Rubber plate used in an ion implanter and method of preparing the same
The present invention provides a method and a set of trimming accessories for trimming rubber plate used in an ion implanter. The rubber plate is suitable for use in an ion implanter, wherein the ion implanter has a platform with multiple primary holes and multiple primary notches. In specific embodiments, the set of trimming accessories includes trimming equipment such as a knife or preferably a laser; a template with secondary holes corresponding to primary holes and secondary notches corresponding to primary notches. The template is used as a guide to form a plurality of tertiary holes in the rubber plate corresponding to the plurality of secondary holes of the template and to form a plurality of tertiary notches in the rubber plate corresponding to the plurality of secondary notches of the template. The trimmed rubber plate can then be placed on the platform so that the tertiary holes of the rubber plate match the primary holes of the platform and the tertiary notches of the rubber plate match the primary notches of the platform.
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This application claims priority from R.O.C. Patent Application No. 090105018, filed Mar. 5, 2001, the entire disclosure of which is incorporated herein by reference.
BACKGROUND OF THE INVENTIONThe present invention relates to a rubber plate used in an ion implanter, as well as the method and accessories for preparing the rubber plate.
The ion implanter is a complex apparatus used in the manufacture of doped wafers. During the ion implantation process, wafers to be processed are placed on a platform within the load/unload system of the ion implanter. The present invention is related to a rubber plate disposed on top of this platform.
The platform, represented as platform 10 in
Preparation of the rubber plate in the prior art consists of, first, attaching the rubber plate 30 to the platform 10 (
The present invention is directed to a method and accessories for trimming a rubber plate used in an ion implanter without the above drawbacks of the prior art. In specific embodiments, the rubber plate is trimmed prior to being placed on the platform using a template that matches the shape and features of the platform. The trimmed rubber plate is then placed on top of the platform. In this way, the problems of in situ trimming of the rubber plate are avoided so as to ensure the quality and efficiency of wafer production.
An aspect of the present invention is directed to a set of trimming accessories for trimming a rubber plate which is configured to be placed on a platform of an ion implanter, wherein the platform of the ion implanter includes a plurality of primary holes and a plurality of primary notches. The set of trimming accessories comprises a trimming member configured to trim the rubber plate and a template. The template includes a plurality of secondary holes corresponding to the plurality of primary holes of the platform of the ion implanter and a plurality of secondary notches corresponding to the plurality of primary notches of the platform of the ion implanter. The template is adapted to guide the trimming member to trim the rubber plate to form a plurality of tertiary holes in the rubber plate corresponding to the plurality of secondary holes of the template and to form a plurality of tertiary notches in the rubber plate corresponding to the plurality of secondary notches of the template.
In some embodiments, the trimming member comprises a knife or a laser. An optical detector is configured to detect contours of the template formed by the plurality of secondary holes and the plurality of secondary notches. A controller is coupled to the trimming member and to the optical detector to control the trimming member based on the detected contours of the template from the optical detector to trim the rubber plate to form the plurality of tertiary holes in the rubber plate corresponding to the plurality of secondary holes of the template and to form the plurality of tertiary notches in the rubber plate corresponding to the plurality of secondary notches of the template. The template is adapted to be placed over the rubber plate for guiding the trimming member to trim the rubber plate.
In accordance with another aspect of the present invention, a method is provided for trimming a rubber plate which is configured to be placed on a platform of an ion implanter, wherein the platform of the ion implanter includes a plurality of primary holes and a plurality of primary notches. The method comprises providing a template including a plurality of secondary holes corresponding to the plurality of primary holes of the platform of the ion implanter and a plurality of secondary notches corresponding to the plurality of primary notches of the platform of the ion implanter. The rubber plate is trimmed using the template as a guide to form a plurality of tertiary holes in the rubber plate corresponding to the plurality of secondary holes of the template and to form a plurality of tertiary notches in the rubber plate corresponding to the plurality of secondary notches of the template.
In some embodiments, the template is placed over the rubber plate for guiding a trimming member to trim the rubber plate. A controller automatically controls a trimming member based on contours of the template to trim the rubber plate to form the plurality of tertiary holes in the rubber plate corresponding to the plurality of secondary holes of the template and to form the plurality of tertiary notches in the rubber plate corresponding to the plurality of secondary notches of the template. The method may further comprise optically detecting the contours of the template and providing the detected contours to the controller to automatically control the trimming member based on the detected contours of the template to trim the rubber plate. The tertiary holes in the rubber plate are trimmed to match the primary holes of the platform and the tertiary notches in the rubber plate are trimmed to match the primary notches of the platform.
Yet another aspect of the present invention relates to a method for trimming a rubber plate which is configured to be placed on a platform of an ion implanter, wherein the platform of the ion implanter includes a plurality of primary holes and a plurality of primary notches. The method comprises providing a template including a plurality of secondary holes corresponding to the plurality of primary holes of the platform of the ion implanter and a plurality of secondary notches corresponding to the plurality of primary notches of the platform of the ion implanter. The template is placed over the rubber plate. A trimming member is automatically controlled for trimming the rubber plate to form a plurality of tertiary holes in the rubber plate corresponding to the plurality of secondary holes of the template and to form a plurality of tertiary notches in the rubber plate corresponding to the plurality of secondary notches of the template.
In some embodiments, the contours of the template are optically detected and the detected contours are provided to the controller to automatically control the trimming member based on the detected contours of the template to trim the rubber plate. The tertiary holes in the rubber plate are trimmed to match the primary holes of the platform and the tertiary notches in the rubber plate are trimmed to match the primary notches of the platform. The trimmed rubber plate can then be placed on the platform so that the tertiary holes of the rubber plate match the primary holes of the platform and the tertiary notches of the rubber plate match the primary notches of the platform.
BRIEF DESCRIPTION OF THE DRAWINGS
As shown in
The method according to an embodiment of the present invention includes the following steps. A pre-trimmed rubber plate 30 is shown in
As shown in
Accordingly, by applying the method of the present invention, damage to the platform and uneven cooling of the wafer due to uneven attachment between the wafer and the platform are reduced. Thus, the efficiency and life span of the ion implanter is increased.
The above-described arrangements of apparatus and methods are merely illustrative of applications of the principles of this invention and many other embodiments and modifications may be made without departing from the spirit and scope of the invention as defined in the claims. The scope of the invention should, therefore, be determined not with reference to the above description, but instead should be determined with reference to the appended claims along with their full scope of equivalents.
Claims
1. A set of trimming accessories for trimming a rubber plate which is configured to be placed on a platform of an ion implanter, the platform of the ion implanter including a plurality of primary holes and a plurality of primary notches, the set of trimming accessories comprising:
- a trimming member configured to trim the rubber plate; and
- a template including a plurality of secondary holes corresponding to the plurality of primary holes of the platform of the ion implanter and a plurality of secondary notches corresponding to the plurality of primary notches of the platform of the ion implanter, the template being adapted to guide the trimming member to trim the rubber plate to form a plurality of tertiary holes in the rubber plate corresponding to the plurality of secondary holes of the template and to form a plurality of tertiary notches in the rubber plate corresponding to the plurality of secondary notches of the template.
2. The set of trimming accessories of claim 1 wherein the trimming member comprises a knife.
3. The set of trimming accessories of claim 1 wherein the trimming member comprises a laser.
4. The set of trimming accessories of claim 1 further comprising an optical detector configured to detect contours of the template formed by the plurality of secondary holes and the plurality of secondary notches.
5. The set of trimming accessories of claim 4 further comprising a controller coupled to the trimming member and to the optical detector to control the trimming member based on the detected contours of the template from the optical detector to trim the rubber plate to form the plurality of tertiary holes in the rubber plate corresponding to the plurality of secondary holes of the template and to form the plurality of tertiary notches in the rubber plate corresponding to the plurality of secondary notches of the template.
6. The set of trimming accessories of claim 1 wherein the template is adapted to be placed over the rubber plate for guiding the trimming member to trim the rubber plate.
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19. A trimming apparatus for trimming a rubber plate which is configured to be placed on a platform of an ion implanter, the platform of the ion implanter including a plurality of primary holes and a plurality of primary notches, the trimming apparatus comprising:
- a template including a plurality of secondary holes corresponding to the plurality of primary holes of the platform of the ion implanter and a plurality of secondary notches corresponding to the plurality of primary notches of the platform of the ion implanter, the template being configured to guide trimming of the rubber plate to form a plurality of tertiary holes in the rubber plate corresponding to the plurality of secondary holes of the template and to form a plurality of tertiary notches in the rubber plate corresponding to the plurality of secondary notches of the template.
20. The trimming apparatus of claim 19 further comprising a trimming member configured to trim the rubber plate.
21. The trimming apparatus of claim 20 wherein the trimming member comprises a knife.
22. The trimming apparatus of claim 20 wherein the trimming member comprises a laser.
23. The trimming apparatus of claim 20 further comprising an optical detector configured to detect contours of the template formed by the plurality of secondary holes and the plurality of secondary notches.
24. The trimming apparatus of claim 23 further comprising a controller coupled to the trimming member and to the optical detector to control the trimming member based on the detected contours of the template from the optical detector to trim the rubber plate to form the plurality of tertiary holes in the rubber plate corresponding to the plurality of secondary holes of the template and to form the plurality of tertiary notches in the rubber plate corresponding to the plurality of secondary notches of the template.
25. The trimming apparatus of claim 19 wherein the template is configured to be placed over the rubber plate for guiding the trimming of the rubber plate.
26. The trimming apparatus of claim 25 further comprising a trimming member configured to trim the rubber plate.
27. The trimming apparatus of claim 26 wherein the trimming member comprises a knife.
28. The trimming apparatus of claim 26 wherein the trimming member comprises a laser.
29. The trimming apparatus of claim 26 further comprising an optical detector configured to detect contours of the template formed by the plurality of secondary holes and the plurality of secondary notches.
30. The trimming apparatus of claim 29 further comprising a controller coupled to the trimming member and to the optical detector to control the trimming member based on the detected contours of the template from the optical detector to trim the rubber plate to form the plurality of tertiary holes in the rubber plate corresponding to the plurality of secondary holes of the template and to form the plurality of tertiary notches in the rubber plate corresponding to the plurality of secondary notches of the template.
Type: Application
Filed: Oct 29, 2004
Publication Date: May 5, 2005
Applicant: MOSEL VITELIC, INC. (Hsinchu)
Inventors: Cheng-Min Pan (Hsinchu), Hua-Jen Tseng (Hsinchu), Chun-Chieh Lee (Hsinchu), Sheng-Feng Hung (Hsinchu)
Application Number: 10/976,620