Patents by Inventor Yutaka Simada

Yutaka Simada has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Vertical boat used for heat treatment of semiconductor wafer and vertical heat treatment apparatus
    Patent number: 5316472
    Abstract: A semiconductor wafer boat used in a vertical CVD apparatus includes four columns fixed to upper and lower support plates. Each of the columns has a plurality of first grooves arranged at regular intervals in the vertical direction so as to place wafers in substantially parallel to each other, and a plurality of second grooves formed alternately with the first grooves. A plate ring is provided for each of the second grooves so as to improve the uniformity of thickness of a film to be formed on each wafer. Each ring has an outer diameter larger than that of a wafer, and an inner diameter smaller than that of the wafer. Each ring is placed such that there is a clearance for transferring each wafer between each ring and each wafer in the vertical direction.
    Type: Grant
    Filed: December 16, 1992
    Date of Patent: May 31, 1994
    Assignees: Tokyo Electron Limited, Tokyo Electron Sagami Limited, Kabushiki Kaisha Toshiba
    Inventors: Reiji Niino, Isao Siratani, Yutaka Simada, Hiroki Fukusima, Hirofumi Kitayama, Akimichi Yonekura, Yuuichi Mikata