Attracting disc for an electrostatic chuck for semiconductor production
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Description
The broken line showing in the figures is for illustrative purposes only and forms no part of the claimed design.
Claims
The ornamental design for an attracting disc for an electrostatic chuck for semiconductor production, as shown and described.
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Patent History
Patent number: D548200
Type: Grant
Filed: Dec 19, 2005
Date of Patent: Aug 7, 2007
Assignee: Tokyo Electron Limited (Tokyo)
Inventor: Daisuke Hayashi (Nirasaki)
Primary Examiner: Selina Sikder
Attorney: Oblon, Spivak, McClelland, Maier & Neustadt, P.C.
Application Number: 29/245,048
Type: Grant
Filed: Dec 19, 2005
Date of Patent: Aug 7, 2007
Assignee: Tokyo Electron Limited (Tokyo)
Inventor: Daisuke Hayashi (Nirasaki)
Primary Examiner: Selina Sikder
Attorney: Oblon, Spivak, McClelland, Maier & Neustadt, P.C.
Application Number: 29/245,048
Classifications
Current U.S. Class:
Semiconductor, Transistor Or Integrated Circuit (24) (D13/182)