Patents by Inventor Yumino GENBA

Yumino GENBA has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Plasma irradiation apparatus and plasma irradiation method
    Patent number: 10199202
    Abstract: Provided are a plasma irradiation apparatus and plasma irradiation method capable of converting a silica precursor to a high quality silica film in a short time without thermal effects on the object being processed. This plasma irradiation apparatus 1 is provided with a plasma-generating unit 12 and an irradiation unit 80 for irradiating the plasma generated by the plasma-generating unit 12 on an object to be processed, and is characterized in that irradiation unit 80 comprises a coating part 85 capable of coating a liquid on the object being processed.
    Type: Grant
    Filed: April 9, 2015
    Date of Patent: February 5, 2019
    Assignee: Oral 28 Inc.
    Inventors: Toyohiko Shindo, Yumino Genba, Masuji Yamaguchi
  • PLASMA IRRADIATION APPARATUS AND PLASMA IRRADIATION METHOD
    Publication number: 20180138019
    Abstract: Provided are a plasma irradiation apparatus and plasma irradiation method capable of converting a silica precursor to a high quality silica film in a short time without thermal effects on the object being processed. This plasma irradiation apparatus 1 is provided with a plasma-generating unit 12 and an irradiation unit 80 for irradiating the plasma generated by the plasma-generating unit 12 on an object to be processed, and is characterized in that said irradiation unit 80 comprises a coating part 85 capable of coating a liquid on the object being processed.
    Type: Application
    Filed: April 9, 2015
    Publication date: May 17, 2018
    Applicant: Oral 28 Inc.
    Inventors: Toyohiko SHINDO, Yumino GENBA, Masuji YAMAGUCHI