Quartz process tube
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Description
FIG. 1 a perspective view of a quartz process tube.
FIG. 2 a front elevational view thereof.
FIG. 3 a top plan view thereof.
FIG. 4 a bottom plan view thereof.
FIG. 5 a cross sectional view thereof taken along line 5--5 in FIG. 2.
FIG. 6 a rear elevational view thereof.
FIG. 7 a left side view thereof.
FIG. 8 a right side view thereof.
FIG. 9 a cross sectional view thereof taken along line 9--9 in FIG. 3; and,
FIG. 10 a cross sectional view thereof taken along line 10--10 in FIG. 3.
Referenced Cited
Patent History
Patent number: D423463
Type: Grant
Filed: Jul 24, 1997
Date of Patent: Apr 25, 2000
Assignee: Tokyo Electron Limited (Tokyo-To)
Inventors: Testuya Hanagata (Tokyo), Shingo Watanabe (Kanagawa)
Primary Examiner: Lisa Lichtenstein
Law Firm: Ladas & Parry
Application Number: 0/74,280
Type: Grant
Filed: Jul 24, 1997
Date of Patent: Apr 25, 2000
Assignee: Tokyo Electron Limited (Tokyo-To)
Inventors: Testuya Hanagata (Tokyo), Shingo Watanabe (Kanagawa)
Primary Examiner: Lisa Lichtenstein
Law Firm: Ladas & Parry
Application Number: 0/74,280
Classifications
Current U.S. Class:
Semiconductor, Transistor Or Integrated Circuit (24) (D13/182)
International Classification: 1303;
International Classification: 1303;