Patents by Inventor Yusuke Shiomura

Yusuke Shiomura has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Switching valve, valve apparatus, holding apparatus, lithography apparatus, and method of manufacturing article
    Patent number: 11466787
    Abstract: The present invention provides a switching valve comprising: a housing including a first port, a second port, and a third port; a valve element configured to be movable in the housing so as to selectively allow one of the first port and the second port to communicate with the third port in accordance with a pressure difference between the first port and the second port; and a pressing member configured to press the valve element toward a side of the first port.
    Type: Grant
    Filed: December 2, 2020
    Date of Patent: October 11, 2022
    Assignee: CANON KABUSHIKI KAISHA
    Inventor: Yusuke Shiomura
  • SWITCHING VALVE, VALVE APPARATUS, HOLDING APPARATUS, LITHOGRAPHY APPARATUS, AND METHOD OF MANUFACTURING ARTICLE
    Publication number: 20210190219
    Abstract: The present invention provides a switching valve comprising: a housing including a first port, a second port, and a third port; a valve element configured to be movable in the housing so as to selectively allow one of the first port and the second port to communicate with the third port in accordance with a pressure difference between the first port and the second port; and a pressing member configured to press the valve element toward a side of the first port.
    Type: Application
    Filed: December 2, 2020
    Publication date: June 24, 2021
    Inventor: Yusuke Shiomura