Patents by Inventor Yukio Matsuyama

Yukio Matsuyama has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Pattern checking apparatus
    Patent number: 4628531
    Abstract: A pattern checking apparatus carries out the detection of candidate defects through a primary selection with a sensitivity high enough to detect any existing defect, and then carries out a detailed analysis by a controlling processor for a pattern including the periphery of the detected candidate defect through a secondary selection in which a candidate defect which is not a defect in a practical sense is removed from candidates, so that only real defects are detected.
    Type: Grant
    Filed: February 27, 1984
    Date of Patent: December 9, 1986
    Assignee: Hitachi, Ltd.
    Inventors: Keiichi Okamoto, Kozo Nakahata, Yukio Matsuyama, Hideaki Doi, Susumu Aiuchi, Mineo Nomoto