Wafer boat or rack for holding semiconductor wafers

Description

FIG. 1 is a front elevational view of a wafer boat or rack for holding semiconductor wafers showing my new design;

FIG. 2 is a rear elevational view thereof;

FIG. 3 is a right side view thereof, the left side view being a mirror image and, therefore, not being shown;

FIG. 4 is a top view thereof;

FIG. 5 is a bottom view thereof;

FIG. 6 is an enlarged sectional view on section 6--6 in FIG. 1; and,

FIG. 7 is an enlarged sectional view of on section 7--7 in FIG. 1.

Referenced Cited
U.S. Patent Documents
4676008 June 30, 1987 Armstrong
4872554 October 10, 1989 Quernemoen
4993559 February 19, 1991 Cota
5129079 July 7, 1992 Nakamura
Foreign Patent Documents
404139855 May 1992 JPX
404167538 June 1992 JPX
405114645 May 1993 JPX
405152228 June 1993 JPX
Patent History
Patent number: D361752
Type: Grant
Filed: Sep 17, 1993
Date of Patent: Aug 29, 1995
Assignees: Tokyo Electron Kasbushiki Kaisha (Tokyo), Tokyo Electron Tohoku Kabushiki Kaisha (Esashi)
Inventor: Kenichi Yamaga (Sagamihara)
Primary Examiner: Joel Sincavage
Law Firm: Ladas & Pasrry
Application Number: 0/13,079