Patents by Inventor Yuichi FURUKI

Yuichi FURUKI has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Semiconductor memory device and method for manufacturing semiconductor memory device
    Patent number: 11276707
    Abstract: According to one embodiment, a semiconductor memory device includes a stacked body disposed in a first tier, the stacked body including a plurality of conductive layers stacked via an insulating layer; a first pillar that extends in the stacked body in a stacking direction of the stacked body; a first upper structure disposed in a second tier upper than the first tier; and a misalignment mark for inspecting misalignment between the first tier and the second tier, wherein the misalignment mark includes a second pillar that extends the first tier of the misalignment inspection region in the stacking direction, and a second upper structure disposed in the second tier of the misalignment inspection region and superposed on the second pillar in a top view.
    Type: Grant
    Filed: March 10, 2020
    Date of Patent: March 15, 2022
    Assignee: Kioxia Corporation
    Inventors: Yuichi Furuki, Hiroki Yamashita
  • SEMICONDUCTOR MEMORY DEVICE AND METHOD FOR MANUFACTURING SEMICONDUCTOR MEMORY DEVICE
    Publication number: 20210066342
    Abstract: According to one embodiment, a semiconductor memory device includes a stacked body disposed in a first tier, the stacked body including a plurality of conductive layers stacked via an insulating layer; a first pillar that extends in the stacked body in a stacking direction of the stacked body; a first upper structure disposed in a second tier upper than the first tier; and a misalignment mark for inspecting misalignment between the first tier and the second tier, wherein the misalignment mark includes a second pillar that extends the first tier of the misalignment inspection region in the stacking direction, and a second upper structure disposed in the second tier of the misalignment inspection region and superposed on the second pillar in a top view.
    Type: Application
    Filed: March 10, 2020
    Publication date: March 4, 2021
    Applicant: Kioxia Corporation
    Inventors: Yuichi FURUKI, Hiroki Yamashita