Patents by Inventor Yung-wang Lo

Yung-wang Lo has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Multipurpose slurry delivery arm for chemical mechanical polishing
    Patent number: 7052374
    Abstract: An adjustable slurry dispensing device for use with a chemical mechanical polishing apparatus is disclosed. The slurry arm is pivotally connected to the polishing apparatus and has a slurry delivery assembly that is translatable along the length of the arm. This combination of adjustments allows the user to deposit polishing slurry at a desired location on the polishing pad of the polishing apparatus. The dispensing device may be motorized, in which case the slurry arm may be automatically pivotable and the slurry delivery assembly may be automatically translatable along the slurry arm. The motors may be controlled by a computer, or they may be manually adjusted by the user. A method of using the apparatus is also disclosed.
    Type: Grant
    Filed: March 1, 2005
    Date of Patent: May 30, 2006
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Fang-lin Lu, Wen-chen Chien, Chia-cheng Chang, Yung-wang Lo