Patents by Inventor Yukiko Nakashige

Yukiko Nakashige has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Semiconductor wafer inspection apparatus
    Patent number: 5465145
    Abstract: Disclosed is a semiconductor wafer inspection apparatus which effectively prevents an erroneous identification of small pits as particles on a surface of a sample. In such a semiconductor wafer inspection apparatus, a light collecting portion and a reflection adjustment portion having a light reflectance different from a light reflectance of the light collecting portion are included in light collecting means.
    Type: Grant
    Filed: September 20, 1994
    Date of Patent: November 7, 1995
    Assignees: Mitsubishi Denki Kabushiki Kaisha, Ryoden Semiconductor System Engineering Corporation
    Inventors: Yukiko Nakashige, Tadashi Nishioka