Abstract: A manufacturing method of a semiconductor element includes forming a plurality of islands, each including a semiconductor layer containing a nitride semiconductor and a support formed on the semiconductor layer, on a sapphire substrate, joining the support to a retention substrate via an adhesive member, peeling off the semiconductor layer from the sapphire substrate by irradiating the semiconductor layer with laser light, and polishing a surface of the semiconductor layers peeled off from the sapphire substrate.

Abstract: A manufacturing method of a semiconductor element includes forming a plurality of semiconductor layers on a sapphire substrate, each of the semiconductor layers having a first surface on the sapphire substrate side and a second surface on the opposite side, joining the second surfaces of the plurality of semiconductor layers to a retention member via an adhesive member, peeling off the plurality of semiconductor layers from the sapphire substrate by irradiating the first surfaces of the plurality of semiconductor layers with laser light, and polishing the first surfaces of the plurality of semiconductor layers. At least one semiconductor layer among the plurality of semiconductor layers includes a polishing indication part extending from the second surface toward the first surface. The polishing is executed until the polishing indication part is exposed to the polished surface.

Abstract: A force sensor includes a first structure, four strain generation parts, and a second structure. The first structure is formed in such a way that a third axis penetrates therethrough. The four strain generation parts are provided along first and second axes on a reference plane formed by the first and second axes. The second structure is connected to the first structure with the strain generation parts interposed therebetween. The strain generation parts each includes a first beam part extending along the first axis or the second axis, and a second beam part extending in a direction orthogonal to the first beam part and connected to the first beam part at an intermediate part. The strain generation parts are formed in such a way that they are line-symmetric with respect to both the first axis and the second axis when projected in a direction of the third axis.

Abstract: A force sensor includes a first structure, four strain generation parts, and a second structure connected to the first structure with the strain generation parts interposed therebetween. The strain generation part includes a first connection part connected to the first structure, a first branch part, which is a beam-like part branching into two from the first connection part toward the second structure and extending in directions separating from each other, a second branch part, which is a beam-like part connected to the first branch part with bent parts interposed therebetween and extending in directions approaching each other, and a second connection part where branched parts of the second branch part join and connects to the second structure. The strain generation parts are formed so that the strain generation parts become line-symmetric with respect to the first and second axes when projected in a direction perpendicular to the reference plane.

Abstract: A travelling apparatus having a high travelling performance with a simple structure is provided. A travelling apparatus according to an embodiment includes: a frame; front wheels disposed in a front of the frame; first links configured to be extendable and retractable and coupled between the front wheels and an oscillation axis located in a rear of the front wheels; and first linear motion mechanisms that are coupled between the frame and the first links and are extended and retracted so as to rotate the first links about the oscillation axis.

Abstract: A force sensor includes a first structure, four strain generation parts, and a second structure. The first structure is formed in such a way that a third axis penetrates therethrough. The four strain generation parts are provided along first and second axes on a reference plane formed by the first and second axes. The second structure is connected to the first structure with the strain generation parts interposed therebetween. The strain generation parts each includes a first beam part extending along the first axis or the second axis, and a second beam part extending in a direction orthogonal to the first beam part and connected to the first beam part at an intermediate part. The strain generation parts are formed in such a way that they are line-symmetric with respect to both the first axis and the second axis when projected in a direction of the third axis.

Abstract: A force sensor includes a first structure, four strain generation parts, and a second structure connected to the first structure with the strain generation parts interposed therebetween. The strain generation part includes a first connection part connected to the first structure, a first branch part, which is a beam-like part branching into two from the first connection part toward the second structure and extending in directions separating from each other, a second branch part, which is a beam-like part connected to the first branch part with bent parts interposed therebetween and extending in directions approaching each other, and a second connection part where branched parts of the second branch part join and connects to the second structure. The strain generation parts are formed so that the strain generation parts become line-symmetric with respect to the first and second axes when projected in a direction perpendicular to the reference plane.

Abstract: Disclosed are an inorganic nanofiber characterized in that the average fiber diameter is 2 ?m or less, the average fiber length is 200 ?m or less, and the CV value of the fiber length is 0.7 or less; and a method of manufacturing the same. In the manufacturing method, an inorganic nanofiber sheet consisting of inorganic nanofibers having an average fiber diameter of 2 ?m or less is formed by electrospinning, and then, the inorganic nanofiber sheet is pressed using a press machine and crushed so that the average fiber length becomes 200 ?m or less, and the CV value of the fiber length becomes 0.7 or less.

Abstract: An electric wheelchair operation apparatus includes a sliding part disposed in an armrest part, a dial part disposed on a tip side of the armrest part, the dial part configured to be moved together with the sliding part in the vehicle forward/backward direction, and an electric wheelchair drive control unit configured to control a traveling motion of an electric wheelchair by associating the amount of movement of the sliding part and/or the moved position thereof with respect to the reference point in the vehicle forward/backward direction detected by a first sensor with a traveling motion of the electric wheelchair in a forward/backward direction and associating the amount of rotation, the rotational position, and/or the rotational torque of the dial part detected by a second sensor with a turning motion of the electric wheelchair in a left/right direction.

Abstract: A travelling apparatus having a high travelling performance with a simple structure is provided. A travelling apparatus according to an embodiment includes: a frame; front wheels disposed in a front of the frame; first links configured to be extendable and retractable and coupled between the front wheels and an oscillation axis located in a rear of the front wheels; and first linear motion mechanisms that are coupled between the frame and the first links and are extended and retracted so as to rotate the first links about the oscillation axis.

Abstract: Disclosed are an inorganic nanofiber characterized in that the average fiber diameter is 2 ?m or less, the average fiber length is 200 ?m or less, and the CV value of the fiber length is 0.7 or less; and a method of manufacturing the same. In the manufacturing method, an inorganic nanofiber sheet consisting of inorganic nanofibers having an average fiber diameter of 2 ?m or less is formed by electrospinning, and then, the inorganic nanofiber sheet is pressed using a press machine and crushed so that the average fiber length becomes 200 ?m or less, and the CV value of the fiber length becomes 0.7 or less.

Abstract: Disclosed are an inorganic nanofiber characterized in that the average fiber diameter is 2 ?m or less, the average fiber length is 200 ?m or less, and the CV value of the fiber length is 0.7 or less; and a method of manufacturing the same. In the manufacturing method, an inorganic nanofiber sheet consisting of inorganic nanofibers having an average fiber diameter of 2 ?m or less is formed by electrospinning, and then, the inorganic nanofiber sheet is pressed using a press machine and crushed so that the average fiber length becomes 200 ?m or less, and the CV value of the fiber length becomes 0.7 or less.

Abstract: An actuator according to an embodiment includes a first rotating body that is rotatable around an input axis and includes a first groove part extending in a first direction, a second rotating body that is rotatable around an output axis and includes a second protruding part extending in a second direction substantially perpendicular to the first direction, a strain body that includes a first protruding part capable of being engaged with a first groove part through a gap whose direction is vertical to that of the input axis and a second groove part capable of being engaged with a second protruding part through a gap whose direction is vertical to that of the output axis and transmits a rotational torque of the input axis to the output axis, and a detection element that is attached to the strain body.

Abstract: When a vehicle body is on board an escalator, a control device makes an ejection determination by use of an external sensor. The control device makes an ejection determination by use of front-wheel rotation sensors. The control device makes an ejection determination by use of an inclination detecting unit. The control device switches a control mode from a boarding control mode to an ejection control mode, when at least one of the above three ejection determinations is affirmatively made.

Abstract: An electric wheelchair operation apparatus includes a sliding part disposed in an armrest part, a dial part disposed on a tip side of the armrest part, the dial part configured to be moved together with the sliding part in the vehicle forward/backward direction, and an electric wheelchair drive control unit configured to control a traveling motion of an electric wheelchair by associating the amount of movement of the sliding part and/or the moved position thereof with respect to the reference point in the vehicle forward/backward direction detected by a first sensor with a traveling motion of the electric wheelchair in a forward/backward direction and associating the amount of rotation, the rotational position, and/or the rotational torque of the dial part detected by a second sensor with a turning motion of the electric wheelchair in a left/right direction.

Abstract: The travelling apparatus according to exemplary embodiments includes front wheels, which are driving wheels, an upper frame, first linear motion mechanisms configured to be extendable and retractable and couple the front wheels to the upper frame, middle wheels configured to be disposed at a back of the front wheels, second linear motion mechanisms configured to be extendable and retractable and couple a riding part to the middle wheels, rear wheels configured to be disposed at a back of the middle wheels, lower links configured to couple the middle wheels to the rear wheels, respectively, rear links configured to couple the lower links to the upper frame, and a third linear motion mechanism configured to change an angle between the upper frame and the rear links.

Abstract: A torque control apparatus includes a torque command output unit including a first low pass filter configured to cut off a torque command value by a first frequency, and a switching unit configured to switch, when a first torque value detected by a first torque sensor satisfies a predetermined condition, a second torque value detected by a second torque sensor to the torque command output unit. The switching unit includes a second low pass filter configured to cut off the second torque value by a second frequency which is higher than the first frequency and output the obtained value to the torque command output unit, uses the second low pass filter for a predetermined period of time after the switching, and outputs the second torque value to the torque command output unit without using the second low pass filter after the predetermined period of time has passed.

Abstract: A torque control apparatus includes a torque command output unit including a first low pass filter configured to cut off a torque command value by a first frequency, and a switching unit configured to switch, when a first torque value detected by a first torque sensor satisfies a predetermined condition, a second torque value detected by a second torque sensor to the torque command output unit. The switching unit includes a second low pass filter configured to cut off the second torque value by a second frequency which is higher than the first frequency and output the obtained value to the torque command output unit, uses the second low pass filter for a predetermined period of time after the switching, and outputs the second torque value to the torque command output unit without using the second low pass filter after the predetermined period of time has passed.

Abstract: When a vehicle body is on board an escalator, a control device makes an ejection determination by use of an external sensor. The control device makes an ejection determination by use of front-wheel rotation sensors. The control device makes an ejection determination by use of an inclination detecting unit. The control device switches a control mode from a boarding control mode to an ejection control mode, when at least one of the above three ejection determinations is affirmatively made.

Abstract: An actuator according to an embodiment includes a first rotating body that is rotatable around an input axis and includes a first groove part extending in a first direction, a second rotating body that is rotatable around an output axis and includes a second protruding part extending in a second direction substantially perpendicular to the first direction, a strain body that includes a first protruding part capable of being engaged with a first groove part through a gap whose direction is vertical to that of the input axis and a second groove part capable of being engaged with a second protruding part through a gap whose direction is vertical to that of the output axis and transmits a rotational torque of the input axis to the output axis, and a detection element that is attached to the strain body.