Abstract: A scanning device includes a substrate, which is etched to define an array of two or more parallel rotating members and a gimbal surrounding the rotating members. First hinges connect the gimbal to the substrate and defining a first axis of rotation, about which the gimbal rotates relative to the substrate. Second hinges connect the rotating members to the support and defining respective second, mutually-parallel axes of rotation of the rotating members relative to the support, which are not parallel to the first axis.

Abstract: A scanning device includes a scanner, which includes a base and a gimbal, mounted within the base so as to rotate relative to the base about a first axis of rotation. A transmit mirror and at least one receive mirror are mounted within the gimbal so as to rotate in mutual synchronization about respective second axes, which are parallel to one another and perpendicular to the first axis. A transmitter emits a beam including pulses of light toward the transmit mirror, which reflects the beam so that the scanner scans the beam over a scene. A receiver receives, by reflection from the at least one receive mirror, the light reflected from the scene and generates an output indicative of the time of flight of the pulses to and from points in the scene.

Abstract: A mechanical device includes a long, narrow element made of a rigid, elastic material. A rigid frame is configured to anchor at least one end of the element, which is attached to the frame, and to define a gap running longitudinally along the element between the beam and the frame, so that the element is free to move within the gap. A solid filler material, different from the rigid, elastic material, fills at least a part of the gap between the element and the frame so as to permit a first mode of movement of the element within the gap while inhibiting a different, second mode of movement.

Abstract: A method for fabrication of a device (206) from a wafer (170) of semiconductor material includes locally thinning the wafer in an area of the device to a predefined thickness by removing the semiconductor material from at least a first side of the wafer using a wet etching process, and etching through the thinned wafer in the area of the device so as to release a moving part (202) of the device. Other methods and systems for fabrication are also described.

Abstract: A rotation sensing device is presented. The device comprises: a proof mass arrangement comprising at least one pair of proof masses spaced-apart from one another along a first axis; a suspension assembly comprising flexible suspension beams having a main axis deformable between their substantially straight and curved states, the suspension assembly coupling the proof masses to an anchor assembly, while allowing a drive-mode oscillatory movement of the proof masses at least along a second axis substantially perpendicular to the main axis of the beams; and an actuation mechanism configured and operable to cause the drive-mode oscillatory movement of the proof masses in opposite directions along said second axis, thereby generating a sense-mode oscillatory movement of the proof masses during the rotation of the device about at least one rotation axis perpendicular to said second axis, said sense-mode movement being indicative of a rate of the rotation.

Abstract: A mechanical device includes a long, narrow element made of a rigid, elastic material. A rigid frame is configured to anchor at least one end of the element, which is attached to the frame, and to define a gap running longitudinally along the element between the beam and the frame, so that the element is free to move within the gap. A solid filler material, different from the rigid, elastic material, fills at least a part of the gap between the element and the frame so as to permit a first mode of movement of the element within the gap while inhibiting a different, second mode of movement.

Abstract: Optical apparatus (64) includes a stator assembly (47), which includes a core (78, 90, 91) containing an air gap and one or more coils (80, 92, 94, 116, 120) including conductive wire wound on the core so as to cause the core to form a magnetic circuit through the air gap in response to an electrical current flowing in the conductive wire. A scanning mirror assembly (45, 83, 85, 130) includes a support structure (68), a base (72), which is mounted to rotate about a first axis relative to the support structure, and a mirror (46), which is mounted to rotate about a second axis relative to the base. At least one rotor (76, 132) includes one or more permanent magnets, which are fixed to the scanning mirror assembly and which are positioned in the air gap so as to move in response to the magnetic circuit. A driver (82) is coupled to generate the electrical current in the one or more coils.

Abstract: Mechanical apparatus includes a base, a moving element, and a hinge, having a first end attached to the moving element. A supporting structure is attached to the base and to the second end of the hinge and has at least a component perpendicular to the hinge so as to translate rotation of the moving element about the hinge into elongation of the component, whereby the moving element rotates about the hinge relative to the base while the supporting structure is deformed as a result of the rotation of the moving element about the hinge. A strain-based rotation sensor is associated with the supporting structure and is configured to provide a signal indicative of the rotation of the moving element responsively to a strain induced due to deformation of the supporting structure as the result of the rotation of the moving element.

Abstract: A mechanical device includes a long, narrow element made of a rigid, elastic material. A rigid frame is configured to anchor at least one end of the element, which is attached to the frame, and to define a gap running longitudinally along the element between the beam and the frame, so that the element is free to move within the gap. A solid filler material, different from the rigid, elastic material, fills at least a part of the gap between the element and the frame so as to permit a first mode of movement of the element within the gap while inhibiting a different, second mode of movement.

Abstract: A method of laterally displacing at least a component of a light beam, the method comprising: a) directing the beam to enter a block of birefringent material at a first location, and at least the component of the beam to pass through the block on a first path to an exit location; and b) changing a polarization of the component of the beam after it has passed through the block, and directing it to pass back through the block from the previous exit location to a next exit location, following a next path oriented at changed angle due to its changed polarization state, at least one time; the component of the beam thereby being laterally displaced from the first location, when it exits the block a last time.

Abstract: A method of laterally displacing at least a component of a light beam, the method comprising: a) directing the beam to enter a block of birefringent material at a first location, and at least the component of the beam to pass through the block on a first path to an exit location; and b) changing a polarization of the component of the beam after it has passed through the block, and directing it to pass back through the block from the previous exit location to a next exit location, following a next path oriented at changed angle due to its changed polarization state, at least one time; the component of the beam thereby being laterally displaced from the first location, when it exits the block a last time.