Abstract: The present invention provides a multimass MEMS gyroscope featuring an orthogonal arrangement, which comprises an anchor point unit, a sensing unit and a driving unit; the anchor point unit comprises a central anchor point subunit located at the center of a rectangle and four corner anchor points located at the four corners of the rectangle respectively; the sensing unit comprises four detection mass blocks each of which has a frame structure and is elastically connected between the central anchor point subunit and the corresponding corner anchor point, receding spaces being formed between the detection mass blocks, and four detection decoupling parts; and the driving unit comprises four driving mass blocks, and driving decoupling parts. The gyroscope can improve the arrangement area of transducers and reduce the mass of the detection mass blocks to improve the Coriolis gain, thereby improving the mechanical sensitivity of the gyroscope.

Abstract: The present invention provides a capacitive micromechanical acceleromete. The capacitive micromechanical acceleromete includes a base with anchor points, at least one detection structure pair arranged on one side of the base and elastically connected to the anchor points, and a detection electrode spaced apart from each detection structure pair. Each detection structure pair includes two seesaw structures elastically connected to the base respectively. The seesaw structures are asymmetric about a rotation axis where the anchor points are located; asymmetric portions of the two seesaw structures are reversed and parallel. In a detection modality, changing directions of spacings formed between the two seesaw structures and the detection electrode are opposite. The capacitive micromechanical acceleromete can reduce the impact of the noise of the angular acceleration of the external rotation or the stress and other external factors on the detection of the accelerometer, and improving the detection accuracy.

Abstract: Provided is a fully decoupled MEMS gyroscope, including an anchor point unit, a sensing unit elastically connected to the anchor point unit, and a driving unit configured to drive the sensing unit to move. The anchor point unit includes a center anchor point subunit located at a center of a rectangle and four side anchor points. The driving unit includes four driving members located on four sides of the rectangle. The sensing unit includes two X mass blocks symmetrically arranged in two avoiding intervals, two Y mass blocks symmetrically arranged in the other two avoiding intervals, four Z mass blocks respectively located at an outer side of each driving member, and four Z detection decoupling members respectively located at an outer side of each Z mass block. The X mass blocks and the Y mass blocks are respectively connected to each side anchor point.

Abstract: The present invention provides an accelerometer, including base, anchor points, seesaw structures elastically, and a differential detection assembly; the seesaw structures includes a first seesaw structure and a second seesaw structure which are parallel to each other and placed in reverse; the anchor points includes a first anchor point and a second anchor point; the first seesaw structure includes a first elastic member and a first mass block connected to the first elastic member; the first mass block is driven by a normal phase carrier drive signal from the first anchor point; the second seesaw structure includes a second elastic member and a second mass block connected to the second elastic member; and the second mass block is driven by a reversed phase carrier drive signal from the second anchor point. The accelerometer can effectively suppress the impact of noise of an angular acceleration of rotation.

Abstract: A scalable FIR filter architecture that requires fewer computations, less storage registers, and is capable of parallel processing, is presented. The scalable filter architecture reduces the number of computations (e.g., multiplication) by utilizing the inherent symmetry and reduces the number of storage elements required by utilizing what is known as the transpose-form (as compared to direct-form) filter architecture. The filter architecture is scalable to accommodate different complexity levels. In accordance to the present invention, a filter can be scaled up/down by adding/subtracting a processing block to/from the existing structure. Because these processing blocks can process signals independently and simultaneously, the filter architecture in accordance to the present invention allows for parallel and distributive processing thereby meeting the required performance requirements.