Abstract: An advanced coating for parts used in plasma processing chamber. The advanced coating is formed over an anodized surface that has not been sealed. After the coating is formed, the coated area is masked, and the remaining anodized surface is sealed. The porous and rough structure of the anodized but un-sealed aluminum enhances adhesion of the coating. However, to prevent particle generation, the exposed anodized surface is sealed after formation of the coating. The coating can be of yttria, formed by plasma enhanced atomic deposition techniques which results in a dense and smooth coating.

Abstract: Systems and methods to transition between viewpoints in a three-dimensional environment are provided. One example method includes obtaining data indicative of an origin position and a destination position of a virtual camera. The method includes determining a distance between the origin position and the destination position of the virtual camera. The method includes determining a peak visible distance based at least in part on the distance between the origin position and the destination position of the virtual camera. The method includes identifying a peak position at which the viewpoint of the virtual camera corresponds to the peak visible distance. The method includes determining a parabolic camera trajectory that traverses the origin position, the peak position, and the destination position. The method includes transitioning the virtual camera from the origin position to the destination position along the parabolic camera trajectory.

Abstract: A system for tracking a first electronic device, such as a handheld smartphone, in a virtual reality environment generated by a second electronic device, such as a head mounted display may include detection, by a camera included in one of the first electronic device or the second electronic device, of at least one visual marker included on the other of the first electronic device or the second electronic device. Features detected within the field of view corresponding to known features of the visual markers may be used to locate and track movement of the first electronic device relative to the second electronic device, so that movement of the second electronic device may be translated into an interaction in a virtual experience generated by the second electronic device.

Abstract: A first digital map is displayed in a viewport at an initial position. When a user gesture that communicates motion to the viewport is detected, a trajectory of the viewport from the initial position to a target position is determined based on kinematic quantities of the communicated motion. Map data for displaying a second digital map in the viewport at the target position is retrieved from a first memory, prior to the viewport reaching the target position. The retrieved map data is stored in a second memory having a higher speed of access than the first memory. The second memory is retrieved for display via the user interface when the viewport is at the target position.

Abstract: A first digital map is displayed in a viewport at an initial position. When a user gesture that communicates motion to the viewport is detected, a trajectory of the viewport from the initial position to a target position is determined based on kinematic quantities of the communicated motion. Map data for displaying a second digital map in the viewport at the target position is retrieved from a first memory, prior to the viewport reaching the target position. The retrieved map data is stored in a second memory having a higher speed of access than the first memory. The second memory is retrieved for display via the user interface when the viewport is at the target position.

Abstract: An advanced coating for showerhead used in plasma processing chamber is provided. The advanced coating is formed using plasma enhanced physical vapor deposition. The coating formation involved a physical process, such as condensation of source material on the showerhead surface, and chemical process, wherein active species from plasma interact with the condensed source materials. Also, non-reactive species from the plasma impinge on the bottom surface to condense the formed coating.

Abstract: A plasma processing chamber having advanced coating for the showerhead and for an extended bottom electrode. The extended bottom electrode can be formed by one or more of the focus ring, cover ring, and plasma confinement ring. The extended electrode can be formed using a one-piece composite cover ring. The composite cover ring may be made of Al2O3 and include a Y2O3 plasma resistant coating. The plasma confinement ring may include a flow equalization ion shield that may also be provided with the plasma resistant coating. The plasma resistant coating of the extended electrode may have elements matching that of the showerhead.

Abstract: An advanced coating for parts used in plasma processing chamber. The advanced coating is formed over an anodized surface that has not been sealed. After the coating is formed, the coated area is masked, and the remaining anodized surface is sealed. The porous and rough structure of the anodized but un-sealed aluminum enhances adhesion of the coating. However, to prevent particle generation, the exposed anodized surface is sealed after formation of the coating. The coating can be of yttria, formed by plasma enhanced atomic deposition techniques which results in a dense and smooth coating.

Abstract: A plasma confinement apparatus, and method for confining a plasma are described and which includes, in one form of the invention, a plurality of electrically insulated components which are disposed in predetermined spaced relation, one relative to the others, and surrounding a processing region of a plasma processing apparatus, and wherein a plurality of passageways are defined between the respective insulated components; and at least one electrically conductive and grounded component forms an electrical field shielding for the processing region.

Abstract: A plasma confinement apparatus, and method for confining a plasma are described and which includes, in one form of the invention, a plurality of electrically insulated components which are disposed in predetermined spaced relation, one relative to the others, and surrounding a processing region of a plasma processing apparatus, and wherein a plurality of passageways are defined between the respective insulated components; and at least one electrically conductive and grounded component forms an electrical field shielding for the processing region.

Abstract: A plasma confinement apparatus, and method for confining a plasma are described and which includes, in one form of the invention, a plurality of electrically insulated components which are disposed in predetermined spaced relation, one relative to the others, and surrounding a processing region of a plasma processing apparatus, and wherein a plurality of passageways are defined between the respective insulated components; and at least one electrically conductive and grounded component forms an electrical field shielding for the processing region.