Patents by Inventor Yuichi Seta

Yuichi Seta has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 5051376
    Abstract: A method for producing a semiconductor device comprises the steps of: preparing a III.sub.b -V.sub.b group compound single crystalline semiconductor substrate produced by a liquid encapsulated Czochralski process, the single crystalline semiconductor substrate having a carbon concentration of 1.times.10.sup.15 cm.sup.-3 or less, implanting conductive impurity ions into the single crystalline semiconductor substrate and then annealing, and a semiconductor device produced by this method.
    Type: Grant
    Filed: January 11, 1990
    Date of Patent: September 24, 1991
    Assignees: Mitsubishi Monsanto Chemical Co, Ltd., Mitsubishi Chemical Industries, Ltd.
    Inventors: Yutaka Yamada, Toshihiko Ibuka, Fumio Orito, Yuichi Seta, Shin-ichiro Kawabata