Patents by Inventor Zenta Nanpei

Zenta Nanpei has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Load port
    Patent number: 6186723
    Abstract: A load port for semiconductor equipment includes a transporting apparatus 18 and/or a moving apparatus 30 for respectively transporting a carrier base 14 and moving a cover 15, using a smaller force until the carrier base 14 and/or the cover 15 reaches a predetermined position that is at a predetermined distance from an opening 16 of the equipment. This position is at a distance where it is no longer possible to catch a hand or other object between the carrier base 14 or cover 15 and the semiconductor equipment. Then, the carrier base 14 and/or the cover 15 is transported or moved towards the opening 16 by the transporting apparatus 18 and/or moving apparatus 30 respectively transporting the carrier base 14 and/or moving the cover 15 towards the opening 16 to completely close the opening 16 using a larger force.
    Type: Grant
    Filed: March 31, 1999
    Date of Patent: February 13, 2001
    Assignees: Shinko Electric Co., Ltd., Tokyo Electron Limited
    Inventors: Masanao Murata, Hiroyuki Oyobe, Tsuyoshi Tanaka, Zenta Nanpei, Toshiyuki Takaoka, Hiroaki Saeki, Keiichi Matsushima