Abstract: A cantilever for measuring intra-cellular and inter-cellular microspaces of the present invention includes a support portion, a lever portion provided to the support portion so as to protrude therefrom, and a probe portion provided near a free end of the lever portion. The probe portion includes a conductive probe made of a carbon-based material, and an insulating film to coat a periphery of the conductive probe.

Abstract: A cantilever for measuring intra-cellular and inter-cellular microspaces of the present invention includes a support portion, a lever portion provided to the support portion so as to protrude therefrom, and a probe portion provided near a free end of the lever portion. The probe portion includes a conductive probe made of a carbon-based material, and an insulating film to coat a periphery of the conductive probe.

Abstract: A cantilever for measuring intra-cellular and inter-cellular microspaces of the present invention includes a support portion, a lever portion provided to the support portion so as to protrude therefrom, and a probe portion provided near a free end of the lever portion. The probe portion includes a conductive probe made of a carbon-based material, and an insulating film to coat a periphery of the conductive probe.

Abstract: A heat generating element is constructed of at least a substrate, an insulating film disposed on the substrate, a heat generating portion provided with a thin film resistor disposed on at least a part of the insulating film, and a protective film disposed on the above-described insulating film and the above-described heat generating portion, wherein the above-described substrate and the above-described heat generating portion are composed of the same member. Additionally, a medical therapeutic instrument includes a treatment portion provided with the above-described heat generating element to heat a living body tissue by using the heat generated from the heat generating element and treat the living-body tissue. The heat generating element is mounted on the above-described treatment portion in such a manner that an outer surface of the above-described substrate of the heat generating element serves as a treatment surface.

Abstract: A heating device is constructed such that a heating member made of nickel-chromium or a high melting point metal is held in an electrically insulating member made of an oxide or nitride, and a solder connecting layer consisting of a nickel layer serving as buffer layer and a nickel plating layer serving as solder uniting layer is formed on a surface of the electrically insulating member corresponding to a slender portion of the heating member. An adhesion between the solder connecting layer and the electrically insulating member holding the heating member is thereby improved so that the heating device is achieved as having a high reliability and at the same time as capable of improving heat conducting performance from the heating member to a heated body.

Abstract: A heating device at least having an electrically insulating film formed on a surface of a substrate, a heating member formed on the electrically insulating film, and a protection film formed over the electrically insulating film and the heating member, the electrically insulating film and the protection film containing a silicon nitride film having a silicon cont ent in excess of an elemental ratio of silicon to nitrogen of 3:4.

Abstract: A heat generating element of the present invention includes at least a substrate, an insulating film disposed on the substrate, a heat generating portion provided with a thin film resistor disposed on at least a part of the insulating film, and a protective film disposed on the above-described insulating film and the above-described heat generating portion, wherein the above-described substrate and the above-described heat generating portion are composed of the same member. A medical therapeutic instrument of the present invention includes a treatment portion provided with the above-described heat generating element to heat a living body tissue by using the heat generated from the heat generating element and treat the living-body tissue, wherein the above-described heat generating element is mounted on the above-described treatment portion in such a manner that an outer surface of the above-described substrate of the heat generating element serves as a treatment surface.

Abstract: Disclosed herein is a heating device at least having an electrically insulating film formed on a surface of a substrate, a heating member formed on the electrically insulating film, and a protection film formed over the electrically insulating film and the heating member, the electrically insulating film and the protection film containing a silicon nitride film having a silicon content in excess of an elemental ratio of silicon to nitrogen of 3:4.

Abstract: There is disclosed an optical deflector comprising a mirror structure having a first and second surfaces in a front/back relation, single plate base for holding the mirror structure, and a driver for driving the mirror structure. The mirror structure comprises a pair of supports, a movable plate, and a pair of elastic members for connecting the movable plate and the supports, such that the movable plate is able to rock with respect to the supports. The movable plate has a mirror surface on the second surface. The base has an opening for exposing the mirror surface. The supports of the mirror structure are fixed to the base with the second surfaces of the supports in contact therewith. The driver includes a conductive element formed on the first surface of the movable plate, and magnetic field generating elements fixed on the base.

Abstract: A vibrator comprises a vibrating member and a fixing member. The vibrating member has a pair of support members, a movable plate capable of vibrating with respect to the support members, and a pair of elastic members connecting the support members to the movable plate. The fixing member holds the support members of the vibrating member. A material mainly constituting the fixing member has a larger coefficient of thermal expansion than that of a material mainly constituting the elastic members of the vibrating member.

Abstract: A heating device is constructed such that a heating member made of nickel-chromium or a high melting point metal is held in an electrically insulating member made of an oxide or nitride, and a solder connecting layer consisting of a nickel layer serving as buffer layer and a nickel plating layer serving as solder uniting layer is formed on a surface of the electrically insulating member corresponding to a slender portion of the heating member. An adhesion between the solder connecting layer and the electrically insulating member holding the heating member is thereby improved so that the heating device is achieved as having a high reliability and at the same time as capable of improving heat conducting performance from the heating member to a heated body.

Abstract: A vibrator comprises a vibrating member and a fixing member. The vibrating member has a pair of support members, a movable plate capable of vibrating with respect to the support members, and a pair of elastic members connecting the support members to the movable plate. The fixing member holds the support members of the vibrating member. A material mainly constituting the fixing member has a larger coefficient of thermal expansion than that of a material mainly constituting the elastic members of the vibrating member.

Abstract: There is disclosed an optical deflector comprising a mirror structure having a first and second surfaces in a front/back relation, single plate base for holding the mirror structure, and a driver for driving the mirror structure. The mirror structure comprises a pair of supports, a movable plate, and a pair of elastic members for connecting the movable plate and the supports, such that the movable plate is able to rock with respect to the supports. The movable plate has a mirror surface on the second surface. The base has an opening for exposing the mirror surface. The supports of the mirror structure are fixed to the base with the second surfaces of the supports in contact therewith. The driver includes a conductive element formed on the first surface of the movable plate, and magnetic field generating elements fixed on the base.

Abstract: A device for measuring mean staying time of persons inside a building by processing signals from an entry/exit detector that outputs entry and exit signals when persons enter into and exit from the building. The device includes a staying measurer for determining the number of persons staying inside the building by subtracting the number of exit signals from the number of entry signals, an entry or exit measurer for determining the number of persons who have entered into or exited from the building by counting the entry or exit signals per predetermined period of time, and a calculating section for calculating the mean staying time of persons in the building during such a time period by dividing the number of persons staying inside at the time the unit time has expired by the number of persons who have exited.