Sputtering chamber coil

- Applied Materials, Inc.
Skip to: Description  ·  Claims  ·  References Cited  · Patent History  ·  Patent History
Description

FIG. 1 is a front elevational view;

FIG. 2 is a top view;

FIG. 3 is a right side elevational view;

FIG. 4 is a bottom view; and,

FIG. 5 is a rear elevational view of our sputtering chamber coil.

The left side elevation view (not shown) is the same as the right side elevational view (FIG. 3) because of coil symmetry.

Claims

The design for sputtering chamber coil, as shown and described.

Referenced Cited
U.S. Patent Documents
118252 August 1871 Lewis
565698 August 1896 Sparks
4154011 May 15, 1979 Rakestraw et al.
4361472 November 30, 1982 Morrison, Jr.
4478437 October 23, 1984 Skinner
5001816 March 26, 1991 Oetiker
5150503 September 29, 1992 Müller
5429070 July 4, 1995 Campbell et al.
5430355 July 4, 1995 Paranjpe
5556501 September 17, 1996 Collins et al.
5637961 June 10, 1997 Ishii et al.
5669975 September 23, 1997 Ashtiani
5681393 October 28, 1997 Takagi
5683537 November 4, 1997 Ishii
5707498 January 13, 1998 Ngan
5721021 February 24, 1998 Tobe et al.
5770098 June 23, 1998 Araki et al.
5783492 July 21, 1998 Higuchi et al
Foreign Patent Documents
0653776 October 1994 EP
0727923 February 1996 EP
0758148 August 1996 EP
0807954 November 1997 EP
0813227 December 1997 EP
0836218 April 1998 EP
0836219 April 1998 EP
0840351 May 1998 EP
0727807 September 1999 EP
Other references
  • Search report in PCT/US98/10058 issued 4Nov98.
  • U.S. Patent Application Serial No. 29/109,892 (Atty. Dkt. 3979D/PVD/DV).
  • U.S. Patent Application Serial No. 29/109,870 (Atty. Dkt. 3980/PVD/DV).
  • U.S. Patent Application Serial No. 29/109,893 (Atty. Dkt. 3981/PVD/DV).
  • U.S Patent Application Serial No. 08/559,345 filed Nov. 15, 1995 (Atty Dkt 938.X1/4479).
  • U.S. Patent Application Serial No. 08/730,722 filed Oct. 8, 1996 (Atty Dkt 1207/4784).
  • U.S. Patent Application Serial No. 09/049,276 Mar. 27, 1998 (Atty Dkt 938.D2/5703).
  • U.S. Patent Application Serial No. 09/049,839 Mar. 27, 1998 (Atty Dkt 938.D1/5702).
  • Applied Materials, Inc., Exhibit A, Dated Prior to Jul. 13, 1998, the filing date of the present application.(Exhibit A is a drawing of a prior art coil design which is prior to the design of the present application.).
Patent History
Patent number: D450070
Type: Grant
Filed: Jul 13, 1998
Date of Patent: Nov 6, 2001
Assignee: Applied Materials, Inc. (Santa Clara, CA)
Inventors: Praburam Gopalraja (San Jose, CA), Zheng Xu (Foster City, CA), Michael Rosenstein (Sunnyvale, CA), John C. Forster (San Francisco, CA)
Primary Examiner: Antoine Duval Davis
Attorney, Agent or Law Firm: Konrad Raynes & Victor
Application Number: 29/090,618
Classifications
Current U.S. Class: Solid Material Melting, E.g., Solder, Etc. (D15/144.2)
International Classification: 1509;