Abstract: The present invention provides an electric generator for achieving the cost reduction of the electric generator itself from the view point of the structure of the electric generator, and the cost reduction of the generation of electricity from the view point of the performance of the electric generator, and a power supply equipment for use in this electric generator.

Abstract: A wafer conveyance system is described for transporting one or more wafers that undergo, while being transported, different processes at a plurality of wafer processing apparatuses inside which one or more wares are processed. A hermetically closed chamber is provided that defines an isolated environment inside which a controlled atmosphere. At least one guide path is provided inside the hermetically closed chamber. At least one mobile element is movable inside the hermetically closed chamber along the at least one guide path to transport one or more wafers from one wafer processing apparatus to another. A plurality of position sensors that detect positions of the at least one mobile element are deployed along each of the at least one guide path in such a manner that they are deployed at intervals close together when near the wafer processing apparatuses and deployed at wider intervals elsewhere. In another aspect, the guide rails may be constructed of a plurality of connectable rail units.

Abstract: The present invention provides an electric generator for achieving the cost reduction of the electric generator itself from the view point of the structure of the electric generator, and the cost reduction of the generation of electricity from the view point of the performance of the electric generator, and a power supply equipment for use in this electric generator.

Abstract: A wafer conveyance system is described for transporting one or more wafers that undergo, while being transported, different processes at a plurality of wafer processing apparatuses inside which one or more wares are processed. A hermetically closed chamber is provided that defines an isolated environment inside which a controlled atmosphere. At least one guide path is provided inside the hermetically closed chamber. At least one mobile element is movable inside the hermetically closed chamber along the at least one guide path to transport one or more wafers from one wafer processing apparatus to another. A plurality of position sensors that detect positions of the at least one mobile element are deployed along each of the at least one guide path in such a manner that they are deployed at intervals close together when near the wafer processing apparatuses and deployed at wider intervals elsewhere. In another aspect, the guide rails may be constructed of a plurality of connectable rail units.

Abstract: Wafer processing apparatus A-Z for performing processes A-Z on a wafer are arranged in a row. A chamber 14 is formed parallel to these wafer processing apparatus, and a guide rail 11 is provided inside the chamber 14. A mobile element 12 driven by means of a linear motor is provided on the guide rail 11, and a wafer transfer robot 13 capable of exchanging a wafer between the wafer processing apparatus is mounted on the mobile element 12. With this structure, the wafer transfer robot 13 exchange wafers between wafer processing apparatus to perform each process on the wafers until the wafers are conveyed to the wafer processing apparatus Z.

Abstract: Wafer processing apparatus A-Z for performing processes A-Z on a wafer are arranged in a row. A chamber 14 is formed parallel to these wafer processing apparatus, and a guide rail 11 is provided inside the chamber 14. A mobile element 12 driven by means of a linear motor is provided on the guide rail 11, and a wafer transfer robot 13 capable of exchanging a wafer between the wafer processing apparatus is mounted on the mobile element 12. With this structure, the wafer transfer robot 13 exchange wafers between wafer processing apparatus to perform each process on the wafers until the wafers are conveyed to the wafer processing apparatus Z.

Abstract: Wafer processing apparatus A-Z for performing processes A-Z on a wafer are arranged in a row. A chamber 14 is formed parallel to these wafer processing apparatus, and a guide rail 11 is provided inside the chamber 14. A mobile element 12 driven by means of a linear motor is provided on the guide rail 11, and a wafer transfer robot 13 capable of exchanging a wafer between the wafer processing apparatus is mounted on the mobile element 12. With this structure, the wafer transfer robot 13 exchange wafers between wafer processing apparatus to perform each process on the wafers until the wafers are conveyed to the wafer processing apparatus Z.

Abstract: An engine-operated generator system utilizes the switching elements of an inverter transformation circuit to accomplish starting. The starter circuit includes a battery, one electrode of which is connected to one terminal of a smoothing capacitor connected between the DC terminals of the inverter transformation circuit in such a manner that the electrode and the terminal are of the same polarity. The other electrode is connected to one of the output terminals of an AC generator system through a switch which is closed to start the engine, and which is connected to a reactor forming an LC circuit. In starting the engine, the rectifier circuit is driven in an inverter transformation mode, one of the switching elements in the inverter transformation circuit which is connected between the reactor and the one terminal of the smoothing capacitor being driven in a chopper mode. The inverter transformation circuit is formed by bridge-connecting switching elements each having a flywheel diode.

Abstract: An engine driven generator having an engine, a three-phase synchronous generator to be driven by the engine, a direct current power supply for actuating the engine, a direct current/alternating current power supply converter for converting a direct current power of the direct current power supply to an alternating current power and supplying the alternating current power to the three-phase synchronous generator:(1) characterized in further comprising a full-wave rectifier for rectifying an output of the three-phase generator and supplying the thus rectified output to the direct current/alternating current power converter; a switching unit for switching output terminals of the direct current/alternating current power converter to terminals of an outer device or output terminals of the synchronous generator; a rotor position detector for detecting a position of a rotor of the synchronous generator; and(2) characterized in that during the period when the three-phase synchronous generator performs the power gener