Patents by Inventor Yuichi Kumabe

Yuichi Kumabe has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Alignment system using an electron beam
    Patent number: 4812662
    Abstract: An alignment system for aligning a mask and a wafer each having an alignment mark, includes an irradiation system for irradiating the alignment marks of the mask and the wafer with an electron beam, a detecting system for detecting the amount of electron beam absorbed by the alignment marks, and an adjusting system for adjusting a relative position of the mask and the wafer, in accordance with the detection, so as to bring the mask and the wafer into a predetermined positional relation.
    Type: Grant
    Filed: February 2, 1987
    Date of Patent: March 14, 1989
    Assignee: Canon Kabushiki Kaisha
    Inventors: Susumu Goto, Yuichi Kumabe, Masahiko Okunuki