Patents by Inventor Yusuke Tanba

Yusuke Tanba has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Charged particle beam apparatus having noise absorbing arrangements
    Patent number: 8822952
    Abstract: Charged particle beam apparatus arrangements in which either a first noise absorber which provides noise absorbing performance specialized for a first frequency range including the natural frequency of the charged particle beam apparatus as reference, or a second noise absorber which provides noise absorbing performance specialized for a second frequency range including the frequency of acoustic standing waves generated within the cover as reference, or both of the first and second noise absorbers is/are disposed within a cover of the charged particle beam apparatus.
    Type: Grant
    Filed: October 14, 2011
    Date of Patent: September 2, 2014
    Assignee: Hitachi High-Technologies Corporation
    Inventors: Daisuke Muto, Masanori Watanabe, Masaru Matsushima, Shuichi Nakagawa, Masahiro Akatsu, Yusuke Tanba, Satoshi Okada
  • CHARGED PARTICLE BEAM APPARATUS
    Publication number: 20130228686
    Abstract: Currently, there is no noise-proof cover, particularly noise-proof cover used in a clean room, which absorbs noise by a structure specialized for an estimated frequency of noise produced by environmental noise. Therefore, efficient noise absorption is still difficult. Accordingly, the invention provides a charged particle beam apparatus in which either a first noise absorber which provides noise absorbing performance specialized for a first frequency range including the natural frequency of the charged particle beam apparatus as reference, or a second noise absorber which provides noise absorbing performance specialized for a second frequency range including the frequency of acoustic standing waves generated within the cover as reference, or both of the first and second noise absorbers is/are disposed within a cover of the charged particle beam apparatus.
    Type: Application
    Filed: October 14, 2011
    Publication date: September 5, 2013
    Inventors: Daisuke Muto, Masanori Watanabe, Masaru Matsushima, Shuichi Nakagawa, Masahiro Akatsu, Yusuke Tanba, Satoshi Okada