Patents by Inventor Zachary L. Lutz

Zachary L. Lutz has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Gridded susceptor
    Patent number: 7033445
    Abstract: Susceptor designs are provided for controlling damage to wafers, particularly during cold wafer drops-off on a hot susceptor. The designs include axisymmetric grid designs, such that thermal gradients are symmetrical in the circumferential (?) direction and the same traversing any particular radial line. The grids are preferably arcuate and each have the same surface area. In one embodiment an outer zone is asymmetrically designed to induce predictable wafer curling in a saddle shape.
    Type: Grant
    Filed: December 20, 2002
    Date of Patent: April 25, 2006
    Assignee: ASM America, Inc.
    Inventors: Tony J. Keeton, Zachary L. Lutz
  • Gridded susceptor
    Publication number: 20030140850
    Abstract: Susceptor designs are provided for controlling damage to wafers, particularly during cold wafer drops-off on a hot susceptor. The designs include axisymmetric grid designs, such that thermal gradients are symmetrical in the circumferential (&thgr;) direction and the same traversing any particular radial line. The grids are preferably arcuate and each have the same surface area. In one embodiment an outer zone is asymmetrically designed to induce predictable wafer curling in a saddle shape.
    Type: Application
    Filed: December 20, 2002
    Publication date: July 31, 2003
    Inventors: Tony J. Keeton, Zachary L. Lutz