Abstract: A method of fabricating a HEMT includes the following steps. A substrate having a group III-V channel layer, a group III-V barrier layer, a group III-V gate layer, and a gate etch stop layer disposed thereon is provided. A passivation layer is formed to cover the group III-V barrier layer and the gate etch stop layer. A gate contact hole and at least one source/drain contact hole are formed in the passivation layer, where the gate contact hole exposes the gate etch stop layer, and the at least one source/drain contact hole exposes the group III-V channel layer. In addition, a conductive layer is conformally disposed on a top surface of the passivation layer and in the gate contact hole and the at least one source/drain contact hole.

Abstract: In one embodiment, a flow cytometer is disclosed having a compact light detection module. The compact light detection module includes an image array with a transparent block, a plurality of micro-mirrors in a row coupled to a first side of the transparent block, and a plurality of filters in a row coupled to a second side of the transparent block opposite the first side. Each of the plurality of filters reflects light to one of the plurality of micro-mirrors and passes light of a differing wavelength range and each of the plurality of micro-mirrors reflects light to one of the plurality of filters, such that incident light into the image array zigzags back and forth between consecutive filters of the plurality of filters and consecutive micro-mirrors of the plurality of micro-mirrors. A radius of curvature of each of the plurality of micro-mirrors images the fiber aperture onto the odd filters and collimates the light beam on the even filters.

Abstract: A method includes launching, from an optical fiber, fluorescent light of differing wavelengths generated by different fluorochromes attached to particles in a sample fluid; magnifying an image size from an end of the optical fiber to a first dichroic filter of a row of a plurality of dichroic filters in a de-multiplexing imaging array; alternatively reflecting the fluorescent light between the plurality of dichroic filters and a plurality of micro-mirrors to collimate the fluorescent light on odd numbered dichroic filters and re-image the fluorescent light on even numbered dichroic filters; band passing different wavelength ranges of the fluorescent light at each of the plurality of dichroic filters to de-multiplex the wavelength spectrum of the wavelength range of the fluorescent light; and detecting fluorescent light in each of the different wavelength ranges to count a number of each of the different particles in the sample fluid.

Abstract: Methodology of forming a substantially flat-top illuminating light beam, from a beam at the laser output having a conventionally non-uniform distribution of irradiance, with the use of only a birefringent prismatic element and light-focusing optics. Preferably, the cross-sectional area of such illuminating light distribution is shaped to be elongated or even substantially rectangular to have it used advantageously in various metrological situations such as, for example, the operation of a moving particle analyzer.

Abstract: A crystal for flow cytometry with dual laser beams is disclosed. The crystal is a birefringent crystal comprising a material composition including a quartz mineral having a face side including a face angle of ninety degrees plus or minus one tenth of a degree; a wedge side that is substantially perpendicular to the face side, wherein the wedge side includes a wedge angle of two degrees plus or minus one tenth of a degree; and a major side that is substantially perpendicular to the face side and the wedge side. The major side includes a thickness of one and one-half millimeter plus or minus one tenth of a millimeter. A polarized light beam entering the birefringent crystal at an incident angle is separated into an ordinary light beam and an extraordinary light beam.

Abstract: A system, an apparatus, and a method are provided for a modular flow cytometer with a compact size. In one embodiment, the modular flow cytometry system includes the following: a laser system for emitting laser beams; a flow cell assembly positioned to receive the laser beams at an interrogation region of a fluidics stream where fluoresced cells scatter the laser beams into fluorescent light; a fiber assembly positioned to collect the fluorescent light; and a compact light detection module including a first image array having a transparent block, a plurality of micro-mirrors in a row coupled to a first side of the transparent block, and a plurality of filters in a row coupled to a second side of the transparent block opposite the first side.

Abstract: A system, an apparatus, and a method are provided for a modular flow cytometer with a compact size. In one embodiment, the modular flow cytometry system includes the following: a laser system for emitting laser beams; a flow cell assembly positioned to receive the laser beams at an interrogation region of a fluidics stream where fluoresced cells scatter the laser beams into fluorescent light; a fiber assembly positioned to collect the fluorescent light; and a compact light detection module including a first image array having a transparent block, a plurality of micro-mirrors in a row coupled to a first side of the transparent block, and a plurality of filters in a row coupled to a second side of the transparent block opposite the first side.

Abstract: A system, an apparatus, and a method are provided for a modular flow cytometer with a compact size. In one embodiment, the modular flow cytometry system includes the following: a laser system for emitting laser beams; a flow cell assembly positioned to receive the laser beams at an interrogation region of a fluidics stream where fluoresced cells scatter the laser beams into fluorescent light; a fiber assembly positioned to collect the fluorescent light; and a compact light detection module including a first image array having a transparent block, a plurality of micro-mirrors in a row coupled to a first side of the transparent block, and a plurality of filters in a row coupled to a second side of the transparent block opposite the first side.

Abstract: In one embodiment, a flow cytometer is disclosed having a compact light detection module. The compact light detection module includes an image array with a transparent block, a plurality of micro-mirrors in a row coupled to a first side of the transparent block, and a plurality of filters in a row coupled to a second side of the transparent block opposite the first side. Each of the plurality of filters reflects light to one of the plurality of micro-mirrors and passes light of a differing wavelength range and each of the plurality of micro-mirrors reflects light to one of the plurality of filters, such that incident light into the image array zigzags back and forth between consecutive filters of the plurality of filters and consecutive micro-mirrors of the plurality of micro-mirrors. A radius of curvature of each of the plurality of micro-mirrors images the fiber aperture onto the odd filters and collimates the light beam on the even filters.

Abstract: In one embodiment, a flow cytometer is disclosed having a compact light detection module. The compact light detection module includes an image array with a transparent block, a plurality of micro-mirrors in a row coupled to a first side of the transparent block, and a plurality of filters in a row coupled to a second side of the transparent block opposite the first side. Each of the plurality of filters reflects light to one of the plurality of micro-mirrors and passes light of a differing wavelength range and each of the plurality of micro-mirrors reflects light to one of the plurality of filters, such that incident light into the image array zigzags back and forth between consecutive filters of the plurality of filters and consecutive micro-mirrors of the plurality of micro-mirrors. A radius of curvature of each of the plurality of micro-mirrors images the fiber aperture onto the odd filters and collimates the light beam on the even filters.

Abstract: In one embodiment, a flow cytometer is disclosed having a compact light detection module. The compact light detection module includes an image array with a transparent block, a plurality of micro-mirrors in a row coupled to a first side of the transparent block, and a plurality of filters in a row coupled to a second side of the transparent block opposite the first side. Each of the plurality of filters reflects light to one of the plurality of micro-mirrors and passes light of a differing wavelength range and each of the plurality of micro-mirrors reflects light to one of the plurality of filters, such that incident light into the image array zigzags back and forth between consecutive filters of the plurality of filters and consecutive micro-mirrors of the plurality of micro-mirrors. A radius of curvature of each of the plurality of micro-mirrors images the fiber aperture onto the odd filters and collimates the light beam on the even filters.

Abstract: A crystal for flow cytometry with dual laser beams is disclosed. The crystal is a birefringent crystal comprising a material composition including a quartz mineral having a face side including a face angle of ninety degrees plus or minus one tenth of a degree; a wedge side that is substantially perpendicular to the face side, wherein the wedge side includes a wedge angle of two degrees plus or minus one tenth of a degree; and a major side that is substantially perpendicular to the face side and the wedge side. The major side includes a thickness of one and one-half millimeter plus or minus one tenth of a millimeter. A polarized light beam entering the birefringent crystal at an incident angle is separated into an ordinary light beam and an extraordinary light beam.

Abstract: A system, method, and apparatus are provided for cytometry with dual laser beams. In one example, the method includes directing an incident light beam from a source to enter an optical waveplate; polarizing the incident light beam into a polarized light beam in response to the incident light beam entering through the optical waveplate; directing the polarized light beam to enter a birefringent crystal; separating the polarized light beam into an ordinary light beam and an extraordinary light beam in response to the polarized light beam entering the birefringent crystal; directing the ordinary light beam and the extraordinary light beam to enter a lens; focusing the ordinary light beam and the extraordinary light beam into dual light beams separated by a beam displacement; and coupling the dual light beams to form a sample region having substantially uniform light intensity to analyze moving particles in the particle analyzer.

Abstract: A system, an apparatus, and a method are provided for a modular flow cytometer with a compact size. In one embodiment, the modular flow cytometry system includes the following: a laser system for emitting laser beams; a flow cell assembly positioned to receive the laser beams at an interrogation region of a fluidics stream where fluoresced cells scatter the laser beams into fluorescent light; a fiber assembly positioned to collect the fluorescent light; and a compact light detection module including a first image array having a transparent block, a plurality of micro-mirrors in a row coupled to a first side of the transparent block, and a plurality of filters in a row coupled to a second side of the transparent block opposite the first side.

Abstract: In one embodiment, a flow cytometer is disclosed having a compact light detection module. The compact light detection module includes an image array with a transparent block, a plurality of micro-mirrors in a row coupled to a first side of the transparent block, and a plurality of filters in a row coupled to a second side of the transparent block opposite the first side. Each of the plurality of filters reflects light to one of the plurality of micro-mirrors and passes light of a differing wavelength range and each of the plurality of micro-mirrors reflects light to one of the plurality of filters, such that incident light into the image array zigzags back and forth between consecutive filters of the plurality of filters and consecutive micro-mirrors of the plurality of micro-mirrors. A radius of curvature of each of the plurality of micro-mirrors images the fiber aperture onto the odd filters and collimates the light beam on the even filters.

Abstract: A system, method, and apparatus are provided for cytometry with dual laser beams. In one example, the method includes directing an incident light beam from a source to enter an optical waveplate; polarizing the incident light beam into a polarized light beam in response to the incident light beam entering through the optical waveplate; directing the polarized light beam to enter a birefringent crystal; separating the polarized light beam into an ordinary light beam and an extraordinary light beam in response to the polarized light beam entering the birefringent crystal; directing the ordinary light beam and the extraordinary light beam to enter a lens; focusing the ordinary light beam and the extraordinary light beam into dual light beams separated by a beam displacement; and coupling the dual light beams to form a sample region having substantially uniform light intensity to analyze moving particles in the particle analyzer.

Abstract: An optical spectrum analyzer is implemented with a detector combined with a tunable filter mounted on a stage capable of 360-degree rotation at a constant velocity. Because of the constant rate of angular change, different portions of the input spectrum are detected at each increment of time as a function of filter position, which can be easily measured with an encoder for synchronization purposes. The unidirectional motion of the mirror permits operation at very high speeds with great mechanical reliability. The same improvements may be obtained using a diffraction grating or a prism, in which case the detector or an intervening mirror may be rotated instead of the grating or prism.

Abstract: A four-fiber collimator is coupled to the optics of a single interleaver to produce the functionality of two co-packaged interleavers. Two fibers of the collimator are coupled to the core optics of a single interleaver to produce two pairs of output beams. The other two fibers of the collimators are coupled to receive the reflection output beams. The geometry of the optical fibers in the bundle is controlled to produce interleaver outputs with no offset. In another embodiment two fibers of the four-fiber collimator are coupled as inputs to and the other two fibers as outputs from a Fabry-Perot etalon. The geometry of the fibers and the focal length of the collimator are controlled to produce two outputs with peaks offset by a predetermined amount.

Abstract: An optical spectrum analyzer includes a multilayer-coating filter for separating a wavelength in the spectrum of an incident input beam, a detector optically coupled to the filter, a voice-coil actuator for rotating the filter in oscillating motion to vary the wavelength received by the detector as a function of time, and an encoder for synchronizing the angular position of the filter with the wavelength received at the detector. The use of the voice-coil actuator makes it possible to achieve significantly greater speeds of operation with a significantly smaller device.

Abstract: Optical communication systems are sensitive to chromatic dispersion. An optical interleaver structure is provided that provides a significantly reduced dispersion, obtained by using at least one of a proper coating and a desired phase offset of each interfering cavity.