Abstract: Provided is a method for etching an atomic layer. The method for etching the atomic layer includes providing a substrate to a process chamber, wherein the process chamber comprises a first chamber part and a second chamber part, and the substrate is provided in the second chamber part, generating adsorption gas plasma in the first chamber part, adsorbing radicals of the adsorption gas plasma to the substrate so as to form a treatment layer, generating etching gas plasma in the first chamber part, and allowing electrons and ions of the etching gas plasma to be alternately incident into the treatment layer so as to perform desorption of the treatment layer.

Abstract: A handy-stick type vacuum cleaner is disclosed. The disclosed vacuum cleaner comprises: a first part for collecting dust included in air suctioned to the inside through a suction hole; and a second part including a suction motor and a handle, wherein the first and second parts are hinge-connected so as to communicate with each other.

Abstract: A handy-stick type vacuum cleaner is disclosed. The disclosed vacuum cleaner comprises: a first part for collecting dust included in air suctioned to the inside through a suction hole; and a second part including a suction motor and a handle, wherein the first and second parts are hinge-connected so as to communicate with each other.

Abstract: A vacuum cleaner that includes a first cleaner module and a second cleaner module that is removably coupled to the first cleaner module. The first cleaner module includes a first body and a first dust collection unit, and the second cleaner module includes a second body and a second dust collection unit. Thus, when done in an upright mode, cleaning can be done with a sufficiently great suction force. When done in a handy mode after the second cleaner module is separated, cleaning can be easily done using the second cleaner module.

Abstract: A handy-stick type vacuum cleaner is disclosed. The disclosed vacuum cleaner comprises: a first part for collecting dust included in air suctioned to the inside through a suction hole; and a second part including a suction motor and a handle, wherein the first and second parts are hinge-connected so as to communicate with each other.

Abstract: A vacuum cleaner that includes a first cleaner module and a second cleaner module that is removably coupled to the first cleaner module. The first cleaner module includes a first body and a first dust collection unit, and the second cleaner module includes a second body and a second dust collection unit. Thus, when done in an upright mode, cleaning can be done with a sufficiently great suction force. When done in a handy mode after the second cleaner module is separated, cleaning can be easily done using the second cleaner module.

Abstract: A vacuum cleaner that includes a first cleaner module and a second cleaner module that is removably coupled to the first cleaner module. The first cleaner module includes a first body and a first dust collection unit, and the second cleaner module includes a second body and a second dust collection unit. Thus, when done in an upright mode, cleaning can be done with a sufficiently great suction force. When done in a handy mode after the second cleaner module is separated, cleaning can be easily done using the second cleaner module.

Abstract: Disclosed herein is a vacuum cleaner including a first cleaning module to perform a cleaning of a floor and a second cleaning module detachably coupled to the first cleaning module and configured to perform a cleaning in a handheld manner while detached from the first cleaning module, wherein the second cleaning module includes a connecting pipe to deliver inlet force to an inlet of the first cleaning module while connected to the first cleaning module, a handle connected to one side of the connecting pipe, having an inside space, and provided in a shape in which a rear surface thereof is open, a connecting hose connecting the connecting pipe to a dust collector, and a connector having a hose support provided to support the connecting hose, and to connect the connecting pipe to the connecting hose, and the hose support is disposed to support the connecting hose rounded along an inner side of the handle in a state that the connector is coupled to an inside space of the handle.

Abstract: Disclosed herein is a vacuum cleaner including a first cleaning module to perform a cleaning of a floor and a second cleaning module detachably coupled to the first cleaning module and configured to perform a cleaning in a handheld manner while detached from the first cleaning module, wherein the second cleaning module includes a connecting pipe to deliver inlet force to an inlet of the first cleaning module while connected to the first cleaning module, a handle connected to one side of the connecting pipe, having an inside space, and provided in a shape in which a rear surface thereof is open, a connecting hose connecting the connecting pipe to a dust collector, and a connector having a hose support provided to support the connecting hose, and to connect the connecting pipe to the connecting hose, and the hose support is disposed to support the connecting hose rounded along an inner side of the handle in a state that the connector is coupled to an inside space of the handle.

Abstract: A vacuum cleaner that includes an upright main body, an upright fan motor generating a suction force, and a wheel assembly that is mounted on the upright main body and guides movement and rotation of the upright main body. The upright main body includes a first housing that is installed on the wheel assembly so as to be rotatable in a leftward/rightward direction, and a second housing that is installed in the first housing so as to be rotatable in a forward/backward direction. The vacuum cleaner can be moved and rotated by freely moving an extension frame extending upward from the second housing in forward, backward, leftward, and rightward directions.

Abstract: A vacuum cleaner that includes a first cleaner module and a second cleaner module that is removably coupled to the first cleaner module. The first cleaner module includes a first body and a first dust collection unit, and the second cleaner module includes a second body and a second dust collection unit. Thus, when done in an upright mode, cleaning can be done with a sufficiently great suction force. When done in a handy mode after the second cleaner module is separated, cleaning can be easily done using the second cleaner module.

Abstract: A vacuum cleaner that includes an upright main body, an upright fan motor generating a suction force, and a wheel assembly that is mounted on the upright main body and guides movement and rotation of the upright main body. The upright main body includes a first housing that is installed on the wheel assembly so as to be rotatable in a leftward/rightward direction, and a second housing that is installed in the first housing so as to be rotatable in a forward/backward direction. The vacuum cleaner can be moved and rotated by freely moving an extension frame extending upward from the second housing in forward, backward, leftward, and rightward directions.