Patents by Inventor Zhengtang CHEN

Zhengtang CHEN has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Fluid sensor and mass flow controller
    Patent number: 11334096
    Abstract: The present disclosure provides a fluid sensor and a mass flow controller. The fluid sensor comprises at least two measuring tubes whose diameters have a proportional relationship. The fluid sensor provided by the present disclosure can guarantee measurement accuracy in a whole measurement range and also can improve device reliability.
    Type: Grant
    Filed: July 20, 2018
    Date of Patent: May 17, 2022
    Assignee: BEIJING SEVENSTAR FLOW CO., LTD.
    Inventors: Qianyi Su, Zhihui Song, Zhengtang Chen
  • FLUID SENSOR AND MASS FLOW CONTROLLER
    Publication number: 20210405664
    Abstract: The present disclosure provides a fluid sensor and a mass flow controller. The fluid sensor comprises at least two measuring tubes whose diameters have a proportional relationship. The fluid sensor provided by the present disclosure can guarantee measurement accuracy in a whole measurement range and also can improve device reliability.
    Type: Application
    Filed: July 20, 2018
    Publication date: December 30, 2021
    Inventors: Qianyi SU, Zhihui SONG, Zhengtang CHEN