Patents by Inventor Yuuichi Miyahara

Yuuichi Miyahara has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 10094043
    Abstract: A method for producing a single crystal, wherein the space is adjusted to a predetermined distance by measuring a distance from a reference height position at a predetermined height above a melt surface to a lower end part of an in-furnace structure in a state wherein the in-furnace structure above the melt surface is installed in a pull chamber, obtaining a lower end part position error which is a difference between measured distance and a distance from the previously set reference height position to the lower end part of the in-furnace structure, obtaining a target distance from the melt surface to the reference height position by adding the lower end part position error and a distance from the reference height position to a melt surface position, and adjusting a distance from an initial position of the melt surface to the reference height position such that the target distance is attained.
    Type: Grant
    Filed: August 25, 2015
    Date of Patent: October 9, 2018
    Assignee: SHIN-ETSU HANDOTAI CO., LTD.
    Inventors: Shou Takashima, Yuuichi Miyahara, Atsushi Iwasaki
  • Patent number: 9863060
    Abstract: Method for manufacturing a single crystal according to a CZ method, including: pre-examining a correlation between an Al/Li ratio in a quartz raw material powder used for producing the quartz crucible, a use time of the crucible, a devitrification ratio at the use time, and occurrence or nonoccurrence of melt leakage attributable to the devitrification part; setting a range of the devitrification ratio of the quartz crucible in order not to generate the melt leakage, and determining a maximum use time of the quartz crucible according to the Al/Li ratio so as to fall within the set range of the ratio, on the basis of the correlation; and growing the single crystal by using the quartz crucible in the range of the maximum use time. This provides a manufacturing method which can efficiently use a quartz crucible to grow a single crystal while preventing occurrence of melt leakage.
    Type: Grant
    Filed: November 12, 2014
    Date of Patent: January 9, 2018
    Assignee: SHIN-ETSU HANDOTAI CO., LTD.
    Inventors: Yuuichi Miyahara, Shou Takashima, Yasuhiko Sawazaki, Atsushi Iwasaki
  • Publication number: 20170260646
    Abstract: A method for producing a single crystal, wherein the space is adjusted to a predetermined distance by measuring a distance from a reference height position at a predetermined height above a melt surface to a lower end part of an in-furnace structure in a state wherein the in-furnace structure above the melt surface is installed in a pull chamber, obtaining a lower end part position error which is a difference between measured distance and a distance from the previously set reference height position to the lower end part of the in-furnace structure, obtaining a target distance from the melt surface to the reference height position by adding the lower end part position error and a distance from the reference height position to a melt surface position, and adjusting a distance from an initial position of the melt surface to the reference height position such that the target distance is attained.
    Type: Application
    Filed: August 25, 2015
    Publication date: September 14, 2017
    Applicant: SHIN-ETSU HANDOTAI CO., LTD.
    Inventors: Shou TAKASHIMA, Yuuichi MIYAHARA, Atsushi IWASAKI
  • Publication number: 20160289861
    Abstract: Method for manufacturing a single crystal according to a CZ method, including: pre-examining a correlation between an Al/Li ratio in a quartz raw material powder used for producing the quartz crucible, a use time of the crucible, a devitrification ratio at the use time, and occurrence or nonoccurrence of melt leakage attributable to the devitrification part; setting a range of the devitrification ratio of the quartz crucible in order not to generate the melt leakage, and determining a maximum use time of the quartz crucible according to the Al/Li ratio so as to fall within the set range of the ratio, on the basis of the correlation; and growing the single crystal by using the quartz crucible in the range of the maximum use time. This provides a manufacturing method which can efficiently use a quartz crucible to grow a single crystal while preventing occurrence of melt leakage.
    Type: Application
    Filed: November 12, 2014
    Publication date: October 6, 2016
    Applicant: SHIN-ETSU HANDOTAI CO., LTD.
    Inventors: Yuuichi MIYAHARA, Shou TAKASHIMA, Yasuhiko SAWAZAKI, Atsushi IWASAKI
  • Patent number: 9234296
    Abstract: The present invention is a semiconductor single crystal manufacturing apparatus including, within a growth furnace main body, a crucible, and a heater disposed around the crucible, wherein a heat insulating cylinder is disposed around the heater within the growth furnace main body, the heat insulating cylinder includes a step portion dividing the heat insulating cylinder into the upper part and the lower part at the inside surface thereof, the inner diameter of the lower part is larger than the inner diameter of the upper part, a heat insulating plate is disposed below the heater and on the inside of the lower part of the heat insulating cylinder within the growth furnace main body, and the diameter of the heat insulating plate is larger than the inner diameter of the upper part of the heat insulating cylinder and is smaller than the inner diameter of the lower part.
    Type: Grant
    Filed: July 6, 2011
    Date of Patent: January 12, 2016
    Assignee: SHIN-ETSU HANDOTAI CO., LTD.
    Inventors: Shou Takashima, Yuuichi Miyahara, Atsushi Iwasaki, Nobuaki Mitamura, Susumu Sonokawa
  • Publication number: 20130125810
    Abstract: The present invention is a semiconductor single crystal manufacturing apparatus including, within a growth furnace main body, a crucible, and a heater disposed around the crucible, wherein a heat insulating cylinder is disposed around the heater within the growth furnace main body, the heat insulating cylinder includes a step portion dividing the heat insulating cylinder into the upper part and the lower part at the inside surface thereof, the inner diameter of the lower part is larger than the inner diameter of the upper part, a heat insulating plate is disposed below the heater and on the inside of the lower part of the heat insulating cylinder within the growth furnace main body, and the diameter of the heat insulating plate is larger than the inner diameter of the upper part of the heat insulating cylinder and is smaller than the inner diameter of the lower part.
    Type: Application
    Filed: July 6, 2011
    Publication date: May 23, 2013
    Applicant: SHIN-ETSU HANDOTAI CO., LTD.
    Inventors: Shou Takashima, Yuuichi Miyahara, Atsushi Iwasaki, Nobuaki Mitamura, Susumu Sonokawa
  • Patent number: 8343275
    Abstract: The present invention resides in a silicon single crystal growth method of pulling up and growing a single crystal from a melt of a silicon raw material in a quartz crucible based on a Czochralski method, wherein the method comprises the steps of: applying a DC voltage between an outer wall of the quartz crucible acts as a positive electrode and a pulling wire or pulling shaft for pulling up the silicon single crystal acts as a negative electrode; and fixing an electric current flowing through the silicon single crystal over a period of time for pulling up the single crystal, to grow the single crystal; as well as a pulling apparatus therefor.
    Type: Grant
    Filed: February 28, 2008
    Date of Patent: January 1, 2013
    Assignee: Shin-Etsu Handotai Co., Ltd.
    Inventors: Yuuichi Miyahara, Atsushi Iwasaki, Tetsuhiro Oda
  • Patent number: 8083852
    Abstract: A silicon single crystal growth method of pulling up and growing a single crystal from a melt of a silicon raw material melted in a quartz crucible based on a Czochralski method, the method comprising the steps of: applying a direct current voltage in such a manner that an outer wall of the quartz crucible acts as a positive electrode and an electrode immersed into the melt of the silicon raw material acts as a negative electrode, the immersed electrode being placed separately from a pulling member for pulling the single crystal; and growing the single crystal with the pulling member while passing an electric current through the electrode, and a pulling apparatus thereof.
    Type: Grant
    Filed: March 24, 2009
    Date of Patent: December 27, 2011
    Assignee: Shin-Etsu Handotai Co., Ltd.
    Inventors: Kosei Sugawara, Ryoji Hoshi, Masanori Takazawa, Yuuichi Miyahara, Atsushi Iwasaki
  • Publication number: 20110017125
    Abstract: A silicon single crystal growth method of pulling up and growing a single crystal from a melt of a silicon raw material melted in a quartz crucible based on a Czochralski method, the method comprising the steps of: applying a direct current voltage in such a manner that an outer wall of the quartz crucible acts as a positive electrode and an electrode immersed into the melt of the silicon raw material acts as a negative electrode, the immersed electrode being placed separately from a pulling member for pulling the single crystal; and growing the single crystal with the pulling member while passing an electric current through the electrode, and a pulling apparatus thereof.
    Type: Application
    Filed: March 24, 2009
    Publication date: January 27, 2011
    Applicant: SHIN-ETSU HANDOTAI CO., LTD.
    Inventors: Kosei Sugawara, Ryoji Hoshi, Masanori Takazawa, Yuuichi Miyahara, Atsushi Iwasaki
  • Publication number: 20100126408
    Abstract: The present invention resides in a silicon single crystal growth method of pulling up and growing a single crystal from a melt of a silicon raw material in a quartz crucible based on a Czochralski method, wherein the method comprises the steps of: applying a DC voltage between an outer wall of the quartz crucible acts as a positive electrode and a pulling wire or pulling shaft for pulling up the silicon single crystal acts as a negative electrode; and fixing an electric current flowing through the silicon single crystal over a period of time for pulling up the single crystal, to grow the single crystal; as well as a pulling apparatus therefor. This allows for provision of the silicon single crystal growth method and the pulling apparatus therefor, capable of generating appropriately crystallized layers, i.e.
    Type: Application
    Filed: February 28, 2008
    Publication date: May 27, 2010
    Applicant: SHIN-ETSU HANDOTAI CO., LTD.
    Inventors: Yuuichi Miyahara, Atsushi Iwasaki, Tetsuhiro Oda
  • Patent number: 6764548
    Abstract: The present invention provides an apparatus and a method for producing a silicon semiconductor single crystal which can stabilize and homogenize an amount of precipitated oxygen in the direction of the crystal growth axis when growing a silicon semiconductor single crystal. The apparatus for producing a silicon semiconductor single crystal by the Czochralski method comprises a main growth furnace having a crucible retaining silicon melt disposed therein for growing a silicon semiconductor single crystal, and an upper growth furnace for housing therein and cooling the silicon semiconductor single crystal pulled from the silicon melt, wherein the upper growth furnace communicated to a ceiling section of the main growth furnace is provided with an upper insulating member for surrounding a pulled silicon semiconductor single crystal.
    Type: Grant
    Filed: August 20, 2002
    Date of Patent: July 20, 2004
    Assignee: Shin-Etsu Handotai Co., Ltd.
    Inventors: Ryoji Hoshi, Takahiro Yanagimachi, Izumi Fusegawa, Tomohiko Ohta, Yuuichi Miyahara, Tetsuya Igarashi
  • Publication number: 20030089300
    Abstract: The present invention provides an apparatus and a method for producing a silicon semiconductor single crystal which can stabilize and homogenize an amount of precipitated oxygen in the direction of the crystal growth axis when growing a silicon semiconductor single crystal. The apparatus for producing a silicon semiconductor single crystal by the Czochralski method comprises a main growth furnace having a crucible retaining silicon melt disposed therein for growing a silicon semiconductor single crystal, and an upper growth furnace for housing therein and cooling the silicon semiconductor single crystal pulled from the silicon melt, wherein the upper growth furnace communicated to a ceiling section of the main growth furnace is provided with an upper insulating member for surrounding a pulled silicon semiconductor single crystal.
    Type: Application
    Filed: August 20, 2002
    Publication date: May 15, 2003
    Inventors: Ryoji Hoshi, Takahiro Yanagimachi, Izumi Fusegawa, Tomohiko Ohta, Yuuichi Miyahara, Tetsuya Igarashi
  • Patent number: 4156666
    Abstract: A degradable synthetic resin composition comprising a polyolefin, about 0.2 to 10% by weight of an organic degradation promotor and, optionally, about 10 to 60% by weight of an inorganic filler, and films for use in the agricultural environment prepared therefrom.
    Type: Grant
    Filed: October 31, 1975
    Date of Patent: May 29, 1979
    Assignee: Shiseido Company, Ltd.
    Inventors: Ryoji Odate, Yuuichi Miyahara