Abstract: The present invention relates to a capacitive-coupled plasma processing apparatus, wherein an electric field regulating element, i.e., an “electric field lens”, is arranged in the reaction chamber to generate a regenerated electric field in a direction opposite to that of the original radio frequency electric field in the reaction chamber, so that the non-uniformity of etching rate on the surface of the substrate of the plasma incurred by the original radio frequency electric field is decreased; and the electric field regulating element, i.e., the “electric field lens”, further decreases the equivalent quality factor Q value of the reaction chamber, expands the radio frequency band, and prevents high-voltage electric arcing. The present invention further provides a method for processing the substrate using the processing apparatus.

Abstract: The invention relates to an inductively-coupled plasma processing apparatus and a method for processing a substrate. By arranging a magnetic field line adjusting component made of magnetic conductive material, a quasi-closed low reluctance path is formed to serve as the path of the magnetic field line loop outside of the reaction chamber, and the path of most magnetic field lines of the induced magnetic field is constrained by the low reluctance path. In this way, most of magnetic field energy diverged previously may be gathered, and then the magnetic field is multiplied; alternatively, less energy is required to obtain the same magnetic field strength to generate plasma for performing etching, which improves utilization efficiency of energy source.

Abstract: The present invention relates to a capacitive-coupled plasma processing apparatus, wherein an electric field regulating element, i.e., an “electric field lens”, is arranged in the reaction chamber to generate a regenerated electric field in a direction opposite to that of the original radio frequency electric field in the reaction chamber, so that the non-uniformity of etching rate on the surface of the substrate of the plasma incurred by the original radio frequency electric field is decreased; and the electric field regulating element, i.e., the “electric field lens”, further decreases the equivalent quality factor Q value of the reaction chamber, expands the radio frequency band, and prevents high-voltage electric arcing. The present invention further provides a method for processing the substrate using the processing apparatus.

Abstract: This is an innovative Over-Current Protection device that uses a unique method of controlling the energy to a compact tripping solenoid of a mechanical circuit breaker mechanism to cut off power to an electric circuit whenever the load current exceeds a specified level. Unlike previous Over-Current Protection devices, this device also maintains independent levels or stages of over-current protection and is able to distinguish between stages via independent current detection circuits that define the operational characteristics of each over-current stage. The device includes a current sensing transformer, independent current-threshold detectors, time delay circuits and a random phase, energy-accumulating circuit which generates a controlled trigger-pulse to trip the compact tripping solenoid of the mechanical circuit breaker mechanism. This device is also designed to connect directly onto, and operate in conjunction with, an existing GFCI (Ground Fault Circuit Interrupter) module.

Abstract: A 2-terminal solid state electrical switch is provided which can be connected in series with a load device in a the same manner as a conventional mechanical-contact switch, does not leak current during an “OFF” state, and operates from a dynamic pulse run mode during an “ON” state. The two-terminal solid state electrical switch of the present invention requires neither a power supply to operate, nor any mechanical movement and contact points. Consequently, no spark, arc or any mechanical noise is created in the solid state electrical switch's operation, nor does it corrode, thus allowing it to be used in a hostile environment.

Abstract: A new type of musical instrument and performance apparatus is disclosed and is used with the special performing art called "Instrument dance", "instrument exercise" or "instrument boxing" etc. The instrument comprises a floor keyboard, on which the performer can either dance and produce switching signals with his or her feet, hand or hand hammer in accordance with the intention of the performer. In addition, a similar wall keyboard is provided along with a multi-color system and an electronic organ circuit. The performer can play on the floor keyboard while at the same time adjusting with ease the tone, timbre, volume and color, to thereby achieve the multiple artistic effect of a single performer producing the shape, sound, light and color of the performance.