Abstract: A planar motor permits a thinner design, controlled vibration, and highly accurate positioning by disposing X-axis and Y-axis coreless type linear motors on the same plane without using an expensive linear guide and by incorporating high-accuracy capacitance displacement sensors in X and Y directions. Two pairs of permanent magnets are disposed such that they are respectively orthogonalized with respect to two axes that are orthogonalized with each other on a movable stage and that they generate magnetic fluxes in a direction perpendicular to a surface of the movable stage. Furthermore, the permanent magnets of one pair are disposed symmetrically to each other about one of the two axes, while those of the other pair are disposed symmetrically to each other about the other axis. Two pairs of coils are provided such that they oppose and match the two pairs of permanent magnets.

Abstract: A planar motor permits a thinner design, controlled vibration, and highly accurate positioning by disposing X-axis and Y-axis coreless type linear motors on the same plane without using an expensive linear guide and by incorporating high-accuracy capacitance displacement sensors in X and Y directions. Two pairs of permanent magnets are disposed such that they are respectively orthogonalized with respect to two axes that are orthogonalized with each other on a movable stage and that they generate magnetic fluxes in a direction perpendicular to a surface of the movable stage. Furthermore, the permanent magnets of one pair are disposed symmetrically to each other about one of the two axes, while those of the other pair are disposed symmetrically to each other about the other axis. Two pairs of coils are provided such that they oppose and match the two pairs of permanent magnets.

Abstract: A galvanometer is described which has increased capacitance and which is hardly affected by humidity while maintaining the advantages of low machining precision and being unaffected by temperature variations. A front bearing and a rear bearing are fixed to a front shaft and a rear shaft, respectively, of a rotor held in a coil of a stator. Only an outer race of the front bearing is slidably inserted without being fixed to a case and has a force applied in a rear shaft direction by springs. A butterfly-shaped common electrode, which is patterned with a conductive thin film, is mounted on the rear shaft through a hub, and a four-division electrode is opposed thereto with an extremely small air gap to the butterfly-shaped common electrode. The four-division electrode is mounted on a spacer, and the spacer is mounted on the case so as to provide the air gap of a desired dimension. The rear shaft, the hub, and the spacer are made of an identical material.