Heat insulator cover of semiconductor manufacturing apparatus
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The dashed-dot dashed broken lines define the bounds of the claimed design and form no part thereof. The evenly spaced broken lines represent the portions of the heat insulator cover of semiconductor manufacturing apparatus that form no part of the claimed design. The dot-dashed broken line arrows in
Claims
The ornamental design for a heat insulator cover of semiconductor manufacturing apparatus, as shown and described.
D45172 | January 1914 | White |
D390539 | February 10, 1998 | Campanella |
D404369 | January 19, 1999 | Kawachi |
6450346 | September 17, 2002 | Boyle |
D586498 | February 10, 2009 | Wu |
D655801 | March 13, 2012 | Russell |
D720707 | January 6, 2015 | Yamazaki |
D818960 | May 29, 2018 | Yamaguchi |
D818961 | May 29, 2018 | Yamaguchi |
D840365 | February 12, 2019 | Ichino |
Type: Grant
Filed: Dec 23, 2021
Date of Patent: Oct 31, 2023
Assignee: KOKUSAI ELECTRIC CORPORATION (Tokyo)
Inventor: Yusaku Okajima (Toyama)
Primary Examiner: Derrick E Holland
Application Number: 29/820,723