the present invention greatly enhances the fabrication rate with lowered production cost for applications in the thin-film battery industries.

Abstract: A refine microcrystalline electrode manufacturing method is provided. The refine microcrystalline electrode manufacturing method includes the following step. First, an active material electrode layer is subjected to a conventional thermal annealing (CTA) process in an oxygen-containing environment at a first temperature interval to form an active material crystallization precursor; the active material crystallization precursor is subjected to a rapid thermal annealing (RTA) process in the oxygen-containing environment at a second temperature interval to form an active material coating layer with uniformly distributed fine microcrystal grains, wherein the temperature range of the second temperature interval is greater than the temperature range of the first temperature interval. In addition, a thin film battery and a thin film battery manufacturing method are also provided.

Abstract: A double-sided all-solid-state thin-film lithium battery is provided, which may include a conductive substrate, a first upper electrode layer, a second upper electrode, an upper electrolyte layer, an upper current collecting layer, a first lower electrode layer, a second lower electrode layer, a lower electrolyte layer and a lower current collecting layer. The first upper electrode layer may be disposed at one side of the conductive substrate. The upper electrolyte layer may be disposed between the first and the second upper electrode layer. The upper current collecting layer may be disposed at one side of the second upper electrode layer. The first lower electrode layer may be disposed at the other side of the conductive substrate. The lower electrolyte layer may be disposed between the first and the second lower electrode layer. The lower current collecting layer may be disposed at one side of the second lower electrode layer.

Abstract: A method for manufacturing polycrystalline electrode is provided, which may include the following steps: providing a conductive substrate; using a film coating method to deposit an active material on one side of the conductive substrate by a hydrogen-containing plasma source to form an electrode layer; executing a thermal annealing process for the electrode layer in an oxygen-containing environment. The grains of the polycrystalline electrode manufactured by the method will be more uniform in size, which can significantly increase the volumetric energy density of thin-film battery to significantly improve its performance.

Abstract: A thin film battery structure includes a substrate, a first current collector layer, a first electrode layer array, an electrolyte layer, a second electrode layer, and a second current collector layer. The first current collector layer is disposed on the substrate and has at least one first current collector bump. The first electrode layer array has at least one first electrode layer, where each first electrode layer is disposed on the first current collector layer, and at least one first current collector bump is embedded inside each first electrode layer. Each first electrode layer is embedded inside the electrolyte layer. The second electrode layer is disposed on the electrolyte layer. The second current collector layer is disposed on the second electrode layer.

Abstract: A thin film battery structure includes a substrate, a first current collector layer, a first electrode layer array, an electrolyte layer, a second electrode layer, and a second current collector layer. The first current collector layer is disposed on the substrate and has at least one first current collector bump. The first electrode layer array has at least one first electrode layer, where each first electrode layer is disposed on the first current collector layer, and at least one first current collector bump is embedded inside each first electrode layer. Each first electrode layer is embedded inside the electrolyte layer. The second electrode layer is disposed on the electrolyte layer. The second current collector layer is disposed on the second electrode layer.

Abstract: An apparatus for producing synthetic gas from bio-waste includes a chamber, a feeder, a plasma torch, a steam-providing and water-circulating system and a synthetic gas cleaner. The feeder is in communication with the chamber. The feeder feeds the bio-waste into the chamber. The plasma torch is in communication with the chamber. The plasma torch provides plasma into the chamber for gasifying the bio-waste into the synthetic gas. The steam-providing and water-circulating system circulates water for cooling the chamber and the plasma torch. Furthermore, the steam-providing and water-circulating system and provides steam into the plasma torch for the generation of the plasma. The synthetic gas cleaner is in communication with the chamber. The synthetic gas cleaner receives the produced synthetic gas and polishes it into fuel-class gas.

Abstract: A dust filter has adjustable sub-blades between blades. By adjusting the blades distanced and the sub-blades' positions and angles, stagnation area of filtration material on the blades are removed. Furthermore, space in the dust filter is fully used. Thus, a filtering efficiency is improved.

Abstract: The present invention provides a reactor utilizing high-voltage discharge for processing exhausted hydrogen gas emitted during membrane plating, etching, or washing of semiconductors, where higher than 95% of destruction and removal efficiency (DRE) of hydrogen gas is obtained.

Abstract: A dust filter has adjustable sub-blades between blades. By adjusting the blades' distanced and the sub-blades positions and angles, stagnation area of filtration material on the blades are removed. Furthermore, space in the dust filter is fully used. Thus, a filtering efficiency is improved.