Abstract: The bump ball crimping apparatus of the present invention is characterized in comprising an alignment plate 31 for aligning bump balls; a crimping table 32 on which the wafer to which bump balls are to be crimped is mounted; a crimping plate 42 that crimps the bump balls onto the bonding pads of the wafer; a Y-axis moving mechanism 35 that can move the alignment plate 31 in the Y direction and can fasten it at a predetermined position; an X-axis moving mechanism that can move the alignment plate 31 in the X direction and can fasten it at a predetermined position; and a second Y-axis moving mechanism 37 that can move the crimping table 32 in the Y direction and can fasten it at a predetermined position.

Abstract: A bump forming method and apparatus by which no deformed bump having an abnormal shape is formed and no shape correcting process is necessary, the member for handling the bump materials can be easily changed, and the position of the member after the change of the member can be easily adjusted with a desired accuracy, thereby shortening the bump forming process and reducing the manufacturing cost. A positioning member is set above a heating device. Bump materials are inserted into positioning holes of the positioning member and are made to partially protrude from the holes toward a side opposite to the heating device. A semiconductor substrate is positioned onto the positioning member so that the semiconductor substrate faces the protruding side of the bump materials. The bump materials are heated and pressed from the protruding side via the semiconductor substrate so as to form bumps having a specific shape.

Abstract: This invention provides a cantilever type probe card which has undergone a treatment for facilitating perception of the image of probe needles. This invention, in the probe card 1 having disposed at prescribed positions on the probe card main body 2 such probe needles 3 furnished with bent pars 6 having the leading terminals thereof directed toward an object under test, forms in a at least the parts of the probe needles 3 including the bent parts 6 such reflection lowering parts 31 adapted to repress the reflection of light.

Abstract: The bump ball crimping apparatus of the present invention is characterized in comprising an alignment plate 31 for aligning bump balls; a crimping table 32 on which the wafer to which bump balls are to be crimped is mounted; a crimping plate 42 that crimps the bump balls onto the bonding pads of the wafer; a Y-axis moving mechanism 35 that can move the alignment plate 31 in the Y direction and can fasten it at a predetermined position; an X-axis moving mechanism that can move the alignment plate 31 in the X direction and can fasten it at a predetermined position; and a second Y-axis moving mechanism 37 that can move the crimping table 32 in the Y direction and can fasten it at a predetermined position.

Abstract: A bump forming method and apparatus by which no deformed bump having an abnormal shape is formed and no shape correcting process is necessary, the member for handling the bump materials can be easily changed, and the position of the member after the change of the member can be easily adjusted with a desired accuracy, thereby shortening the bump forming process and reducing the manufacturing cost. A positioning member is set above a heating device. Bump materials are inserted into positioning holes of the positioning member and are made to partially protrude from the holes toward a side opposite to the heating device. A semiconductor substrate is positioned onto the positioning member so that the semiconductor substrate faces the protruding side of the bump materials. The bump materials are heated and pressed from the protruding side via the semiconductor substrate so as to form bumps having a specific shape.

Abstract: This invention provides a cantilever type probe card which has undergone a treatment for facilitating perception of the image of probe needles and a method for the production of the cantilever type probe card.