Abstract: Disclosed is a method for separating a bonded body, whereby the bonded body can be separated easily. Specifically disclosed is a method for separating bonded bodies that includes a step that irradiates excimer light with a central wavelength of 1 to 300 nm on to a bonded body that has been formed by using an adhesive composition to bond substrates together, which includes and is formed by one type or two or more types of meth (acrylate) that have one or more (meth)acryloyl groups, and by hardening of said adhesive composition. At least one of the substrates is permeable to the excimer light.

Abstract: An object is to provide a Raman scattering light enhancing device that provides a sufficiently high Raman scattering light enhancing effect and produces a highly sensitive Raman signal even by using an excitation light source having a low energy density. This Raman scattering light enhancing device includes a substrate, a high reflection layer that is formed on the substrate, a dielectric layer that is formed on the high reflection layer, and an enhanced electromagnetic field formation layer that is formed on the dielectric layer and includes a large number of fine silver particles. A gold film is formed on surfaces of the fine silver particles constituting the enhanced electromagnetic field formation layer.

Abstract: Disclosed is a method for separating a bonded body, whereby the bonded body can be separated easily. Specifically disclosed is a method for separating bonded bodies that includes a step that irradiates excimer light with a central wavelength of 1 to 300 nm on to a bonded body that has been formed by using an adhesive composition to bond substrates together, which includes and is formed by one type or two or more types of meth (acrylate) that have one or more (meth)acryloyl groups, and by hardening of said adhesive composition. At least one of the substrates is permeable to the excimer light.

Abstract: An excimer discharge lamp includes an electric discharge container having a pair of plates which face each other and connected by a side wall. An electrical discharge space is formed between the plates. A pair of external electrodes are provided on exterior surfaces of the plates. A light emission gas of rare gas, halogen or halide is enclosed in the electrical discharge space. The pair of plates and the side wall are made of sapphire, YAG, or single crystal yttria. Impurities which exist in an inner surface of the electric discharge container surrounding the electrical discharge space contain at least silicon, carbon, or cerium, and the quantity thereof is 0.6 ng/cm2 or less.

Abstract: A ceramic discharge lamp in which an electric discharge gas is enclosed in an arc tube which is made up of a ceramic member and a metal member. The ceramic discharge lamp includes a first brazing material, which is formed so as to be fixed on a surface of the ceramic member without being covered with the metal member; a titanium layer, which is formed between the first brazing material and the ceramic member; and a second brazing material, which is continuously formed from the first brazing member, that covers part of the metal member so that the ceramic member and the metal member are airtightly joined to each other.

Abstract: To avoid a decline in the reflectivity of an ultraviolet reflection film caused by lighting for an extended period of time and providing a uniform illuminance an excimer lamp has a silica glass discharge vessel with electrodes on opposite sides of the discharge vessel, wherein excimer discharge is generated in the discharge space of the discharge vessel, wherein an ultraviolet reflection film made of silica particles and alumina particles is formed on a surface exposed to the discharge space and wherein the mean particle diameter of silica particles is at least 0.67 times as large as the mean particle diameter of the alumina particles. The alumina particles in the ultraviolet reflection film preferably constitute at least 5 wt % and more preferably at least 10 wt % of the sum of silica particles and alumina particles.

Abstract: An excimer discharge lamp comprises an electric discharge container having an electric discharge space, a pair of electrodes provided on an outer face of the electric discharge container, and an electric discharge gas enclosed in the electric discharge space. Further the electric discharge container comprises a tubular side wall on which the pair of electrodes is formed, one end wall for sealing one end of the side wall, and another end wall that is provided on the other side of the side wall. The side wall and the end walls are made of sapphire, YAG, or single crystal yttria. A chip pipe is provided on the another end wall, and a partition member made of sapphire, YAG, or single crystal yttria is formed between a shortest distance of the chip pipe and the inner face of the side wall.

Abstract: A flash lamp irradiation apparatus comprises at least one flash lamp having a bulb made of translucent material, two or more trigger members disposed along a tube axis of the at least one flash lamp, wherein voltage is simultaneously impressed to the two or more trigger members at lighting in order to emit light from the at least one flash lamp.

Abstract: An excimer lamp, including a discharge vessel made of silica glass and having a discharge space; a pair of electrodes disposed on the discharge vessel, wherein the discharge space is filled with xenon gas; and an ultraviolet reflection film made from ultraviolet scattering particles, including silica particles and alumina particles, formed on a surface of the discharge vessel exposed to the discharge space. A thickness Y of the ultraviolet reflection film satisfies the expression Y>4X+5, given that a mean particle diameter of the ultraviolet scattering particles making up the ultraviolet reflection film is X (?m).

Abstract: An excimer discharge lamp comprises an electric discharge container and a pair of electrodes provided in an outer face of the electric discharge container, wherein the electric discharge container is made up of a tubular side wall on which the pair of electrodes are provided, one end wall that seals one end of the tubular side wall, and another end wall that seals another end of the tubular side wall, wherein a chip pipe made of metal or an alloy is formed on the another end wall, and wherein a dividing wall made of sapphire, YAG, or single crystal yttria is provided at a portion of the another end wall that is located in a shortest distance portion between the chip pipe and an inner face of the side wall on which the pair of electrodes is provided.

Abstract: An excimer discharge lamp comprises an electric discharge container having an electric discharge space, a pair of electrodes provided on an outer face of the electric discharge container, and an electric discharge gas enclosed in the electric discharge space. Further the electric discharge container comprises a tubular side wall on which the pair of electrodes is formed, one end wall for sealing one end of the side wall, and another end wall that is provided on the other side of the side wall. The side wall and the end walls are made of sapphire, YAG, or single crystal yttria. A chip pipe is provided on the another end wall, and a partition member made of sapphire, YAG, or single crystal yttria is formed between a shortest distance of the chip pipe and the inner face of the side wall.

Abstract: A ceramic discharge lamp in which an electric discharge gas is enclosed in an arc tube which is made up of a ceramic member and a metal member. The ceramic discharge lamp includes a first brazing material, which is formed so as to be fixed on a surface of the ceramic member without being covered with the metal member; a titanium layer, which is formed between the first brazing material and the ceramic member; and a second brazing material, which is continuously formed from the first brazing member, that covers part of the metal member so that the ceramic member and the metal member are airtightly joined to each other.

Abstract: An excimer discharge lamp includes an electric discharge container having a pair of plates which face each other and connected by a side wall. An electrical discharge space is formed between the plates. A pair of external electrodes are provided on exterior surfaces of the plates. A light emission gas of rare gas, halogen or halide is enclosed in the electrical discharge space. The pair of plates and the side wall are made of sapphire, YAG, or single crystal yttria. Impurities which exist in an inner surface of the electric discharge container surrounding the electrical discharge space contain at least silicon, carbon, or cerium, and the quantity thereof is 0.6 ng/cm2 or less.

Abstract: An excimer lamp which can emit UV radiation with a high degree of efficiency and high degree of uniformity, has a UV-reflecting film that does not peel. The excimer lamp is fitted with a silica glass discharge vessel that encloses a discharge gas which forms excimer molecules by dielectric barrier discharge in an internal space enclosed by a top wall panel, a bottom wall panel, side wall panels and end panels and with an electrode on both the outer surface of the top wall panel and another electrode on the outer surface of the bottom wall panel. On the inner surface of the discharge vessel, a UV-reflecting film comprised of silica and alumina particles is formed, at least, on the inner surface area of the side wall panels with the silica particles composing at least 30 weight % of the UV-reflecting film.

Abstract: An excimer lamp which can emit UV radiation with a high degree of efficiency and high degree of uniformity, has a UV-reflecting film that does not peel. The excimer lamp is fitted with a silica glass discharge vessel that encloses a discharge gas which forms excimer molecules by dielectric barrier discharge in an internal space enclosed by a top wall panel, a bottom wall panel, side wall panels and end panels and with an electrode on both the outer surface of the top wall panel and another electrode on the outer surface of the bottom wall panel. On the inner surface of the discharge vessel, a UV-reflecting film comprised of silica and alumina particles is formed, at least, on the inner surface area of the side wall panels with the silica particles composing at least 30 weight % of the UV-reflecting film.

Abstract: An excimer lamp, including a discharge vessel made of silica glass and having a discharge space; a pair of electrodes disposed on the discharge vessel, wherein the discharge space is filled with xenon gas; and an ultraviolet reflection film made from ultraviolet scattering particles, including silica particles and alumina particles, formed on a surface of the discharge vessel exposed to the discharge space. A thickness Y of the ultraviolet reflection film satisfies the expression Y>4X+5, given that a mean particle diameter of the ultraviolet scattering particles making up the ultraviolet reflection film is X (?m).

Abstract: To avoid a decline in the reflectivity of an ultraviolet reflection film caused by lighting for an extended period of time and providing a uniform illuminance an excimer lamp has a silica glass discharge vessel with electrodes on opposite sides of the discharge vessel, wherein excimer discharge is generated in the discharge space of the discharge vessel, wherein an ultraviolet reflection film made of silica particles and alumina particles is formed on a surface exposed to the discharge space and wherein the mean particle diameter of silica particles is at least 0.67 times as large as the mean particle diameter of the alumina particles. The alumina particles in the ultraviolet reflection film preferably constitute at least 5 wt % and more preferably at least 10 wt % of the sum of silica particles and alumina particles.

Abstract: Provided is a surface-treating apparatus making use of a neutral particle beam, by which a high-quality surface treatment is fundamentally conducted, and a high surface treatment rate is achieved. The surface-treating apparatus serves to conduct a surface treatment of an object to be treated, which is arranged in a vacuum treatment chamber, by a neutral particle beam, and is equipped with a light source for irradiating the object to be treated with light. In the surface-treating apparatus, the light applied to the object to be treated is preferably light including rays having a wavelength of 380 nm or shorter. An illuminance of the rays having a wavelength of 380 nm or shorter on the surface to be treated of the object to be treated is preferably 7 mW/cm2 or higher. The light source is preferably a xenon flash lamp, and an illuminance of the light on the surface to be treated of the object to be treated is preferably 20 mW/cm2 or higher.

Abstract: A flash lamp irradiation apparatus comprises at least one flash lamp having a bulb made of translucent material, two or more trigger members disposed along a tube axis of the at least one flash lamp, wherein voltage is simultaneously impressed to the two or more trigger members at lighting in order to emit light from the at least one flash lamp.

Abstract: A flash lamp with high radiation intensity which has a discharge vessel having a part in the region between the electrodes which has a smaller diameter than the inside diameter of the discharge vessel in the area in which the cathode is located, and the inner surface of the part of smaller diameter being provided with a heat-resistant material. A xenon gas is filled into the vessel at a room temperature pressure from 1.3×103 Pa to 1.6×105 Pa or a krypton gas is filled at 7×102 Pa to 1.3×105 Pa. A power supply operates the flash lamp with a full width at half maximum of the current from 150 ?s to 2 ms and a current density in the part with a small diameter of at least 2110 A/cm2 when xenon is used and at least 2930 A/cm2 when krypton is used.