Abstract: A vibration element includes: a base; a first arm continuous with the base; a second arm that is continuous with the base and is adjacent to the first arm; a first electrode disposed on the first arm, the second arm, and the base; a first piezoelectric layer that has a first polarity and that is disposed on the first electrode on the first arm; a second piezoelectric layer that has a second polarity different from the first polarity and that is disposed on the first electrode on the second arm; an insulating layer disposed on the first electrode on the base; and a second electrode disposed on the first piezoelectric layer, the second piezoelectric layer, and the insulating layer.

Abstract: A vibrator element includes: a base; an arm that is made of silicon and continuous with the base; a silicon dioxide layer arranged on the arm and a continuous portion in which the arm and the base are continuous; a zirconium dioxide layer arranged on the silicon dioxide layer at least in the continuous portion; a first electrode arranged on the zirconium dioxide layer; a piezoelectric layer arranged on the first electrode; and a second electrode arranged on the piezoelectric layer.

Abstract: A vibration element includes: a base; an arm continuous with the base; a first electrode that includes a first layer of titanium nitride and a second layer containing nitrogen, titanium, and oxygen, and is disposed on the arm; an aluminum nitride layer in contact with the second layer; and a second electrode disposed on the aluminum nitride layer.

Abstract: A vibration element includes: a base; a first arm continuous with the base; a second arm that is continuous with the base and is adjacent to the first arm; a first electrode disposed on the first arm, the second arm, and the base; a first piezoelectric layer that has a first polarity and that is disposed on the first electrode on the first arm; a second piezoelectric layer that has a second polarity different from the first polarity and that is disposed on the first electrode on the second arm; an insulating layer disposed on the first electrode on the base; and a second electrode disposed on the first piezoelectric layer, the second piezoelectric layer, and the insulating layer.

Abstract: A vibration element includes: a base; an arm continuous with the base; a first electrode that includes a first layer of titanium nitride and a second layer containing nitrogen, titanium, and oxygen, and is disposed on the arm; an aluminum nitride layer in contact with the second layer; and a second electrode disposed on the aluminum nitride layer.

Abstract: A method for manufacturing a ferroelectric memory includes the steps of: (a) forming a ferroelectric capacitor by sequentially laminating, on a substrate, a lower electrode, a ferroelectric layer and an upper electrode; (b) forming a first dielectric layer that covers the ferroelectric capacitor; (c) forming a contact hole in the first dielectric layer to expose the upper electrode; (d) heating the substrate to 350° C. or higher; and (e) forming a conductive layer inside the contact hole.

Abstract: A method for manufacturing a ferroelectric memory includes the steps of: (a) forming a ferroelectric capacitor by sequentially laminating, on a substrate, a lower electrode, a ferroelectric layer and an upper electrode; (b) forming a first dielectric layer that covers the ferroelectric capacitor; (c) forming a contact hole in the first dielectric layer to expose the upper electrode; (d) heating the substrate to 350° C. or higher; and (e) forming a conductive layer inside the contact hole.

Abstract: A dielectric capacitor includes: a TiAlN film formed on a base substrate; a first electrode formed above the TiAlN film; a dielectric film formed above the first electrode; and a second electrode formed above the dielectric film, wherein the TiAlN film is crystalline, and has a (200) plane preferentially oriented in parallel with a surface of the base substrate.

Abstract: An information mediation system of a mediator includes a mediation server and a database storing information of corporate registrants. Upon receiving a request of information exchange from an applicant, the mediation server retrieves information of some of the registrants from the database, and delivers retrieved non-secret information to the applicant. If the applicant wishes to conduct information exchange with a selected registrant, the mediation server prepares the information exchange between the applicant and the registrant under a secrecy contract between the mediator and the applicant and between the mediator and the registrant.

Abstract: A product repairing community is composed of a manufacturer and a plurality of users. A repair subscribers' site is provided on the Internet and managed by the manufacturer in such a way that any users may access the site by way of the Internet. The repair subscribers' site is provided with a replacement part sales section, a repair reception section, a replacement part procuring section, and an escrow section. The manufacturer is responsible for the management of the replacement parts possessed by the repair subscribers and also the repair subscribers data base containing information on which repair subscribers possess which replacement parts. The manufacturer utilizes the repair subscribers' site for selling replacement parts of which the compulsory storage periods have expired, receiving requests for repairs, buying replacement parts possessed by users and settling the accounts for selling and buying replacement parts.