Abstract: A variable valve mechanism includes a first cam unit including cams configured to drive an intake valve on a first side in a first cylinder; a first sliding mechanism configured to slide the first cam unit such that the first cam unit is switched between two positions to select any one of the cams; a second cam unit including cams configured to drive an intake valve on a second side in the first cylinder, cams configured to drive an intake valve on the first side in a second cylinder, and cams configured to drive an intake valve on the second side in the second cylinder; and a second sliding mechanism configured to slide the second cam unit such that the second cam unit is switched among three positions to select any one of the cams for each of the intake valves.

Abstract: A supply flow passage branches into a plurality of upstream flow passages. A plurality of discharge ports are respectively disposed at a plurality of positions differing in distance from a rotational axis of a substrate. A return flow passage is connected to the upstream flow passage. A downstream heater heats liquid flowing through the upstream flow passage. A downstream switching unit supplies the liquid, supplied to the plurality of upstream flow passages from the supply flow passage, to one of the plurality of discharge ports and the return flow passage, selectively.

Abstract: A supply flow passage branches into a plurality of upstream flow passages. The plurality of upstream flow passages include a branching upstream flow passage that branches into a plurality of downstream flow passages. A plurality of discharge ports are respectively disposed at a plurality of positions differing in distance from a rotational axis and discharge processing liquids, supplied via the plurality of upstream flow passages, toward an upper surface of a substrate held by a substrate holding unit.

Abstract: A supply flow passage branches into a plurality of upstream flow passages. A plurality of discharge ports are respectively disposed at a plurality of positions differing in distance from a rotational axis of a substrate. Hydrogen peroxide water, that is one of components of a chemical liquid (SPM), is supplied to the upstream flow passage from a component liquid flow passage. A mixing ratio changing unit including a plurality of first flow control valves and a plurality of second flow control valves independently changes mixing ratios of sulfuric acid and hydrogen peroxide water included in the chemical liquid to be discharged from the plurality of discharge ports for each of the upstream flow passages.

Abstract: A bearing structure for a camshaft includes a bearing part that includes a cylinder head, a cam cap, and a positioning member. The cam cap is assembled to an upper part of the cylinder head. The cylinder head and the cam cap define a journal hole. The cylinder head and the cam cap rotatably support the camshaft in the journal hole. The positioning member determines the position where the cylinder head and the cam cap are assembled to each other. The positioning member is press-fitted into the cylinder head and the cam cap. In the bearing part for the camshaft, the positioning member is provided only in an inner part, which is a part of the bearing part between an axis of the camshaft and a center of an upper part of the cylinder head.