Abstract: A surface inspection apparatus, which includes a detecting device of scanning a surface of an inspection object with an inspection light and outputting a signal corresponding to a light amount of refection light from the surface, generates a two-dimensional image of the surface of the inspection object on the basis of the output signal of the detecting device (S1), classifies pixels contained in the two-dimensional image into a first group of pixels having tones corresponding to defects on the surface of the inspection object and a second group of pixels having tones not corresponding to the defects, extracts the first group of pixels as a defect candidate part for each region surrounded by second groups of pixels (S3 to S5), discriminates a defect candidate part larger than a prescribed size as a defect (S6), inspects the two-dimensional image for each specific inspection region, and identifies an inspection region as a defect region, in which density of defect candidate parts that are smaller than the presc

Abstract: A surface inspection apparatus has a detection unit that irradiates an inner circumferential surface of an inspection object with inspection light from a laser diode through a light projecting fiber, and detects the intensity of the reflected light of that inspection light. The detection unit comprises a first light receiving fiber group, which is disposed at the circumference of the light projecting fiber, a second light receiving fiber group, which is disposed further on the outer side thereof, and photodetectors, which are connected to each of the fiber groups.

Abstract: A surface inspection apparatus, which includes a detecting device of scanning a surface of an inspection object with an inspection light and outputting a signal corresponding to a light amount of refection light from the surface, generates a two-dimensional image of the surface of the inspection object on the basis of the output signal of the detecting device (S1), classifies pixels contained in the two-dimensional image into a first group of pixels having tones corresponding to defects on the surface of the inspection object and a second group of pixels having tones not corresponding to the defects, extracts the first group of pixels as a defect candidate part for each region surrounded by second groups of pixels (S3 to S5), discriminates a defect candidate part larger than a prescribed size as a defect (S6), inspects the two-dimensional image for each specific inspection region, and identifies an inspection region as a defect region, in which density of defect candidate parts that are smaller than the presc

Abstract: A surface inspection apparatus has a detection unit that irradiates an inner circumferential surface of an inspection object with inspection light from a laser diode through a light projecting fiber, and detects the intensity of the reflected light of that inspection light. The detection unit comprises a first light receiving fiber group, which is disposed at the circumference of the light projecting fiber, a second light receiving fiber group, which is disposed further on the outer side thereof, and photodetectors, which are connected to each of the fiber groups.

Abstract: In a surface inspection apparatus that receives, through receiving optical fibers, reflected light from light from a light source projected onto the surface of an article being inspected through a projection optical fiber and generates a two-dimensional image corresponding to the surface of that article being inspected based on the amount of that light received, a plurality of receiving optical fibers are disposed around the projection optical fiber and the diameter of those receiving optical fibers is greater than the diameter of the projection optical fiber.