Semiconductor wafer support

- Particle Solutions
Description

FIG. 1 is a front and upper right perspective view of a semiconductor wafer support showing our new design;

FIG. 2 is a front and lower left perspective view thereof;

FIG. 3 is a front elevational view thereof;

FIG. 4 is a left side elevational view thereof, the right side elevational view and the rear elevational view being the same;

FIG. 5 is a top plan view thereof;

FIG. 6 is a bottom plan view thereof; and,

FIG. 7 is a top plan view of a second embodiment of a semiconductor wafer support, all other views being the same as the first embodiment except for the four apertures seen on the top and bottom.

Referenced Cited
U.S. Patent Documents
D235553 June 1975 Kunkle
D273192 March 27, 1984 Yoshida
D329192 September 8, 1992 Susac
4397078 August 9, 1983 Imahashi
4547958 October 22, 1985 Hufford
4605893 August 12, 1986 Braslau
4776745 October 11, 1988 Foley
5042421 August 27, 1991 Anbe
5042423 August 27, 1991 Wilkinson
5109980 May 5, 1992 Matsuoka et al.
5115912 May 26, 1992 Murphy
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Foreign Patent Documents
2-312259 December 1990 JPX
Patent History
Patent number: D350942
Type: Grant
Filed: Aug 25, 1992
Date of Patent: Sep 27, 1994
Assignee: Particle Solutions (Charlotte, NC)
Inventors: Carrie Pellet (Charlotte, NC), Craig Donaldson (Charlotte, NC)
Primary Examiner: Wallace R. Burke
Assistant Examiner: Joel Sincavage
Law Firm: Shefte, Pinckney & Sawyer
Application Number: 7/935,365