Abstract: In a thermal type flowmeter 60, a heating/heat-sensitive coil 64 which is shaped as a coil is fit close into an approximately central portion of a duct pipe 63. A flow rate computing circuit 65 supplies electric power to the heating/heat-sensitive coil 64 in accordance with an instruction received from a control portion, the heating/heat-sensitive coil 64 develops heat, and the heat developing at the heating/heat-sensitive coil 64 heats up a hole transporting material 8 which flows through the duct pipe 63. Further, the flow rate computing circuit 65 which is electrically connected with the heating/heat-sensitive coil 64 detects a difference between an upstream-side temperature and a downstream-side temperature, and calculates the flow rate (mass flow rate) of the hole transporting material 8 based on this temperature difference, the amount of heating, physical properties data such as the specific heat and the heat capacity regarding the hole transporting material 8.

Abstract: Using a mixture of (BAYTRON P) of PEDT (polyethylene dioxythiophene) and PSS (polystyrene sulfonic acid) as a hole transportation material and using water and ethanol as polar solvents, a coating composition having a contact angle of 35 degrees or smaller with respect to an ITO layer is obtained. The coating composition is then poured for coating upon exposed surfaces of first electrodes (ITO) 4R, 4G and 4B enclosed by barrier walls 6. Thus applied coating composition uniformly spreads all over the first electrodes 4R, 4G and 4B. As the coating composition naturally dries at a room temperature for about fifteen seconds, the solvents are removed from the coating composition.

Abstract: In a thermal type flowmeter 60, a heating/heat-sensitive coil 64 which is shaped as a coil is fit close into an approximately central portion of a duct pipe 63. A flow rate computing circuit 65 supplies electric power to the heating/heat-sensitive coil 64 in accordance with an instruction received from a control portion, the heating/heat-sensitive coil 64 develops heat, and the heat developing at the heating/heat-sensitive coil 64 heats up a hole transporting material 8 which flows through the duct pipe 63. Further, the flow rate computing circuit 65 which is electrically connected with the heating/heat-sensitive coil 64 detects a difference between an upstream-side temperature and a downstream-side temperature, and calculates the flow rate (mass flow rate) of the hole transporting material 8 based on this temperature difference, the amount of heating, physical properties data such as the specific heat and the heat capacity regarding the hole transporting material 8.

Abstract: A developing solution dispensing nozzle starts scanning at a scanning start position P1. After the developing solution dispensing nozzle reaches an edge of a substrate, the developing solution dispensing nozzle scans over the substrate while uniformly dispensing a developing solution to a surface of the substrate. The developing solution dispensing nozzle thereafter moves off the substrate from the other edge of the substrate. To uniformly supply the developing solution to a substrate, where a flow rate of the developing solution is set constant, a scanning speed is set large during an initial scanning section over a substrate, and the scanning speed is set slow during the remaining section. Meanwhile, where the scanning speed of the developing solution dispensing nozzle is set constant, the flow rate of the developing solution is gradually increased during the initial scanning section, and the flow rate is set constant during the remaining section.