Patents by Inventor Yukio Tsuzuki
Yukio Tsuzuki has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 8102025Abstract: A semiconductor device includes: a semiconductor substrate; a IGBT region including a first region on a first surface of the substrate and providing a channel-forming region and a second region on a second surface of the substrate and providing a collector; a diode region including a third region on the first surface and providing an anode or a cathode and a fourth region on the second surface and providing the anode or the cathode; a periphery region including a fifth region on the first surface and a sixth region on the second surface. The first, third and fifth regions are commonly and electrically coupled, and the second, fourth and sixth regions are commonly and electrically coupled with one another.Type: GrantFiled: February 22, 2007Date of Patent: January 24, 2012Assignee: DENSO CORPORATIONInventors: Yoshihiko Ozeki, Norihito Tokura, Yukio Tsuzuki
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Patent number: 8080853Abstract: A semiconductor device includes a vertical IGBT and a vertical free-wheeling diode in a semiconductor substrate. A plurality of base regions is disposed at a first-surface side portion of the semiconductor substrate, and a plurality of collector regions and a plurality of cathode regions are alternately disposed in a second-surface side portion of the semiconductor substrate. The base regions include a plurality of regions where channels are provided when the vertical IGBT is in an operating state. The first-side portion of the semiconductor substrate include a plurality of IGBT regions each located between adjacent two of the channels, including one of the base regions electrically coupled with an emitter electrode, and being opposed to one of the cathode regions. The IGBT regions include a plurality of narrow regions and a plurality of wide regions.Type: GrantFiled: December 15, 2009Date of Patent: December 20, 2011Assignee: DENSO CORPORATIONInventors: Yukio Tsuzuki, Hiromitsu Tanabe, Kenji Kouno
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Publication number: 20110260212Abstract: An insulated gate semiconductor device includes a semiconductor substrate, a drift layer on the substrate, a base layer on the drift layer, a ring-shaped gate trench dividing the base layer into a channel layer and a floating layer, an emitter region located in the channel layer to be in contact with a side surface of the gate trench, a well region located on the periphery of a cell area of the base layer and having a depth greater than a depth of the base layer, and a ring-shaped buffer trench located adjacent to and spaced from the gate trench in a length direction of the gate trench. An edge of the well region is located in an area enclosed by the buffer trench in the length direction of the gate trench.Type: ApplicationFiled: April 20, 2011Publication date: October 27, 2011Applicant: DENSO CORPORATIONInventors: Yukio Tsuzuki, Kenji Kouno
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Publication number: 20110254051Abstract: A semiconductor device includes an n-conductive type semiconductor substrate having a main side and a rear side, a p-conductive type layer arranged over the main side of the substrate, a main side n-conductive type region arranged in the p-conductive type layer, a rear side n-conductive type layer arranged over the rear side of the substrate, a first trench which reaches the substrate and penetrates the main side n-conductive type region and the p-conductive type layer, a second trench which reaches an inside of the p-conductive type layer, a second electrode layer, which is embedded in the second trench and connected to the p-conductive type layer. Hereby, the semiconductor device, in which the recovery property of a diode cell can be improved without damaging the property of a MOS transistor cell or an IGBT cell and the surge withstand property does not deteriorate, can be obtained.Type: ApplicationFiled: June 28, 2011Publication date: October 20, 2011Applicant: DENSO CORPORATIONInventors: Yukio Tsuzuki, Makoto Asai
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Patent number: 7999314Abstract: A semiconductor device includes an n-conductive type semiconductor substrate having a main side and a rear side, a p-conductive type layer arranged over the main side of the substrate, a main side n-conductive type region arranged in the p-conductive type layer, a rear side n-conductive type layer arranged over the rear side of the substrate, a first trench which reaches the substrate and penetrates the main side n-conductive type region and the p-conductive type layer, a second trench which reaches an inside of the p-conductive type layer, a second electrode layer, which is embedded in the second trench and connected to the p-conductive type layer. Hereby, the semiconductor device, in which the recovery property of a diode cell can be improved without damaging the property of a MOS transistor cell or an IGBT cell and the surge withstand property does not deteriorate, can be obtained.Type: GrantFiled: June 19, 2008Date of Patent: August 16, 2011Assignee: Denso CorporationInventors: Yukio Tsuzuki, Makoto Asai
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Publication number: 20110193132Abstract: An insulated gate semiconductor device includes a semiconductor substrate, channel regions, floating regions, an emitter region, a body region, a hole stopper layer, and an emitter electrode. The channel regions and the floating regions are repeatedly arranged such that at least one floating region is located between adjacent channel regions. The emitter region and the body region are located in a surface portion of each channel region. The body region is deeper than the emitter region. The hole stopper layer is located in each floating region to divide the floating region into a first region and a second region. The emitter electrode is electrically connected to the emitter region and the first region.Type: ApplicationFiled: January 20, 2011Publication date: August 11, 2011Applicant: DENSO CORPORATIONInventors: Kenji Kouno, Yukio Tsuzuki
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Publication number: 20100187567Abstract: A semiconductor device includes a semiconductor substrate having a first surface and a second surface. A main region and a sensing region are formed on the first surface side of the semiconductor substrate. A RC-IGBT is formed in the main region and a sensing element for passing electric currents proportional to electric currents flowing through the RC-IGBT is formed in the sensing region. A collector region and a cathode region of the sensing element are formed on the second surface side of the semiconductor substrate. The collector region is located directly below the sensing region in a thickness direction of the semiconductor substrate. The cathode region is not located directly below the sensing region in the thickness direction.Type: ApplicationFiled: January 26, 2010Publication date: July 29, 2010Applicant: DENSO CORPORATIONInventors: Hiromitsu Tanabe, Kenji Kouno, Yukio Tsuzuki, Shinji Amano
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Publication number: 20100156506Abstract: A semiconductor device includes a vertical IGBT and a vertical free-wheeling diode in a semiconductor substrate. A plurality of base regions is disposed at a first-surface side portion of the semiconductor substrate, and a plurality of collector regions and a plurality of cathode regions are alternately disposed in a second-surface side portion of the semiconductor substrate. The base regions include a plurality of regions where channels are provided when the vertical IGBT is in an operating state. The first-side portion of the semiconductor substrate include a plurality of IGBT regions each located between adjacent two of the channels, including one of the base regions electrically coupled with an emitter electrode, and being opposed to one of the cathode regions. The IGBT regions include a plurality of narrow regions and a plurality of wide regions.Type: ApplicationFiled: December 15, 2009Publication date: June 24, 2010Applicant: DENSO CORPORATIONInventors: Yukio Tsuzuki, Hiromitsu Tanabe, Kenji Kouno
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Patent number: 7728382Abstract: A semiconductor device includes: a semiconductor substrate including a first conductive type layer; a plurality of IGBT regions, each of which provides an IGBT element; and a plurality of diode regions, each of which provides a diode element. The plurality of IGBT regions and the plurality of diode regions are alternately arranged in the substrate. Each diode region includes a Schottky contact region having a second conductive type. The Schottky contact region is configured to retrieve a minority carrier from the first conductive type layer. The Schottky contact region is disposed in a first surface portion of the first conductive type layer, and adjacent to the IGBT region.Type: GrantFiled: August 12, 2008Date of Patent: June 1, 2010Assignee: DENSO CORPORATIONInventors: Yukio Tsuzuki, Kenji Kouno
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Patent number: 7692214Abstract: A semiconductor device includes: a semiconductor substrate; an IGBT cell; and a diode cell. The substrate includes a first layer on a first surface, second and third layers adjacently arranged on a second surface of the substrate and a fourth layer between the first layer and the second and third layers. The first layer provides a drift layer of the IGBT cell and the diode cell. The second layer provides a collector layer of the IGBT cell. The third layer provides one electrode connection layer of the diode cell. A resistivity ?1 and a thickness L1 of the first layer, a resistivity ?2 and a thickness L2 of the fourth layer, and a half of a minimum width W2 of the second layer on a substrate plane have a relationship of (?1/?2)×(L1·L2/W22)<1.6.Type: GrantFiled: March 20, 2007Date of Patent: April 6, 2010Assignee: DENSO CORPORATIONInventors: Norihito Tokura, Yukio Tsuzuki, Kenji Kouno
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Patent number: 7692221Abstract: A semiconductor device having an insulated gate bipolar transistor (IGBT) is formed on a semiconductor substrate. A base region and an emitter are formed on a first surface of the substrate while a collector layer is formed on second surface of the substrate. A region having a low breakdown voltage is formed on the first surface around the IGBT, and a carrier collecting region is formed in the vicinity of the region having the low breakdown voltage. The IGBT is prevented from being broken down due to an avalanche phenomenon, because the breakdown occurs in the region having the low breakdown voltage, and carriers of the breakdown current are collected through the carrier collecting region. The breakdown of the IGBT is further effectively prevented by forming a guard ring for suppressing electric field concentration around the region having the low breakdown voltage.Type: GrantFiled: March 6, 2007Date of Patent: April 6, 2010Assignee: DENSO CORPORATIONInventors: Yoshihiko Ozeki, Yukio Tsuzuki
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Patent number: 7667269Abstract: A semiconductor device includes: a first semiconductor layer; a second semiconductor layer on the first semiconductor layer; a third semiconductor layer on the second semiconductor layer; a fourth semiconductor layer in a part of the third semiconductor layer; a trench penetrating the fourth semiconductor layer and the third semiconductor layer and reaching the second semiconductor layer; a gate insulation film on an inner wall of the trench; a gate electrode on the gate insulation film in the trench; a first electrode; and a second electrode. The trench includes a bottom with a curved surface having a curvature radius equal to or smaller than 0.5 ?m.Type: GrantFiled: April 6, 2006Date of Patent: February 23, 2010Assignee: DENSO CORPORATIONInventors: Yukio Tsuzuki, Norihito Tokura, Yoshihiko Ozeki, Kensaku Yamamoto
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Patent number: 7622768Abstract: On the surface of a silicon nitride film, there is formed a thermal oxide film, over which a CVD oxide film is then formed to provide a silicon oxide film of two-layered structure films. Moreover, the total thickness of the two-layered structure films is set to a value from 5 nm to 30 nm. Thus, the silicon oxide film is made into the two-layered structure films of the thermal oxide film and the CVD oxide film to thereby achieve the thickness of the silicon oxide film. As a result, it is possible to prevent a Vth from being lowered by a charge trap phenomenon and to prevent the Vth from fluctuating due to the enlargement of the bird's beak length by the silicon oxide film.Type: GrantFiled: April 21, 2005Date of Patent: November 24, 2009Assignee: DENSO CORPORATIONInventors: Takaaki Aoki, Mikimasa Suzuki, Yukio Tsuzuki, Tomofusa Shiga
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Publication number: 20090283798Abstract: A semiconductor device includes an n-conductive type semiconductor substrate having a main side and a rear side, a p-conductive type layer arranged over the main side of the substrate, a main side n-conductive type region arranged in the p-conductive type layer, a rear side n-conductive type layer arranged over the rear side of the substrate, a first trench which reaches the substrate and penetrates the main side n-conductive type region and the p-conductive type layer, a second trench which reaches an inside of the p-conductive type layer, a second electrode layer, which is embedded in the second trench and connected to the p-conductive type layer. Hereby, the semiconductor device, in which the recovery property of a diode cell can be improved without damaging the property of a MOS transistor cell or an IGBT cell and the surge withstand property does not deteriorate, can be obtained.Type: ApplicationFiled: June 19, 2008Publication date: November 19, 2009Applicant: DENSO CORPORATIONInventors: Yukio Tsuzuki, Makoto Asai
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Publication number: 20090242931Abstract: A semiconductor device includes: a substrate; an active element cell area including IGBT cell region and a diode cell region; a first semiconductor region on a first side of the substrate in the active element cell area; a second semiconductor region on a second side of the substrate in the IGBT cell region; a third semiconductor region on the second side in the diode cell region; a fourth semiconductor region on the first side surrounding the active element cell area; a fifth semiconductor region on the first side surrounding the fourth semiconductor region; and a sixth semiconductor region on the second side below the fourth semiconductor region. The second semiconductor region, the third semiconductor region and the sixth semiconductor region are electrically coupled with each other.Type: ApplicationFiled: March 31, 2009Publication date: October 1, 2009Applicant: DENSO CORPORATIONInventors: Yukio Tsuzuki, Kenji Kouno
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Publication number: 20090114947Abstract: A semiconductor device includes a semiconductor substrate, an insulated gate transistor formed to the semiconductor substrate, a diode formed to the semiconductor substrate, and a control transistor formed to the semiconductor substrate. A first current terminal of the insulated gate transistor is coupled to a cathode of the diode at a high potential side. A second current terminal of the insulated gate transistor is coupled to an anode of the diode at a low potential side. The control transistor is configured to turn off the insulated gate transistor by reducing a potential of a gate terminal of the insulated gate transistor when the diode conducts an electric current.Type: ApplicationFiled: November 6, 2008Publication date: May 7, 2009Applicant: DENSO CORPORATIONInventors: Yutaka Fukuda, Yukio Tsuzuki
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Publication number: 20090072339Abstract: A semiconductor device includes: a semiconductor substrate including a first conductive type layer; a plurality of IGBT regions, each of which provides an IGBT element; and a plurality of diode regions, each of which provides a diode element. The plurality of IGBT regions and the plurality of diode regions are alternately arranged in the substrate. Each diode region includes a Schottky contact region having a second conductive type. The Schottky contact region is configured to retrieve a minority carrier from the first conductive type layer. The Schottky contact region is disposed in a first surface portion of the first conductive type layer, and adjacent to the IGBT region.Type: ApplicationFiled: August 12, 2008Publication date: March 19, 2009Applicant: DENSO CORPORATIONInventors: Yukio Tsuzuki, Kenji Kouno
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Patent number: 7498634Abstract: A semiconductor device includes: a substrate having a first side and a second side; an IGBT; and a diode. The substrate includes a first layer, a second layer on the first layer, a first side N region on the second layer, second side N and P regions on the second side of the first layer, a first electrode in a first trench for a gate electrode, a second electrode on the first side N region and in a second trench for an emitter electrode and an anode electrode, and a third electrode on the second side N and P regions for a collector electrode and a cathode. The first trench penetrates the first side N region and the second layer, and reaches the first layer. The second trench penetrates the first side N region, and reaches the second layer.Type: GrantFiled: January 4, 2007Date of Patent: March 3, 2009Assignee: DENSO CORPORATIONInventors: Yukio Tsuzuki, Norihito Tokura
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Publication number: 20080315248Abstract: A semiconductor device includes: a semiconductor substrate; an IGBT cell; and a diode cell. The substrate includes a first layer on a first surface, second and third layers adjacently arranged on a second surface of the substrate and a fourth layer between the first layer and the second and third layers. The first layer provides a drift layer of the IGBT cell and the diode cell. The second layer provides a collector layer of the IGBT cell. The third layer provides one electrode connection layer of the diode cell. A resistivity ?1 and a thickness L1 of the first layer, a resistivity ?2 and a thickness L2 of the fourth layer, and a half of a minimum width W2 of the second layer on a substrate plane have a relationship of (?1/?2)×(L1·L2/W22)<1.6.Type: ApplicationFiled: March 20, 2007Publication date: December 25, 2008Applicant: DENSO CORPORATIONInventors: Norihito Tokura, Yukio Tsuzuki, Kenji Kouno
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Patent number: 7456484Abstract: A semiconductor device includes: a semiconductor substrate having first and second semiconductor layers; an IGBT having a collector region, a base region in the first semiconductor layer, an emitter region in the base region, and a channel region in the base region between the emitter region and the first semiconductor layer; a diode having an anode region in the first semiconductor layer and a cathode electrode on the first semiconductor layer; and a resistive region. The collector region and the second semiconductor layer are disposed on the first semiconductor layer. The resistive region for increasing a resistance of the second semiconductor layer is disposed in a current path between the channel region and the cathode electrode through the first semiconductor layer and the second semiconductor layer with bypassing the collector region.Type: GrantFiled: January 3, 2007Date of Patent: November 25, 2008Assignee: Denso CorporationInventors: Yoshihiko Ozeki, Norihito Tokura, Yukio Tsuzuki