Abstract: Provided a terahertz-wave detection element with high spatial resolution and suppressing a crack occurrence. A method of manufacturing the detection element capable of detecting a spatial intensity distribution of a terahertz wave includes: a step of forming an oxide layer on one main surface of a first substrate consisting of an electro-optic crystal; a step of joining the one main surface of the first substrate and a second substrate by an adhesive consisting; a step of thinning the first substrate of a joined body, to a thickness of 1-30 ?m by polishing the first substrate; and a step of obtaining a large number of terahertz-wave detection elements by cutting the joined body. The oxide layer is formed such that the first substrate becomes convex to a side of the one main surface by causing a tensile stress to act on it.

Abstract: Provided a terahertz-wave detection element having high spatial resolution in which the occurrence of warping and a crack is suitably suppressed. The detection element includes: an electro-optic crystal layer in which a refractive index at an incident position of the terahertz wave changes in accordance with incident intensity of the terahertz wave; and a substrate supporting the electro-optic crystal layer. The detection element detects a spatial-characteristics distribution generated in probe light in superposition with the terahertz wave, thereby to detect the spatial intensity distribution of the incident terahertz wave. A joined part between the electro-optic crystal and the supporting substrate is an amorphous layer consisting of an oxide including a constituent element of the electro-optic crystal and the substrate, and also having a thickness of 1-50 nm. A thickness of the electro-optic crystal layer is 1-30 ?m.

Abstract: A device for irradiating an electromagnetic wave irradiates an electromagnetic wave having a target frequency in a range of 0.1 THz to 30 THz to the outside of a non-linear optical crystal. The device includes a main body composed of a non-linear optical crystal and a sub wavelength grating structure formed on a surface of the main body. The sub wavelength grating structure includes column shaped bodies regularly arranged on a surface of the main body. Each of the column shaped bodies includes a constant width part having a constant width and a base part provided from the surface toward the constant width part. A surface of the base part has a shape of an arc having a center of curvature in the outside of the base part viewed in a cross section of the column shaped body cut along a direction in which the column shaped bodies are arranged.

Abstract: An optical modulation device 1 includes a supporting body 2 including a pair of grooves 2b, 2c and a protrusion 2d between the grooves, a ridge par 6 including a channel type optical waveguide capable of multi mode propagation, a first side plate part 3A formed in a first side of the ridge part 6, a second side plate part 3B formed in a second side of the ridge part, a first adhesive layer 4A adhering the first side plate part 3A and the supporting body 2, a second adhesive layer 4B adhering the second side plate part 3B and the supporting body 2, and a third adhesive layer 4C adhering the ridge part 6 and the protrusion 2d. The device 1 further includes a first electrode 7A provided on a side face 6b of the ridge part on the first groove side, and a side face 3b and an upper face 3c of the first side plate part, and a second electrode 7B provided on a side face 6c of the ridge part 6 in the second groove side, the second groove 2c and a side face 3b and an upper face 3c of the second side plate part 3B.

Abstract: An optical modulation device 1 includes a supporting body 2 including a pair of grooves 2b, 2c and a protrusion 2d between the grooves, a ridge par 6 including a channel type optical wave guide capable of multi mode propagation, a first side plate part 3A formed in a first side of the ridge part 6, a second side plate part 3B formed in a second side of the ridge part, a first adhesive layer 4A adhering the first side plate part 3A and the supporting body 2, a second adhesive layer 4B adhering the second side plate part 3B and the supporting body 2, and a third adhesive layer 4C adhering the ridge part 6 and the protrusion 2d. The device 1 further includes a first electrode 7A provided on a side face 6b of the ridge part on the first groove side, and a side face 3b and an upper face 3c of the first side plate part, and a second electrode 7B provided on a side face 6c of the ridge part 6 in the second groove side, the second groove 2c and a side face 3b and an upper face 3c of the second side plate part 3B.

Abstract: A device of irradiating an electromagnetic wave irradiates an electromagnetic wave having a target frequency in a range of 0.1 THz to 30 THz to the outside of a crystal. The device includes a main body 7 composed of a non-linear optical crystal and a sub wavelength grating structure 5 formed on a surface of the main body 7. The sub wavelength grating structure 5 includes column shaped bodies 6 regularly arranged on a surface 7a of the main body 7. Each of the column shaped bodies 6 includes a constant width part 6d having a constant width and a base part 6g provided from the surface toward the constant width part 6d. A surface 6b of the base part 6g has a shape of an arc having a center of curvature in the outside of the base part 6g viewed in a cross section of the column shaped body cut along a direction X or Y in which the column shaped bodies are arranged.

Abstract: An optical waveguide device includes a ferroelectric layer having a thickness of 4 ?m-7 ?m; a supporting body; and an adhesive layer adhering a bottom face of the ferroelectric layer and supporting body. The ferroelectric layer includes a ridge comprising a channel optical waveguide, first and second protuberances on opposite sides of the ridge, inner grooves between the ridge and protuberances, respectively, and outer grooves outside of the protuberances, respectively. The outer groove is deeper than the inner groove. The ridge portion has a width of 6.6 ?m-8.5 ?m, a distance of an outer edge of the first protuberance and an outer edge of the second protuberance is 8.6 ?m-20 ?m, the inner groove has a depth of 2.0 ?m-2.9 ?m, and the outer groove has a depth of 2.5 ?m-3.5 ?m.

Abstract: It is provided a device oscillating an electromagnetic wave having a target frequency of 0.1 THz to 30 THz. The device includes a main body made of a non-linear optical crystal and a sub-wavelength grating structure formed on the main body. The sub-wavelength grating structure includes protrusions arranged in first direction “X” and second direction “Y” on the main body, first grooves 3X each provided between the adjacent protrusions and extending in the first direction, and second grooves 3Y each provided between the adjacent protrusions and extending in the second direction. Each of the protrusions includes a pair of first faces opposing in the first direction “X” with each other and a pair of second faces opposing in the second direction “Y” with each other. The width of the first face is made smaller from the main body 7 toward an upper end 2c of the protrusion 2.

Abstract: A thin plate type vibration device 10 includes a vibration layer 2 composed of an oxide single crystal. The vibration layer 2 includes a first main face 2a and a second main face 2b, and further includes a fixed end part 2e, a free end part 2c and a central vibration part 2d provided between the fixed end part and free end part. The device 10 further includes an anchor part 7 composed of an oxide single crystal or a silicon single crystal and bonded to the fixed end part 2e of the vibration layer 2 at the first main face 2a. The device further includes a weight part 6 composed of an oxide single crystal or a silicon single crystal and bonded to the free end part 2c at the first main face 2a.

Abstract: It is provided a wavelength converting device oscillating an idler light having a wavelength of 5 to 10 ?m from a pump light. The wavelength of the idler light is longer than that of the pump light. The wavelength converting device includes a wavelength converting layer 5 of a semiconductor non-linear optical crystal and having a thickness of 50 ?m or smaller. The wavelength converting layer 5 includes a crystal orientation inversion structure wherein crystal orientation of the optical crystal is inverted at a predetermined period and at least one flat main face 5b. The device further includes a Peltier device 2 controlling a temperature of the wavelength converting layer 5; and a clad portion 4 joined with the flat main face 5b of the wavelength converting layer 5 and provided between the wavelength converting layer 5 and the Peltier device 2. The pump light, idler light and signal light satisfies a particular phase matching condition.

Abstract: A device of oscillating an electromagnetic wave having a frequency of 0.1 THz to 3 THz from pump and idler waves by parametric effect. The device includes a supporting body, an oscillating substrate of a non-linear optical crystal, an adhesive layer adhering the supporting body and the oscillating substrate, and a film for reflecting the electromagnetic wave formed on a surface of the supporting body on the side of the adhesive layer. The oscillating substrate has an upper face, a bottom face and an incident face on which the pump wave is made incident, with the adhesive layer having a refractive index with respect to the pump wave lower than that of the oscillating substrate.

Abstract: An oscillating device includes an oscillating substrate of a non-linear optical crystal and having an incident face where a pump wave and an idler wave are made incident; a first waveguide provided in the oscillating substrate and between the incident face and an interacting part of the pump wave and idler waves; and a second waveguide provided in the oscillating substrate and between the incident face and the interacting part. The first waveguide guides the pump wave and the second waveguide guides the idler wave.

Abstract: A device for oscillating an electromagnetic wave having a frequency of 0.1 THz to 3 THz from pump and idler waves by a parametric effect. The device includes a supporting body, an oscillating substrate made of a non-linear optical crystal, and an adhesive layer adhering the supporting body and oscillating substrate. The oscillating substrate includes an upper face, a bottom face and an incident face on which the pump wave is made incident. The oscillating substrate provides cut-off with respect to the electromagnetic wave oscillated by the parametric effect when the pump and idler waves propagate in parallel with the bottom face.

Abstract: A ceramic honeycomb filter including trapping holes forming lattices is used to detect particulates trapped in the filter. An electromagnetic wave is transmitted to the filter in a plane perpendicular to the longitudinal direction of the trapping hole. The electromagnetic wave after the electromagnetic wave passes through the filter is received and the particulates trapped in the filter are detected on the base of a received intensity of the electromagnetic wave. The electromagnetic wave has a frequency of 0.294 c/a or more and c/a or less (a represents a lattice spacing of said trapping holes and c represents the speed of light). The electromagnetic wave is irradiated to the filter wherein the particulates are not trapped and an inclined angle ? of the electromagnetic wave with respect to the lattices is changed so as to increase a received intensity of the electromagnetic wave.

Abstract: An optical waveguide device includes a ferroelectric layer having a thickness of 4 ?m-7 ?m; a supporting body; and an adhesive layer adhering a bottom face of the ferroelectric layer and supporting body. The ferroelectric layer includes a ridge comprising a channel optical waveguide, first and second protuberances on opposite sides of the ridge, inner grooves between the ridge and protuberances, respectively, and outer grooves outside of the protuberances, respectively. The outer groove is deeper than the inner groove. The ridge portion has a width of 6.6 ?m-8.5 ?m, a distance of an outer edge of the first protuberance and an outer edge of the second protuberance is 8.6 ?m-20 ?m, the inner groove has a depth of 2.0 ?m-2.9 ?m, and the outer groove has a depth of 2.5 ?m-3.5 ?m.

Abstract: A ceramic honeycomb filter including trapping holes forming lattices is used to detect particulates trapped in the filter. An electromagnetic wave is transmitted to the filter in a plane perpendicular to the longitudinal direction of the trapping hole. The electromagnetic wave after the electromagnetic wave passes through the filter is received and the particulates trapped in the filter are detected on the base of a received intensity of the electromagnetic wave. The electromagnetic wave has a frequency of 0.294 c/a or more and c/a or less (a represents a lattice spacing of said trapping holes and c represents the speed of light). The electromagnetic wave is irradiated to the filter wherein the particulates are not trapped and an inclined angle ? of the electromagnetic wave with respect to the lattices is changed so as to increase a received intensity of the electromagnetic wave.

Abstract: A first main face of a substrate of a dielectric single crystal is etched to form recesses in the substrate. A second main face of the substrate is mechanically processed to form a slab, so that the recesses pass through the substrate to form through holes.

Abstract: An optical modulator component 2 has a substrate 4 for modulation made of an electro-optical material and having a joining face 4b; an optical waveguide 6 provided in or on the substrate 4 and having at least one pair of branched portions 6c; and a radio-frequency interaction portion 11 applying a voltage on the respective branched portions 6c to modulate light propagating through the branched portions. The optical waveguide 6 has end faces 15A, 15B, 15C and 15D present on the joining face 4b of the substrate 4 for modulation.

Abstract: It is provided a device of oscillating an electromagnetic wave having a frequency of 0.1 THz to 3 THz from pump and idler waves by parametric effect. The device includes a supporting body 13, an oscillating substrate 11 of a non-linear optical crystal, an adhesive layer 12 adhering the supporting body 13 and oscillating substrate 11, and a film 15 reflecting the electromagnetic wave formed on a surface of the supporting body 13 on the side of the adhesive layer 12. The oscillating substrate 11 has an upper face, a bottom face and an incident face on which the pump wave is made incident. The adhesive layer 12 has a refractive index with respect to the pump wave lower than that of the oscillating substrate 13.

Abstract: It is provided a device of oscillating an electromagnetic wave having a frequency of 0.1 THz to 3 THz from pump and idler waves 3, 4 by parametric effect. The device includes a supporting body 13, an oscillating substrate 11 made of a non-linear optical crystal, and an adhesive layer 12 adhering the supporting body and oscillating substrate. The oscillating substrate 11 includes an upper face 11a, a bottom face 11f and an incident face 11c on which the pump wave 3 is made incident. The oscillating substrate 11 provides cut-off with respect to the electromagnetic wave 7 oscillated by parametric effect when the pump and idler waves 3, 4 propagate in parallel with the bottom face 11f.