Abstract: A container conveying carriage includes a supporting section which supports a container, a container transfer device which transfers the container, and an item supply device which supplies an item stored in the container. The carriage can travel along a traveling path. Also, the container transfer device transfers the container between the supporting section and a container transfer point outside the carriage. Moreover, the item supply device takes out the item from the container and supplies the item to an item supply point outside the carriage.

Abstract: A container conveying carriage includes a supporting section which supports a container, a container transfer device which transfers the container, and an item supply device which supplies an item stored in the container. The carriage can travel along a traveling path. Also, the container transfer device transfers the container between the supporting section and a container transfer point outside the carriage. Moreover, the item supply device takes out the item from the container and supplies the item to an item supply point outside the carriage.

Abstract: A method and apparatus for detecting defects in a pattern are disclosed. The defect detecting method is comprised of a step of dark-field illuminating a patterned object with a directionality and a step for detecting only the defect component by erasing the pattern component in a pattern image formed by the dark-field illumination. The apparatus comprises an illuminating device for dark-field illuminating a patterned object with parallel rays, an image pick-up device for picking up a pattern image, which is disposed just above the pattern, and a data processing circuit for processing the picked up image signal to detect a defect.