Abstract: An object of the invention is to provide a thin film manufacturing device which further reduces a load on a substrate. Provided is a thin film manufacturing device for forming a thin film on a substrate by supplying a mist of a solution including a thin-film forming material to the substrate, characterized in that the device includes: a plasma generation unit including a first electrode and a second electrode disposed closer to one surface of the substrate, which generates plasma between the first electrode and the second electrode; and a mist supply unit which passes the mist between the first electrode and the second electrode and supplies the mist to the substrate.

Abstract: In a tool failure detection apparatus for a working machine such as a drilling machine for circuit boards, light is irradiated onto a workable area of a workpiece, and reflection light from the workable area is picked up by an imaging unit to produce a video signal. A video signal indicative of at least either one of a tool image and a worked void image which is picked up within a predetermined region of a picture is sampled to calculate an image area. A comparator compares a calculated image area with a preset reference value indicative of normality of the tool to judge whether the tool is normal or broken.