Attracting disc for an electrostatic chuck for semiconductor production
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Description
Claims
The ornamental design for an attracting disc for an electrostatic chuck for semiconductor production, as shown and described.
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Patent History
Patent number: D546784
Type: Grant
Filed: Dec 19, 2005
Date of Patent: Jul 17, 2007
Assignee: Tokyo Electron Limited (Tokyo)
Inventor: Daisuke Hayashi (Nirasaki)
Primary Examiner: Selina Sikder
Attorney: Oblon, Spivak, McClelland, Maier & Neustadt, P.C.
Application Number: 29/245,021
Type: Grant
Filed: Dec 19, 2005
Date of Patent: Jul 17, 2007
Assignee: Tokyo Electron Limited (Tokyo)
Inventor: Daisuke Hayashi (Nirasaki)
Primary Examiner: Selina Sikder
Attorney: Oblon, Spivak, McClelland, Maier & Neustadt, P.C.
Application Number: 29/245,021
Classifications
Current U.S. Class:
Semiconductor, Transistor Or Integrated Circuit (24) (D13/182)