Collimator for a physical vapor deposition (PVD) chamber
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Description
The broken lines in the drawings illustrate portions of the article that form no part of the claimed design.
Claims
The ornamental design for a collimator for a physical vapor deposition (PVD) chamber, as shown and described.
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Patent History
Patent number: D1025935
Type: Grant
Filed: Nov 3, 2022
Date of Patent: May 7, 2024
Assignee: APPLIED MATERIALS, INC. (Santa Clara, CA)
Inventors: Martin Lee Riker (Round Rock, TX), Luke Vianney Varkey (Milpitas, CA), Xiangjin Xie (Fremont, CA)
Primary Examiner: Christy Nemeth
Assistant Examiner: Justin M. Donaldson
Application Number: 29/858,764
Type: Grant
Filed: Nov 3, 2022
Date of Patent: May 7, 2024
Assignee: APPLIED MATERIALS, INC. (Santa Clara, CA)
Inventors: Martin Lee Riker (Round Rock, TX), Luke Vianney Varkey (Milpitas, CA), Xiangjin Xie (Fremont, CA)
Primary Examiner: Christy Nemeth
Assistant Examiner: Justin M. Donaldson
Application Number: 29/858,764
Classifications
Current U.S. Class:
Semiconductor, Transistor Or Integrated Circuit (24) (D13/182)