Patents by Inventor Zhenyu Lu

Zhenyu Lu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20210118905
    Abstract: Embodiments of 3D memory devices and fabricating methods are disclosed. The disclosed 3D memory device comprises: an alternating conductor/dielectric stack on a substrate; a channel hole penetrating the alternating dielectric stack; an epitaxial layer on a bottom of the channel hole and in contact with the substrate; a functional layer covering a sidewall of the channel hole; and a channel structure covering the functional layer, and being in electrical contact with the epitaxial layer through a top surface of the epitaxial layer as well as a sidewall and a bottom surface of a recess in the epitaxial layer.
    Type: Application
    Filed: December 23, 2020
    Publication date: April 22, 2021
    Applicant: Yangtze Memory Technologies Co., Ltd.
    Inventors: Yushi HU, Qian TAO, Haohao YANG, Jin Wen DONG, Jun CHEN, Zhenyu LU
  • Publication number: 20210118896
    Abstract: Methods and structures of a three-dimensional memory device are disclosed. In an example, the memory device includes a substrate having one or more first recesses in a first region and one or more second recesses in a second region. A liner layer is disposed over the sidewalls and bottom of the one or more first recesses in the first region and an epitaxially-grown material is formed in the one or more second recesses in the second region. One or more NAND strings are formed over the epitaxially-grown material disposed in the one or more second recesses, and one or more vertical structures are formed over the one or more first recesses in the first region.
    Type: Application
    Filed: December 8, 2020
    Publication date: April 22, 2021
    Applicant: Yangtze Memory Technologies Co., Ltd.
    Inventors: Yue Qiang PU, Jin Wen Dong, Jun Chen, Zhenyu Lu, Qian Tao, Yushi Hu, Zhao Hui Tang, Li Hong Xiao, Yu Ting Zhou, Sizhe Li, Zhaosong Li
  • Publication number: 20210104532
    Abstract: Methods and structures of a three-dimensional memory device are disclosed. In an example, the memory device includes a substrate having one or more first recesses in a first region and one or more second recesses in a second region. A liner layer is disposed over the sidewalls and bottom of the one or more first recesses in the first region and an epitaxially-grown material is formed in the one or more second recesses in the second region. One or more NAND strings are formed over the epitaxially-grown material disposed in the one or more second recesses, and one or more vertical structures are formed over the one or more first recesses in the first region.
    Type: Application
    Filed: December 17, 2020
    Publication date: April 8, 2021
    Applicant: Yangtze Memory Technologies Co., Ltd.
    Inventors: Yue Qiang PU, Jin Wen DONG, Jun CHEN, Zhenyu LU, Qian TAO, Yushi HU, Zhao Hui TANG, Li Hong XIAO, Yu Ting ZHOU, Sizhe LI, Zhaosong LI
  • Publication number: 20210098481
    Abstract: Methods and structures of a three-dimensional memory device are disclosed. In an example, the memory device includes a substrate having one or more first recesses in a first region and one or more second recesses in a second region. A liner layer is disposed over the sidewalls and bottom of the one or more first recesses in the first region and an epitaxially-grown material is formed in the one or more second recesses in the second region. One or more NAND strings are formed over the epitaxially-grown material disposed in the one or more second recesses, and one or more vertical structures are formed over the one or more first recesses in the first region.
    Type: Application
    Filed: December 14, 2020
    Publication date: April 1, 2021
    Applicant: Yangtze Memory Technologies Co., Ltd.
    Inventors: Yue Qiang PU, Jin Wen DONG, Jun CHEN, Zhenyu LU, Qian TAO, Yushi HU, Zhao Hui TANG, Li Hong XIAO, Yu Ting ZHOU, Sizhe LI, Zhaosong LI
  • Publication number: 20210098491
    Abstract: Embodiments of three-dimensional (3D) memory devices and methods for forming the 3D memory devices are disclosed. In an example, a NAND memory device includes a substrate, one or more peripheral devices on the substrate, a plurality of NAND strings above the peripheral devices, a single crystalline silicon layer above and in contact with the NAND strings, and interconnect layers formed between the peripheral devices and the NAND strings. In some embodiments, the NAND memory device includes a bonding interface at which an array interconnect layer contacts a peripheral interconnect layer.
    Type: Application
    Filed: November 24, 2020
    Publication date: April 1, 2021
    Applicant: Yangtze Memory Technologies Co., Ltd.
    Inventors: Zhenyu LU, Jun CHEN, Jifeng ZHU, Yushi HU, Qian TAO, Simon Shi-Ning YANG, Steve Weiyi YANG
  • Publication number: 20210074718
    Abstract: Joint opening structures of 3D memory devices and fabricating method are provided. A joint opening structure comprises a first through hole penetrating a first stacked layer and a first insulating connection layer, a first channel structure at the bottom of the first through hole, a first functional layer on the sidewall of the first through hole, a second channel structure on the sidewall of the first functional layer, a third channel structure over the first through hole, a second stacked layer on the third channel structure, a second insulating connection layer on the second stacked layer, a second through hole penetrating the second stacked layer and the second insulating connection layer, a second functional layer disposed on the sidewall of the second through hole, a fourth channel structure on the sidewall of the second functional layer, and a fifth channel structure over the second through hole.
    Type: Application
    Filed: November 18, 2020
    Publication date: March 11, 2021
    Applicant: Yangtze Memory Technologies Co., Ltd.
    Inventors: Zhenyu LU, Wenguang SHI, Guanping WU, Feng PAN, Xianjin WAN, Baoyou CHEN
  • Patent number: 10937806
    Abstract: Embodiments of interconnect structures of a three-dimensional (3D) memory device and method for forming the interconnect structures are disclosed. In an example, a 3D NAND memory device includes a semiconductor substrate, an alternating layer stack disposed on the semiconductor substrate, and a dielectric structure, which extends vertically through the alternating layer stack, on an isolation region of the substrate. Further, the alternating layer stack abuts a sidewall surface of the dielectric structure and the dielectric structure is formed of a dielectric material. The 3D memory device additionally includes one or more through array contacts that extend vertically through the dielectric structure and the isolation region, and one or more channel structures that extend vertically through the alternating layer stack.
    Type: Grant
    Filed: May 5, 2020
    Date of Patent: March 2, 2021
    Assignee: Yangtze Memory Technologies Co., Ltd.
    Inventors: Qian Tao, Yushi Hu, Zhenyu Lu, Li Hong Xiao, Xiaowang Dai, Yu Ting Zhou, Zhao Hui Tang, Mei Lan Guo, ZhiWu Tang, Qinxiang Wei, Qianbing Xu, Sha Sha Liu, Jian Hua Sun, EnBo Wang
  • Patent number: 10930663
    Abstract: Embodiments of interconnect structures of a three-dimensional (3D) memory device and method for forming the interconnect structures are disclosed. In an example, a 3D NAND memory device includes a substrate, an alternating layer stack including a staircase structure on the substrate, and a barrier structure extending vertically through the alternating layer stack. The alternating layer stack includes an alternating dielectric stack and an alternating conductor/dielectric stack. The alternating dielectric stack includes dielectric layer pairs enclosed by at least the barrier structure. The alternating conductor/dielectric stack includes conductor/dielectric layer pairs. The memory device further includes a channel structure and a slit structure each extending vertically through the alternating conductor/dielectric stack, an etch stop layer on an end of the channel structure, and first contacts.
    Type: Grant
    Filed: July 26, 2018
    Date of Patent: February 23, 2021
    Assignee: Yangtze Memory Technologies Co., Ltd.
    Inventors: Zhenyu Lu, Lidong Song, Yongna Li, Feng Pan, Steve Weiyi Yang, Wenguang Shi
  • Publication number: 20210049218
    Abstract: A computing device hosting a website of a business may be operable to receive a first search input comprising a term submitted via a search bar on the website. Upon performing an internal search for the term with no result, the computing device may output information on the no-result. The computing device may then perform, using one or more external search engines, a search for the term. Search results of the search, performed using the external search engine(s), may be analyzed. Based on a result of the analysis, one or more particular character strings related to the term may be identified. The computing device may generate and store, based on the identifying of the particular character string(s), one or more alternative search suggestions. Upon subsequently receiving an input comprising at least a portion of the term entered in the search bar, the computing device may output the alternative search suggestion(s).
    Type: Application
    Filed: November 3, 2020
    Publication date: February 18, 2021
    Inventors: Rongkai Zhao, Zhenyu Lu, Kenneth Katschke
  • Patent number: 10923491
    Abstract: Embodiments of through array contact structures of a 3D memory device and fabricating method thereof are disclosed. The memory device includes an alternating layer stack disposed on a first substrate. The alternating layer stack includes a first region including an alternating dielectric stack, and a second region including an alternating conductor/dielectric stack. The memory device further includes a barrier structure extending vertically through the alternating layer stack to laterally separate the first region from the second region, multiple through array contacts in the first region, each through array contact extending vertically through the alternating dielectric stack, an array interconnection layer in contact with the through array contacts, a peripheral circuit formed on a second substrate. and a peripheral interconnection layer on the peripheral circuit.
    Type: Grant
    Filed: March 17, 2020
    Date of Patent: February 16, 2021
    Assignee: Yangtze Memory Technologies Co., Ltd.
    Inventors: Zhenyu Lu, Simon Shi-Ning Yang, Feng Pan, Steve Weiyi Yang, Jun Chen, Guanping Wu, Wenguang Shi, Weihua Cheng
  • Publication number: 20210043651
    Abstract: Methods and structures of a three-dimensional memory device are disclosed. In an example, the disclosed method comprises forming a plurality of dielectric stacks stacked on one another over a substrate to create a multiple-stack staircase structure. Each one of the plurality of dielectric stacks comprises a plurality of dielectric pairs arranged along a direction perpendicular to a top surface of the substrate. The method further comprises forming a filling structure that surrounds the multiple-stack staircase structure, forming a semiconductor channel extending through the multiple-staircase structure, wherein the semiconductor channel comprises unaligned sidewall surfaces, and forming a supporting pillar extending through at least one of the multiple-staircase structure and the filling structure, wherein the supporting pillar comprises aligned sidewall surfaces.
    Type: Application
    Filed: October 16, 2020
    Publication date: February 11, 2021
    Applicant: Yangtze Memory Technologies Co., Ltd.
    Inventors: Jun LIU, Zongliang HUO, Li Hong XIAO, Zhenyu LU, Qian TAO, Yushi HU, Sizhe LI, Zhao Hui TANG, Yu Ting ZHOU, Zhaosong LI
  • Publication number: 20210043643
    Abstract: Embodiments of interconnect structures of a three-dimensional (3D) memory device and method for forming the interconnect structures are disclosed. In an example, a 3D NAND memory device includes a substrate, an alternating layer stack including a staircase structure on the substrate, and a barrier structure extending vertically through the alternating layer stack. The alternating layer stack includes an alternating dielectric stack and an alternating conductor/dielectric stack. The alternating dielectric stack includes dielectric layer pairs enclosed by at least the barrier structure. The alternating conductor/dielectric stack includes conductor/dielectric layer pairs. The memory device further includes a channel structure and a slit structure each extending vertically through the alternating conductor/dielectric stack, an etch stop layer on an end of the channel structure, and first contacts.
    Type: Application
    Filed: October 26, 2020
    Publication date: February 11, 2021
    Applicant: Yangtze Memory Technologies Co., Ltd.
    Inventors: Zhenyu LU, Lidong Song, Yongna Li, Feng Pan, Steve Weiyi Yang, Wenguang Shi
  • Patent number: 10915925
    Abstract: In an implementation, guiding a service flow is described. Historical behavior data of one or more users who use a target service is obtained for the target service. The historical behavior data is analyzed to obtain one or more user features. One or more target users are selected from one or more users who do not use the target service based on the one or more user features. Each target user has at least one of the one or more user features. Service flow guiding information is sent to each target user. The service flow guiding information guides each target user to use the target service.
    Type: Grant
    Filed: September 6, 2019
    Date of Patent: February 9, 2021
    Assignee: Alibaba Group Holding Limited
    Inventors: Weiwei Ding, Chen Tao, Feng Jin, Zhenyu Lu, Jiajun Wen, Yonggang Du, Wenming He, Zhaolin Feng, Zhirong Yang, Kai Yang
  • Publication number: 20210035994
    Abstract: Embodiments of ferroelectric memory devices and methods for forming the ferroelectric memory devices are disclosed. In an example, a method of forming a ferroelectric memory cell is disclosed. A first electrode is formed. A doped ferroelectric layer is formed in contact with the first electrode. The doped ferroelectric layer includes oxygen and one or more ferroelectric metals. The doped ferroelectric layer further includes a plurality of dopants including at least one dopant from one of Group II elements, Group III elements, or Lanthanide elements. The plurality of dopants are different from the one or more ferroelectric metals. A second electrode is formed in contact with the doped ferroelectric layer.
    Type: Application
    Filed: October 19, 2020
    Publication date: February 4, 2021
    Inventor: Zhenyu Lu
  • Patent number: 10910390
    Abstract: Methods and structures of a three-dimensional memory device are disclosed. In an example, the memory device includes a substrate having one or more first recesses in a first region and one or more second recesses in a second region. A liner layer is disposed over the sidewalls and bottom of the one or more first recesses in the first region and an epitaxially-grown material is formed in the one or more second recesses in the second region. One or more NAND strings are formed over the epitaxially-grown material disposed in the one or more second recesses, and one or more vertical structures are formed over the one or more first recesses in the first region.
    Type: Grant
    Filed: July 26, 2018
    Date of Patent: February 2, 2021
    Assignee: Yangtze Memory Technologies Co., Ltd.
    Inventors: Yue Qiang Pu, Jin Wen Dong, Jun Chen, Zhenyu Lu, Qian Tao, Yushi Hu, Zhao Hui Tang, Li Hong Xiao, Yu Ting Zhou, Sizhe Li, Zhaosong Li
  • Patent number: 10910397
    Abstract: Embodiments of through array contact structures of a 3D memory device and fabricating method thereof are disclosed. The 3D NAND memory device includes an alternating layer stack disposed on a substrate. The alternating layer stack includes a first region including an alternating dielectric stack, and a second region including an alternating conductor/dielectric stack. The memory device further comprises a barrier structure extending vertically through the alternating layer stack to laterally separate the first region from the second region, and multiple through array contacts in the first region each extending vertically through the alternating dielectric stack. At least one through array contact is electrically connected with a peripheral circuit.
    Type: Grant
    Filed: December 26, 2019
    Date of Patent: February 2, 2021
    Assignee: Yangtze Memory Technologies Co., Ltd.
    Inventors: Zhenyu Lu, Wenguang Shi, Guanping Wu, Xianjin Wan, Baoyou Chen
  • Patent number: 10892274
    Abstract: Embodiments of 3D memory devices and fabricating methods are disclosed. The method can comprise: forming an alternating dielectric stack on a substrate; forming a channel hole penetrating the alternating dielectric stack to expose a surface of the substrate; forming an epitaxial layer on a bottom of the channel hole; forming a functional layer covering a sidewall of the channel hole and a top surface of the epitaxial layer; forming a protecting layer covering the functional layer; removing portions of the functional layer and the protecting layer to form an opening to expose a surface of the epitaxial layer; expanding the opening laterally to increase an exposed area of the epitaxial layer at the bottom of the channel hole; and forming a channel structure on the sidewall of the channel hole and being in electrical contact with the epitaxial layer through the expanded opening.
    Type: Grant
    Filed: October 17, 2018
    Date of Patent: January 12, 2021
    Assignee: Yangtze Memory Technologies Co., Ltd.
    Inventors: Yushi Hu, Qian Tao, Haohao Yang, Jin Wen Dong, Jun Chen, Zhenyu Lu
  • Publication number: 20210005621
    Abstract: Embodiments of source structure of a three-dimensional (3D) memory device and method for forming the source structure of the 3D memory device are disclosed. In an example, a NAND memory device includes a substrate, an alternating conductor/dielectric stack, a NAND string, a source conductor layer, and a source contact. The alternating conductor/dielectric stack includes a plurality of conductor/dielectric pairs above the substrate. The NAND string extends vertically through the alternating conductor/dielectric stack. The source conductor layer is above the alternating conductor/dielectric stack and is in contact with an end of the NAND string. The source contact includes an end in contact with the source conductor layer. The NAND string is electrically connected to the source contact by the source conductor layer. In some embodiments, the source conductor layer includes one or more conduction regions each including one or more of a metal, a metal alloy, and a metal silicide.
    Type: Application
    Filed: September 21, 2020
    Publication date: January 7, 2021
    Applicant: Yangtze Memory Technologies Co., Ltd.
    Inventors: Yushi HU, Zhenyu LU, Qian TAO, Jun CHEN, Simon Shi-Ning YANG, Steve Weiyi YANG
  • Publication number: 20210005625
    Abstract: Various embodiments disclose a 3D memory device, including a substrate; a plurality of conductor layers disposed on the substrate; a plurality of NAND strings disposed on the substrate; and a plurality of slit structures disposed on the substrate. The plurality of NAND strings can be arranged perpendicular to the substrate and in a hexagonal lattice orientation including a plurality of hexagons, and each hexagon including three pairs of sides with a first pair perpendicular to a first direction and parallel to a second direction. The second direction is perpendicular to the first direction. The plurality of slit structures can extend in the first direction.
    Type: Application
    Filed: September 22, 2020
    Publication date: January 7, 2021
    Applicant: Yangtze Memory Technologies Co., Ltd.
    Inventors: Xiaowang DAI, Zhenyu LU, Jun CHEN, Qian TAO, Yushi HU, Jifeng ZHU, Jin Wen DONG, Ji XIA, Zhong ZHANG, Yan Ni LI
  • Patent number: 10886291
    Abstract: Joint opening structures of 3D memory devices and fabricating method are provided. A joint opening structure comprises a first through hole penetrating a first stacked layer and a first insulating connection layer, a first channel structure at the bottom of the first through hole, a first functional layer on the sidewall of the first through hole, a second channel structure on the sidewall of the first functional layer, a third channel structure over the first through hole, a second stacked layer on the third channel structure, a second insulating connection layer on the second stacked layer, a second through hole penetrating the second stacked layer and the second insulating connection layer, a second functional layer disposed on the sidewall of the second through hole, a fourth channel structure on the sidewall of the second functional layer, and a fifth channel structure over the second through hole.
    Type: Grant
    Filed: July 26, 2018
    Date of Patent: January 5, 2021
    Assignee: Yangtze Memory Technologies Co., Ltd.
    Inventors: Zhenyu Lu, Wenguang Shi, Guanping Wu, Feng Pan, Xianjin Wan, Baoyou Chen