Patents by Inventor Yun B. Koh

Yun B. Koh has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for controlling lateral diffusion of silicon in a self-aligned TiSi.sub.2 process
    Patent number: 4567058
    Abstract: An improved method for forming a titanium silicide layer comprising placing a silicon layer overcoated with titanium in an ambient atmosphere of ultrapure nitrogen and heating the overcoated layer with radiation from a tungsten-halogen source.
    Type: Grant
    Filed: July 27, 1984
    Date of Patent: January 28, 1986
    Assignee: Fairchild Camera & Instrument Corporation
    Inventor: Yun B. Koh