Abstract: The present invention is related to a gas filling socket, gas filling socket set, and gas filling apparatus. The gas filling socket comprises a carrying base having an upper surface and a lower surface, the upper surface being used to carry a semiconductor storage device or a reticle pod; at least a pair of through holes being set on and through the carrying base; at least one gas input port connecting to one through hole, and at least one gas output port connecting to another through hole, wherein the characteristic of the gas filling socket is that: the upper surface of the carrying base includes an angle guiding board disposed on one side of the carrying base for providing a guiding function to ensure the positioning of the semiconductor storage device or the reticle pod while the semiconductor storage device or the reticle pod is placed into the gas filling socket.

Abstract: The present invention discloses a sheet clamping apparatus for a reticle, a wafer, a glass substrate, a LCD panel et al. The apparatus comprises a pair of brackets, each bracket having at least one cam groove thereon for defining a movement route by two opposing sides of the cam groove, and one end of each bracket being joined with a connecting frame. One end of a clamping arm is joined with each cam groove, and the other end of the clamping arm is clamping the sheet (ex: a reticle, a wafer, a glass substrate, a LCD panel et al.). The characteristic of the sheet clamping apparatus is that: on the other end of each clamping arm is formed with a clamping head with recess, and at least a pair of rollers are disposed on the recess of clamping head for stably clamping the reticle or a semiconductor component stored in the pod.