Machine for forming a semiconductor wafer film
Latest Tokyo Electron Limited Patents:
Description
FIG. 1 is a front elevational view of machine for forming a semiconductor wafer film, showing my new design;
FIG. 2 is a right side elevational view thereof;
FIG. 3 is a left side elevational view thereof;
FIG. 4 is a rear elevational view thereof;
FIG. 5 is a top plan view thereof; and,
FIG. 6 is a bottom plan view thereof.
Referenced Cited
Patent History
Patent number: D414503
Type: Grant
Filed: Mar 20, 1998
Date of Patent: Sep 28, 1999
Assignee: Tokyo Electron Limited (Tokyo)
Inventor: Susumu Katoh (Yamanashi-ken)
Primary Examiner: Antoine Duval Davis
Law Firm: Oblon, Spivak, McClelland, Maier & Neustadt, P.C.
Application Number: 0/85,326
Type: Grant
Filed: Mar 20, 1998
Date of Patent: Sep 28, 1999
Assignee: Tokyo Electron Limited (Tokyo)
Inventor: Susumu Katoh (Yamanashi-ken)
Primary Examiner: Antoine Duval Davis
Law Firm: Oblon, Spivak, McClelland, Maier & Neustadt, P.C.
Application Number: 0/85,326
Classifications